JPS6484101A - Laser interference device - Google Patents

Laser interference device

Info

Publication number
JPS6484101A
JPS6484101A JP24317887A JP24317887A JPS6484101A JP S6484101 A JPS6484101 A JP S6484101A JP 24317887 A JP24317887 A JP 24317887A JP 24317887 A JP24317887 A JP 24317887A JP S6484101 A JPS6484101 A JP S6484101A
Authority
JP
Japan
Prior art keywords
light
splitter
reflected
reflector
transmitted
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP24317887A
Other languages
Japanese (ja)
Inventor
Akito Okamoto
Kazuhiro Nishihara
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Idec Izumi Corp
Original Assignee
Idec Izumi Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Idec Izumi Corp filed Critical Idec Izumi Corp
Priority to JP24317887A priority Critical patent/JPS6484101A/en
Publication of JPS6484101A publication Critical patent/JPS6484101A/en
Pending legal-status Critical Current

Links

Landscapes

  • Instruments For Measurement Of Length By Optical Means (AREA)
  • Optical Transform (AREA)

Abstract

PURPOSE:To reduce the size of an optical component by putting laser light beams which pass through the optical component other than a 2nd reflector in parallel into one. CONSTITUTION:First and second beam splitters 36 and 38 are arranged successively, a laser light source 2 emits laser light 4 at right angles to them, and the light is split by a 1st splitter 36 into a 1st transmitted light beam 4a and a 2nd reflected light beam 4b. The reflected light 4b is reflected by a reflector 42 provided on a 1st moving body 44 and returned to the splitter 36 through the same optical path with the incident light, and part of the light is transmitted and made incident on a 2nd splitter 38. Further, the transmitted light 4a is reflected by a 2nd reflector 46 so that incident light and reflected light are independent and in parallel; and the 1st and 2nd light beams 4a and 4b are put one over other by the splitter 38 to form interference fringes. Then, the generated light 4c is separated by a polarization beam splitter 14 into S and P polarized light components 4s and 4p, and detectors 16 and 18 detect the intensity values of mutually independent interference fringes formed with the polarization light components.
JP24317887A 1987-09-28 1987-09-28 Laser interference device Pending JPS6484101A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP24317887A JPS6484101A (en) 1987-09-28 1987-09-28 Laser interference device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP24317887A JPS6484101A (en) 1987-09-28 1987-09-28 Laser interference device

Publications (1)

Publication Number Publication Date
JPS6484101A true JPS6484101A (en) 1989-03-29

Family

ID=17099975

Family Applications (1)

Application Number Title Priority Date Filing Date
JP24317887A Pending JPS6484101A (en) 1987-09-28 1987-09-28 Laser interference device

Country Status (1)

Country Link
JP (1) JPS6484101A (en)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58225301A (en) * 1982-06-24 1983-12-27 Yokogawa Hokushin Electric Corp Optical type displacement measuring apparatus

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58225301A (en) * 1982-06-24 1983-12-27 Yokogawa Hokushin Electric Corp Optical type displacement measuring apparatus

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