JPS6486528A - Semiconductor inspection device - Google Patents

Abstract

PURPOSE:To attain the shortening of the inspection time, the reduction of overlapping sections, etc., and to realize the inspection of a novel content, in which light and heat corresponding to conditions of electrical application are measured, by providing a means conducting optical discrimination and inspection under a noncontact state, a means for electrically inspecting characteristics through contact and a control means capable of simultaneously controlling both means. CONSTITUTION:A semiconductor integrated circuit 6 is connected to a test-station-head section 3 through an electrically connected contact while being set so as to be optically coupled with noncontacting optical light source section 8 and optical light-receiving section 9. When the starting of an inspection program is indicated to an inspection processing control section 1 from a station-controller 4, an electric measuring module section 2 and a picture information processing section 7 are controlled simultaneously so that inspection conditions according to the inspection program are applied, and the electric measuring module section 2 applies various electric signals under electrical applying conditions to the semiconductor integrated circuit 6 through the test-station- head section 3. The picture information processing section 7 irradiates the semiconductor integrated circuit 6 with an optical signal under optical applying conditions through the optical light source section 8.