JPS6464313A - Vapor growth apparatus - Google Patents
Vapor growth apparatusInfo
- Publication number
- JPS6464313A JPS6464313A JP22143887A JP22143887A JPS6464313A JP S6464313 A JPS6464313 A JP S6464313A JP 22143887 A JP22143887 A JP 22143887A JP 22143887 A JP22143887 A JP 22143887A JP S6464313 A JPS6464313 A JP S6464313A
- Authority
- JP
- Japan
- Prior art keywords
- coil
- plate
- base
- recess
- susceptor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
PURPOSE:To hold an RF coil at an accurate position by bringing the inner periphery of the coil into contact with a post, preventing the coil from radially deforming, and engaging and positioning a mounting plate with and at a base. CONSTITUTION:A positioning recess 1a is formed on the upper face of a base 1, a mounting plate 21 is engaged and positioned, and clamped with screws 31. A plurality of pots 22 of insulator and formed of a material having high mechanical strength are stood on the plate 21, and an RF coil 23 is so held as to be brought into contact at its inner periphery. A bracket 26 is mounted on the plate 21 with bolts 30, 30 to secure the lower parts of the posts 22. Further, a spacer 33 is interposed between the upper ends of the posts 22 to prevent the coil 23 from radially displacing. When the plate 21 is engaged within the recess 1a of the base 1, a predetermined gap is formed to a susceptor 4. Accordingly, the coil 22 and the susceptor 4 can be automatically centered merely by engaging the plate 21 within the recess 1a of the base 1, thereby eliminating the displacement of its position due to a vibration or the like.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP22143887A JPS6464313A (en) | 1987-09-04 | 1987-09-04 | Vapor growth apparatus |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP22143887A JPS6464313A (en) | 1987-09-04 | 1987-09-04 | Vapor growth apparatus |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6464313A true JPS6464313A (en) | 1989-03-10 |
Family
ID=16766742
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP22143887A Pending JPS6464313A (en) | 1987-09-04 | 1987-09-04 | Vapor growth apparatus |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6464313A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2009012081A (en) * | 2007-06-29 | 2009-01-22 | Denso Corp | Mechanism and method for chucking workpiece having already machined portion |
-
1987
- 1987-09-04 JP JP22143887A patent/JPS6464313A/en active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2009012081A (en) * | 2007-06-29 | 2009-01-22 | Denso Corp | Mechanism and method for chucking workpiece having already machined portion |
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