JPS64637A - Secondary electron detection device - Google Patents
Secondary electron detection deviceInfo
- Publication number
- JPS64637A JPS64637A JP62156131A JP15613187A JPS64637A JP S64637 A JPS64637 A JP S64637A JP 62156131 A JP62156131 A JP 62156131A JP 15613187 A JP15613187 A JP 15613187A JP S64637 A JPS64637 A JP S64637A
- Authority
- JP
- Japan
- Prior art keywords
- cylindrical mesh
- scintillator
- detection device
- secondary electron
- optical axis
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001514 detection method Methods 0.000 title abstract 2
- 230000005684 electric field Effects 0.000 abstract 2
- 230000003287 optical effect Effects 0.000 abstract 2
- 230000001133 acceleration Effects 0.000 abstract 1
Landscapes
- Analysing Materials By The Use Of Radiation (AREA)
- Measurement Of Radiation (AREA)
Abstract
PURPOSE: To dissolve a problem of uneven brightness by a cylindrical mesh for to encircling an optical axis in a position opposing to the scintillator of a magnetic adjusting tube in its front space and by making the end part of a collector cover surrounding the scintillator larger than the diameter of a corona ring and not coming in front of it.
CONSTITUTION: An axially-symmetrical type cylindrical mesh 8 is arranged in front of a scintillator 6. Further, a collector cover 4 is so made that its end part may be larger than the diameter of a corona ring electrode 5 and may not come in front of it. When a secondary electron detection device is constituted in this way, distribution of an electric field comes to be stuck along a cylindrical mesh 8 because of the projecting electric field due to the ring 5 so that the inside of the cylindrical mesh 8 including an optical axis is electrostatically shielded. Accordingly, a problem of uneven brightness is dissolved and also any strain and image movement, due to acceleration voltage change changed, can be reduced.
COPYRIGHT: (C)1989,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62156131A JPS64637A (en) | 1987-06-23 | 1987-06-23 | Secondary electron detection device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62156131A JPS64637A (en) | 1987-06-23 | 1987-06-23 | Secondary electron detection device |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH01637A JPH01637A (en) | 1989-01-05 |
JPS64637A true JPS64637A (en) | 1989-01-05 |
Family
ID=15621000
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP62156131A Pending JPS64637A (en) | 1987-06-23 | 1987-06-23 | Secondary electron detection device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS64637A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH05266855A (en) * | 1992-03-19 | 1993-10-15 | Hitachi Ltd | Scanning electronic microscope |
-
1987
- 1987-06-23 JP JP62156131A patent/JPS64637A/en active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH05266855A (en) * | 1992-03-19 | 1993-10-15 | Hitachi Ltd | Scanning electronic microscope |
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