JPS6484101A - Laser interference device - Google Patents
Laser interference deviceInfo
- Publication number
- JPS6484101A JPS6484101A JP24317887A JP24317887A JPS6484101A JP S6484101 A JPS6484101 A JP S6484101A JP 24317887 A JP24317887 A JP 24317887A JP 24317887 A JP24317887 A JP 24317887A JP S6484101 A JPS6484101 A JP S6484101A
- Authority
- JP
- Japan
- Prior art keywords
- light
- splitter
- reflected
- reflector
- transmitted
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Instruments For Measurement Of Length By Optical Means (AREA)
- Optical Transform (AREA)
Abstract
PURPOSE:To reduce the size of an optical component by putting laser light beams which pass through the optical component other than a 2nd reflector in parallel into one. CONSTITUTION:First and second beam splitters 36 and 38 are arranged successively, a laser light source 2 emits laser light 4 at right angles to them, and the light is split by a 1st splitter 36 into a 1st transmitted light beam 4a and a 2nd reflected light beam 4b. The reflected light 4b is reflected by a reflector 42 provided on a 1st moving body 44 and returned to the splitter 36 through the same optical path with the incident light, and part of the light is transmitted and made incident on a 2nd splitter 38. Further, the transmitted light 4a is reflected by a 2nd reflector 46 so that incident light and reflected light are independent and in parallel; and the 1st and 2nd light beams 4a and 4b are put one over other by the splitter 38 to form interference fringes. Then, the generated light 4c is separated by a polarization beam splitter 14 into S and P polarized light components 4s and 4p, and detectors 16 and 18 detect the intensity values of mutually independent interference fringes formed with the polarization light components.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP24317887A JPS6484101A (en) | 1987-09-28 | 1987-09-28 | Laser interference device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP24317887A JPS6484101A (en) | 1987-09-28 | 1987-09-28 | Laser interference device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6484101A true JPS6484101A (en) | 1989-03-29 |
Family
ID=17099975
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP24317887A Pending JPS6484101A (en) | 1987-09-28 | 1987-09-28 | Laser interference device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6484101A (en) |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS58225301A (en) * | 1982-06-24 | 1983-12-27 | Yokogawa Hokushin Electric Corp | Optical type displacement measuring apparatus |
-
1987
- 1987-09-28 JP JP24317887A patent/JPS6484101A/en active Pending
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS58225301A (en) * | 1982-06-24 | 1983-12-27 | Yokogawa Hokushin Electric Corp | Optical type displacement measuring apparatus |
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