JPS6460988A - Heat treatment furnace for semiconductor substrate - Google Patents

Abstract

PURPOSE:To reduce the bending force acting to a furnace core tube and to prevent the generation of a bending or a distortion of the furnace core tube by holding the furnace core tube as a whole in the direction of the tube axis with plural projections furnished at rod-form holding members. CONSTITUTION:At the outer periphery of spacers 7 of plural rod-form holding members 4, tube-from furnace core tube holders 9 are installed to compose projections to hold dispersively a furnace core tube as a whole in the tube axis direction. These furnace core tube holders 9 are not necessarily installed to all the spacers 7, but at least to the spacers 7 positioned at both ends and at the center of the furnace core tube 1, making it possible to reduce the bending force to act to the furnace core tube 1 and to position the tube axis of the furnace core tube 1 unifying to the center axis of a belt-form heater 6. In this case, for the cooling purpose, a suction port 10a and an exhaust port 10b furnished at both ends of an outer tube body 3 respectively are linked to air flowing holes furnished at fixing flanges 5a and 5b, the cooling air for a blower 11 is let flow through a clearance between the furnace core tube 1 and the outer tube body 3, and exhausted to the port 10b, making the temperature of the furnace core tube 1 dropped rapidly.