JPS6488139A - Surface inspecting device - Google Patents
Surface inspecting deviceInfo
- Publication number
- JPS6488139A JPS6488139A JP24393887A JP24393887A JPS6488139A JP S6488139 A JPS6488139 A JP S6488139A JP 24393887 A JP24393887 A JP 24393887A JP 24393887 A JP24393887 A JP 24393887A JP S6488139 A JPS6488139 A JP S6488139A
- Authority
- JP
- Japan
- Prior art keywords
- data
- circuit
- value
- register
- defect
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Length Measuring Devices By Optical Means (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
Abstract
PURPOSE:To securely decide a defect in the surface of a body to be inspected by dividing a detection signal by prescribed length, extracting a maximum and a minimum value, comparing a reference value calculated from the extracted maximum and minimum values with a detection signal and deciding the defect. CONSTITUTION:A comparing circuit 2a operates with a timing signal outputted at each scanning period and compares stored data B in a register 4a with detection data A, and the register 4a is stored with gradually increasing data among inspection data A obtained by scanning each specific small area. Similarly, a comparing circuit 2b also operates and a register 4b is stored with gradually decreasing data among the detection data A in order. Then a subtracting circuit 7 subtracts the minimum value from the maximum value of the specific small area, an averaging circuit 8 operates at each period longer than the scanning period to calculate a means value, and a discriminating circuit 9 selects specific information due to the defect among pieces of detection information in consideration of the mean value.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP24393887A JPS6488139A (en) | 1987-09-30 | 1987-09-30 | Surface inspecting device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP24393887A JPS6488139A (en) | 1987-09-30 | 1987-09-30 | Surface inspecting device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6488139A true JPS6488139A (en) | 1989-04-03 |
Family
ID=17111267
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP24393887A Pending JPS6488139A (en) | 1987-09-30 | 1987-09-30 | Surface inspecting device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6488139A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2009288128A (en) * | 2008-05-30 | 2009-12-10 | Mitsubishi Electric Corp | Radar device |
-
1987
- 1987-09-30 JP JP24393887A patent/JPS6488139A/en active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2009288128A (en) * | 2008-05-30 | 2009-12-10 | Mitsubishi Electric Corp | Radar device |
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