JPS6487089A - Laser beam trimming device - Google Patents

Laser beam trimming device

Info

Publication number
JPS6487089A
JPS6487089A JP62243307A JP24330787A JPS6487089A JP S6487089 A JPS6487089 A JP S6487089A JP 62243307 A JP62243307 A JP 62243307A JP 24330787 A JP24330787 A JP 24330787A JP S6487089 A JPS6487089 A JP S6487089A
Authority
JP
Japan
Prior art keywords
laser light
laser
time
strength
laser beam
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP62243307A
Other languages
Japanese (ja)
Other versions
JPH0796159B2 (en
Inventor
Hiroshi Takahara
Hitoshi Noda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP62243307A priority Critical patent/JPH0796159B2/en
Publication of JPS6487089A publication Critical patent/JPS6487089A/en
Publication of JPH0796159B2 publication Critical patent/JPH0796159B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Design And Manufacture Of Integrated Circuits (AREA)
  • Thin Film Transistor (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
  • Laser Beam Processing (AREA)
  • Apparatuses And Processes For Manufacturing Resistors (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)

Abstract

PURPOSE:To execute the working of high accuracy by transmitting a laser light through an optional zone by a variable rectangular slit as well as varying in a extremely short time the strength of a 2nd laser light to be projected next by comparing with the strength of a 1st laser light. CONSTITUTION:The laser light passing a variable slit 7 to the work position of the body 10 to be worked is transmitted in the laser projection range 11 of the work objective body 10. At this time, if necessary, a light reducing means 5 is used to control the power on each laser pulse. In this case, the transmission amt. is controlled by the time of <=50mm. With such composition the working accuracy can be improved.
JP62243307A 1987-09-28 1987-09-28 Laser trimming device Expired - Lifetime JPH0796159B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62243307A JPH0796159B2 (en) 1987-09-28 1987-09-28 Laser trimming device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62243307A JPH0796159B2 (en) 1987-09-28 1987-09-28 Laser trimming device

Publications (2)

Publication Number Publication Date
JPS6487089A true JPS6487089A (en) 1989-03-31
JPH0796159B2 JPH0796159B2 (en) 1995-10-18

Family

ID=17101887

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62243307A Expired - Lifetime JPH0796159B2 (en) 1987-09-28 1987-09-28 Laser trimming device

Country Status (1)

Country Link
JP (1) JPH0796159B2 (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1992002331A1 (en) * 1990-07-31 1992-02-20 Materials And Intelligent Devices Reserch Co., Ltd. Yag laser working machine for precision working of thin film
JP2002341364A (en) * 2001-05-16 2002-11-27 Matsushita Electric Ind Co Ltd Method for manufacturing liquid crystal display panel

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1992002331A1 (en) * 1990-07-31 1992-02-20 Materials And Intelligent Devices Reserch Co., Ltd. Yag laser working machine for precision working of thin film
EP0513359B1 (en) * 1990-07-31 1994-07-20 Materials And Intelligent Devices Research Co., Ltd. Yag laser working machine for precision working of thin film
JP2002341364A (en) * 2001-05-16 2002-11-27 Matsushita Electric Ind Co Ltd Method for manufacturing liquid crystal display panel

Also Published As

Publication number Publication date
JPH0796159B2 (en) 1995-10-18

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