JPS6464313A - Vapor growth apparatus - Google Patents

Abstract

PURPOSE:To hold an RF coil at an accurate position by bringing the inner periphery of the coil into contact with a post, preventing the coil from radially deforming, and engaging and positioning a mounting plate with and at a base. CONSTITUTION:A positioning recess 1a is formed on the upper face of a base 1, a mounting plate 21 is engaged and positioned, and clamped with screws 31. A plurality of pots 22 of insulator and formed of a material having high mechanical strength are stood on the plate 21, and an RF coil 23 is so held as to be brought into contact at its inner periphery. A bracket 26 is mounted on the plate 21 with bolts 30, 30 to secure the lower parts of the posts 22. Further, a spacer 33 is interposed between the upper ends of the posts 22 to prevent the coil 23 from radially displacing. When the plate 21 is engaged within the recess 1a of the base 1, a predetermined gap is formed to a susceptor 4. Accordingly, the coil 22 and the susceptor 4 can be automatically centered merely by engaging the plate 21 within the recess 1a of the base 1, thereby eliminating the displacement of its position due to a vibration or the like.