JPS6480909A - Optical device manufacturing device - Google Patents
Optical device manufacturing deviceInfo
- Publication number
- JPS6480909A JPS6480909A JP62237954A JP23795487A JPS6480909A JP S6480909 A JPS6480909 A JP S6480909A JP 62237954 A JP62237954 A JP 62237954A JP 23795487 A JP23795487 A JP 23795487A JP S6480909 A JPS6480909 A JP S6480909A
- Authority
- JP
- Japan
- Prior art keywords
- laser light
- pattern data
- scanning
- light beam
- lithography
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Optical Integrated Circuits (AREA)
Abstract
PURPOSE:To facilitate scanning by scanning a laser light beam for lithography and a laser light beam for annealing on a substrate according to common pattern data. CONSTITUTION:The laser light beam for lithography and laser light beam for annealing emitted by a 1st light source 1 and a 2nd light source 2 are supplied selectively to a light converging means 8. Then a control circuit 15 moves the substrate B irradiated with both light beams converged by a converging means 8 respectively in its surface direction according to one pattern data stored in a storage part, and also positions it. Thus, the laser light beams are scanned on the substrate B according to the common pattern data, so pattern data for scanning need not be used individually for the lithography and annealing and the scanning is facilitated.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62237954A JP2614239B2 (en) | 1987-09-22 | 1987-09-22 | Optical device manufacturing equipment |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62237954A JP2614239B2 (en) | 1987-09-22 | 1987-09-22 | Optical device manufacturing equipment |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS6480909A true JPS6480909A (en) | 1989-03-27 |
JP2614239B2 JP2614239B2 (en) | 1997-05-28 |
Family
ID=17022928
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP62237954A Expired - Lifetime JP2614239B2 (en) | 1987-09-22 | 1987-09-22 | Optical device manufacturing equipment |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP2614239B2 (en) |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS60156014A (en) * | 1983-12-27 | 1985-08-16 | Omron Tateisi Electronics Co | Production of flush type optical waveguide device |
JPS6128940A (en) * | 1984-07-20 | 1986-02-08 | Nippon Telegr & Teleph Corp <Ntt> | Method and device for forming fine pattern |
-
1987
- 1987-09-22 JP JP62237954A patent/JP2614239B2/en not_active Expired - Lifetime
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS60156014A (en) * | 1983-12-27 | 1985-08-16 | Omron Tateisi Electronics Co | Production of flush type optical waveguide device |
JPS6128940A (en) * | 1984-07-20 | 1986-02-08 | Nippon Telegr & Teleph Corp <Ntt> | Method and device for forming fine pattern |
Also Published As
Publication number | Publication date |
---|---|
JP2614239B2 (en) | 1997-05-28 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
US5637244A (en) | Method and apparatus for creating an image by a pulsed laser beam inside a transparent material | |
ATE191296T1 (en) | IMAGE PRODUCING DEVICE | |
EP0454152A3 (en) | Method of manufacturing nozzle plate for ink jet printer | |
WO2002034446A3 (en) | Method and apparatus for multi-beam laser machining | |
EP0586804A3 (en) | Laser apparatus | |
KR950015550A (en) | Scanning irradiation apparatus and device manufacturing method using same | |
CN100459819C (en) | Laser irradiation apparatus and method of fabricating organic light emitting display using the same | |
EP0324364A3 (en) | A laser optical apparatus | |
JPS55129313A (en) | Light deflector | |
EP0624421A2 (en) | Method and apparatus for creating an image by a pulsed laser beam inside a transparent material | |
JPS561018A (en) | Light beam scanner | |
JPS6480909A (en) | Optical device manufacturing device | |
JPS52119331A (en) | Laser recording device | |
EP0372943A3 (en) | Enhanced resolution electrophotographic-type imaging station | |
CA2077813A1 (en) | Apparatus and method for spot position control in an output device employing a linear array of light sources | |
JPS5651528A (en) | Method of improving iron loss value of magnetic steel sheet and its device | |
JPS5728693A (en) | Film opening device | |
JPS5529886A (en) | Light source for optical information recorder | |
JPS6429877A (en) | Energy modulating device for semiconductor laser | |
JPS57202992A (en) | Laser engraving device | |
JPS5650521A (en) | Annealing device for semiconductor wafer using laser beam | |
JP2001079674A (en) | Marking device | |
JPS57142785A (en) | Automatic marking device | |
JPS56118340A (en) | Pattern formation device by laser | |
JPS6432430A (en) | Optical recording and reproducing device |