JPS6468934A - Brush scrubber apparatus - Google Patents

Abstract

PURPOSE:To decrease re-attachment of dust to the surface of a semiconductor substrate, by displacing the semiconductor substrate along a straight line, and wiping out the dust on the upper and rear surfaces of the semiconductor substrate during this movement with nozzles and brushes. CONSTITUTION:Arms 4a and 4b, on which a semiconductor substrate 1 is mounted, is moved from a position A to a position B and a position C along a conveying line. When, the semiconductor substrate 1 moves on the position B, pure water is jetted toward the surface of the semiconductor substrate 1 through shower nozzles 3. The surface of the substrate 1 is wiped out with a rotary brush 2. At the same time pure water is jetted toward the rear surface through shower nozzles 5. The rear surface of the substrate 1 is wiped out with a rotary brush 6. Thus dust, which is attached on the upper and rear surfaces of the substrate 1 is removed at the same time.