JPS64637A - Secondary electron detection device - Google Patents

Secondary electron detection device

Info

Publication number
JPS64637A
JPS64637A JP62156131A JP15613187A JPS64637A JP S64637 A JPS64637 A JP S64637A JP 62156131 A JP62156131 A JP 62156131A JP 15613187 A JP15613187 A JP 15613187A JP S64637 A JPS64637 A JP S64637A
Authority
JP
Japan
Prior art keywords
cylindrical mesh
scintillator
detection device
secondary electron
optical axis
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP62156131A
Other languages
Japanese (ja)
Other versions
JPH01637A (en
Inventor
Junichi Oyama
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Jeol Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jeol Ltd filed Critical Jeol Ltd
Priority to JP62156131A priority Critical patent/JPS64637A/en
Publication of JPH01637A publication Critical patent/JPH01637A/en
Publication of JPS64637A publication Critical patent/JPS64637A/en
Pending legal-status Critical Current

Links

Landscapes

  • Analysing Materials By The Use Of Radiation (AREA)
  • Measurement Of Radiation (AREA)

Abstract

PURPOSE: To dissolve a problem of uneven brightness by a cylindrical mesh for to encircling an optical axis in a position opposing to the scintillator of a magnetic adjusting tube in its front space and by making the end part of a collector cover surrounding the scintillator larger than the diameter of a corona ring and not coming in front of it.
CONSTITUTION: An axially-symmetrical type cylindrical mesh 8 is arranged in front of a scintillator 6. Further, a collector cover 4 is so made that its end part may be larger than the diameter of a corona ring electrode 5 and may not come in front of it. When a secondary electron detection device is constituted in this way, distribution of an electric field comes to be stuck along a cylindrical mesh 8 because of the projecting electric field due to the ring 5 so that the inside of the cylindrical mesh 8 including an optical axis is electrostatically shielded. Accordingly, a problem of uneven brightness is dissolved and also any strain and image movement, due to acceleration voltage change changed, can be reduced.
COPYRIGHT: (C)1989,JPO&Japio
JP62156131A 1987-06-23 1987-06-23 Secondary electron detection device Pending JPS64637A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62156131A JPS64637A (en) 1987-06-23 1987-06-23 Secondary electron detection device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62156131A JPS64637A (en) 1987-06-23 1987-06-23 Secondary electron detection device

Publications (2)

Publication Number Publication Date
JPH01637A JPH01637A (en) 1989-01-05
JPS64637A true JPS64637A (en) 1989-01-05

Family

ID=15621000

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62156131A Pending JPS64637A (en) 1987-06-23 1987-06-23 Secondary electron detection device

Country Status (1)

Country Link
JP (1) JPS64637A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05266855A (en) * 1992-03-19 1993-10-15 Hitachi Ltd Scanning electronic microscope

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05266855A (en) * 1992-03-19 1993-10-15 Hitachi Ltd Scanning electronic microscope

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