JPS646813A - Coordinate measuring instrument - Google Patents

Coordinate measuring instrument

Info

Publication number
JPS646813A
JPS646813A JP62162594A JP16259487A JPS646813A JP S646813 A JPS646813 A JP S646813A JP 62162594 A JP62162594 A JP 62162594A JP 16259487 A JP16259487 A JP 16259487A JP S646813 A JPS646813 A JP S646813A
Authority
JP
Japan
Prior art keywords
measuring element
movement
movement information
generating device
information generating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP62162594A
Other languages
Japanese (ja)
Other versions
JPH0830652B2 (en
Inventor
Osamu Arai
Fusao Shimizu
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nikon Corp
Original Assignee
Nikon Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nikon Corp filed Critical Nikon Corp
Priority to JP62162594A priority Critical patent/JPH0830652B2/en
Publication of JPS646813A publication Critical patent/JPS646813A/en
Publication of JPH0830652B2 publication Critical patent/JPH0830652B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices With Unspecified Measuring Means (AREA)
  • Position Input By Displaying (AREA)

Abstract

PURPOSE:To easily and securely perform probing to a fine shape on a body to be measured by moving a measuring element under the control of a movement information generating device nearby the measuring element. CONSTITUTION:Three-axial movement information which contains speed information and direction information from a movement information generating device 2 is outputted to a movement controller 7. The movement controller 7 outputs movement command signals to driving devices for respective axes according to the movement information from the movement information generating device 2. Namely, when the probing to the body 8 to be measured on a surface plate 6 by using the measuring element 1, the movement information generating device 2 nearby the measuring element 1 is gripped and operated to move the measuring element 1 to an optional position. Consequently, the probing to the fine shape on the body 8 to be measured is easily and securely performed.
JP62162594A 1987-06-30 1987-06-30 Coordinate measuring machine Expired - Lifetime JPH0830652B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62162594A JPH0830652B2 (en) 1987-06-30 1987-06-30 Coordinate measuring machine

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62162594A JPH0830652B2 (en) 1987-06-30 1987-06-30 Coordinate measuring machine

Publications (2)

Publication Number Publication Date
JPS646813A true JPS646813A (en) 1989-01-11
JPH0830652B2 JPH0830652B2 (en) 1996-03-27

Family

ID=15757559

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62162594A Expired - Lifetime JPH0830652B2 (en) 1987-06-30 1987-06-30 Coordinate measuring machine

Country Status (1)

Country Link
JP (1) JPH0830652B2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007087012A (en) * 2005-09-21 2007-04-05 Tokai Rika Co Ltd Input device

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61235714A (en) * 1985-04-11 1986-10-21 Nippon Kogaku Kk <Nikon> Driving device by work coordinate system

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61235714A (en) * 1985-04-11 1986-10-21 Nippon Kogaku Kk <Nikon> Driving device by work coordinate system

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007087012A (en) * 2005-09-21 2007-04-05 Tokai Rika Co Ltd Input device

Also Published As

Publication number Publication date
JPH0830652B2 (en) 1996-03-27

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