JPS6478249A - Photosensitive material and image forming method - Google Patents
Photosensitive material and image forming methodInfo
- Publication number
- JPS6478249A JPS6478249A JP23454987A JP23454987A JPS6478249A JP S6478249 A JPS6478249 A JP S6478249A JP 23454987 A JP23454987 A JP 23454987A JP 23454987 A JP23454987 A JP 23454987A JP S6478249 A JPS6478249 A JP S6478249A
- Authority
- JP
- Japan
- Prior art keywords
- heating
- compd
- photosensitive layer
- exposed
- exposure
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/022—Quinonediazides
- G03F7/0226—Quinonediazides characterised by the non-macromolecular additives
Landscapes
- Physics & Mathematics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- General Physics & Mathematics (AREA)
- Photosensitive Polymer And Photoresist Processing (AREA)
Abstract
PURPOSE:To enlarge the allowable range of heating at the time of forming a negative image by providing a photosensitive layer contg. a specified compd. and an org. base, in the titled material. CONSTITUTION:The photosensitive copying material comprises the photosensitive layer consisting at least one kind of a compd. selected from the group composed of an ester and an amide of 2-benzoquinone-2-diazide-4-sulfonic acid, as an o-quinone diazide compd., and the org. base. Said material is imagewisely exposed, and then, is wholly exposed by heating, followed by developing the exposed material with an alkaline developer to remove the photosensitive layer corresponding to an unexposed part in the image-wise exposure. Thus, in the negative type image formation comprising the imagewise exposure, the heating, the whole exposure and the alkaline development, the allowable range of the heating is enlarged.
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP23454987A JPS6478249A (en) | 1987-09-18 | 1987-09-18 | Photosensitive material and image forming method |
GB8820926A GB2210172A (en) | 1987-09-18 | 1988-09-06 | Light-sensitive material and method for forming images |
DE19883831290 DE3831290A1 (en) | 1987-09-18 | 1988-09-14 | LIGHT-SENSITIVE MATERIAL AND PICTURE-MAKING METHOD |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP23454987A JPS6478249A (en) | 1987-09-18 | 1987-09-18 | Photosensitive material and image forming method |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6478249A true JPS6478249A (en) | 1989-03-23 |
Family
ID=16972764
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP23454987A Pending JPS6478249A (en) | 1987-09-18 | 1987-09-18 | Photosensitive material and image forming method |
Country Status (3)
Country | Link |
---|---|
JP (1) | JPS6478249A (en) |
DE (1) | DE3831290A1 (en) |
GB (1) | GB2210172A (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH03142918A (en) * | 1989-10-30 | 1991-06-18 | Matsushita Electron Corp | Formation of resist pattern |
US6806020B2 (en) | 2001-08-21 | 2004-10-19 | Kodak Polychrome Graphics Llc | Negative working imageable composition containing sulfonic acid |
US6921620B2 (en) | 2001-08-21 | 2005-07-26 | Kodak Polychrome Graphics Llc | Imageable composition containing colorant having a counter anion derived from a non-volatile acid |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3010607B2 (en) * | 1992-02-25 | 2000-02-21 | ジェイエスアール株式会社 | Radiation-sensitive resin composition |
US5580695A (en) * | 1992-02-25 | 1996-12-03 | Japan Synthetic Rubber Co., Ltd. | Chemically amplified resist |
Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5036209A (en) * | 1973-06-20 | 1975-04-05 | ||
JPS526528A (en) * | 1975-06-30 | 1977-01-19 | Ibm | Method of forming resist film |
JPS5559456A (en) * | 1978-10-25 | 1980-05-02 | Fuji Photo Film Co Ltd | Electron beam recording method |
JPS5560944A (en) * | 1978-10-31 | 1980-05-08 | Fuji Photo Film Co Ltd | Image forming method |
JPS5636648A (en) * | 1979-09-03 | 1981-04-09 | Fuji Photo Film Co Ltd | Photosensitive material and pattern forming method using it |
JPS57111531A (en) * | 1980-10-24 | 1982-07-12 | Hoechst Ag | Photosensitive mixture and photosensitive copying material manufactured from said mixture |
JPS57114138A (en) * | 1980-11-21 | 1982-07-15 | Hoechst Ag | Photosensitive mixture and copying material |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
NL125781C (en) * | 1959-02-04 | |||
US3661582A (en) * | 1970-03-23 | 1972-05-09 | Western Electric Co | Additives to positive photoresists which increase the sensitivity thereof |
JPS5614970B2 (en) * | 1974-02-01 | 1981-04-07 | ||
DE3325022A1 (en) * | 1983-07-11 | 1985-01-24 | Hoechst Ag, 6230 Frankfurt | METHOD FOR PRODUCING NEGATIVE COPIES BY MEANS OF A MATERIAL BASED ON 1,2-CHINONDIAZIDES |
JPS6235350A (en) * | 1985-08-07 | 1987-02-16 | インタ−ナショナル ビジネス マシ−ンズ コ−ポレ−ション | Photoresist with longer preservation life useful for image inversion |
-
1987
- 1987-09-18 JP JP23454987A patent/JPS6478249A/en active Pending
-
1988
- 1988-09-06 GB GB8820926A patent/GB2210172A/en not_active Withdrawn
- 1988-09-14 DE DE19883831290 patent/DE3831290A1/en not_active Withdrawn
Patent Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5036209A (en) * | 1973-06-20 | 1975-04-05 | ||
JPS526528A (en) * | 1975-06-30 | 1977-01-19 | Ibm | Method of forming resist film |
JPS5559456A (en) * | 1978-10-25 | 1980-05-02 | Fuji Photo Film Co Ltd | Electron beam recording method |
JPS5560944A (en) * | 1978-10-31 | 1980-05-08 | Fuji Photo Film Co Ltd | Image forming method |
JPS5636648A (en) * | 1979-09-03 | 1981-04-09 | Fuji Photo Film Co Ltd | Photosensitive material and pattern forming method using it |
JPS57111531A (en) * | 1980-10-24 | 1982-07-12 | Hoechst Ag | Photosensitive mixture and photosensitive copying material manufactured from said mixture |
JPS57114138A (en) * | 1980-11-21 | 1982-07-15 | Hoechst Ag | Photosensitive mixture and copying material |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH03142918A (en) * | 1989-10-30 | 1991-06-18 | Matsushita Electron Corp | Formation of resist pattern |
US6806020B2 (en) | 2001-08-21 | 2004-10-19 | Kodak Polychrome Graphics Llc | Negative working imageable composition containing sulfonic acid |
US6921620B2 (en) | 2001-08-21 | 2005-07-26 | Kodak Polychrome Graphics Llc | Imageable composition containing colorant having a counter anion derived from a non-volatile acid |
Also Published As
Publication number | Publication date |
---|---|
GB8820926D0 (en) | 1988-10-05 |
GB2210172A (en) | 1989-06-01 |
DE3831290A1 (en) | 1989-04-06 |
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