JPS6487089A - Laser beam trimming device - Google Patents
Laser beam trimming deviceInfo
- Publication number
- JPS6487089A JPS6487089A JP62243307A JP24330787A JPS6487089A JP S6487089 A JPS6487089 A JP S6487089A JP 62243307 A JP62243307 A JP 62243307A JP 24330787 A JP24330787 A JP 24330787A JP S6487089 A JPS6487089 A JP S6487089A
- Authority
- JP
- Japan
- Prior art keywords
- laser light
- laser
- time
- strength
- laser beam
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Design And Manufacture Of Integrated Circuits (AREA)
- Thin Film Transistor (AREA)
- Mechanical Light Control Or Optical Switches (AREA)
- Laser Beam Processing (AREA)
- Apparatuses And Processes For Manufacturing Resistors (AREA)
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
Abstract
PURPOSE:To execute the working of high accuracy by transmitting a laser light through an optional zone by a variable rectangular slit as well as varying in a extremely short time the strength of a 2nd laser light to be projected next by comparing with the strength of a 1st laser light. CONSTITUTION:The laser light passing a variable slit 7 to the work position of the body 10 to be worked is transmitted in the laser projection range 11 of the work objective body 10. At this time, if necessary, a light reducing means 5 is used to control the power on each laser pulse. In this case, the transmission amt. is controlled by the time of <=50mm. With such composition the working accuracy can be improved.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62243307A JPH0796159B2 (en) | 1987-09-28 | 1987-09-28 | Laser trimming device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62243307A JPH0796159B2 (en) | 1987-09-28 | 1987-09-28 | Laser trimming device |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS6487089A true JPS6487089A (en) | 1989-03-31 |
JPH0796159B2 JPH0796159B2 (en) | 1995-10-18 |
Family
ID=17101887
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP62243307A Expired - Lifetime JPH0796159B2 (en) | 1987-09-28 | 1987-09-28 | Laser trimming device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0796159B2 (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO1992002331A1 (en) * | 1990-07-31 | 1992-02-20 | Materials And Intelligent Devices Reserch Co., Ltd. | Yag laser working machine for precision working of thin film |
JP2002341364A (en) * | 2001-05-16 | 2002-11-27 | Matsushita Electric Ind Co Ltd | Method for manufacturing liquid crystal display panel |
-
1987
- 1987-09-28 JP JP62243307A patent/JPH0796159B2/en not_active Expired - Lifetime
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO1992002331A1 (en) * | 1990-07-31 | 1992-02-20 | Materials And Intelligent Devices Reserch Co., Ltd. | Yag laser working machine for precision working of thin film |
EP0513359B1 (en) * | 1990-07-31 | 1994-07-20 | Materials And Intelligent Devices Research Co., Ltd. | Yag laser working machine for precision working of thin film |
JP2002341364A (en) * | 2001-05-16 | 2002-11-27 | Matsushita Electric Ind Co Ltd | Method for manufacturing liquid crystal display panel |
Also Published As
Publication number | Publication date |
---|---|
JPH0796159B2 (en) | 1995-10-18 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
S111 | Request for change of ownership or part of ownership |
Free format text: JAPANESE INTERMEDIATE CODE: R313113 |
|
R350 | Written notification of registration of transfer |
Free format text: JAPANESE INTERMEDIATE CODE: R350 |
|
EXPY | Cancellation because of completion of term |