JPS6458947A - Clean room - Google Patents

Clean room

Info

Publication number
JPS6458947A
JPS6458947A JP21676387A JP21676387A JPS6458947A JP S6458947 A JPS6458947 A JP S6458947A JP 21676387 A JP21676387 A JP 21676387A JP 21676387 A JP21676387 A JP 21676387A JP S6458947 A JPS6458947 A JP S6458947A
Authority
JP
Japan
Prior art keywords
clean room
computer
signal
sends
damper
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP21676387A
Other languages
Japanese (ja)
Inventor
Koichi Tsuzuki
Nobuo Tsumaki
Motoo Uno
Kenji Otaka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP21676387A priority Critical patent/JPS6458947A/en
Publication of JPS6458947A publication Critical patent/JPS6458947A/en
Pending legal-status Critical Current

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  • Ventilation (AREA)

Abstract

PURPOSE:To make it possible to keep air current distribution in the optimum condition all the time and maintain the high level of cleanliness in a clean room by a method wherein the position or the speed of a moving object existing in the clean room is detected and air current control is dynamically carried out in response to such detection. CONSTITUTION:In each of small sections of a clean room, a detecting device 20 detects the presence of a moving object within the small section, and according to such detection, the adjustment for the number of revolutions or a fan 5, the opening and closing of the damper of a grating floor 3 and the opening and closing of the damper of a damper partition 7 are carried out so that air current distribution is controlled to be always in the optimum condition. A control computer system is of hierarchical structure. A computer 35 in the small section receives a signal S1 released out of the detecting device 20 and, in response to the received signal, sends a control signal S2 to the small section. A sectional clean room computer 34 calculates the relative velocity of each of the moving objects within the sectional clean room and sends the signal of control contents to the computer 35 in each of the small sections. Further, said computer 35 sends the signal of indicating a condition at respective moments to a main computer 33.
JP21676387A 1987-08-31 1987-08-31 Clean room Pending JPS6458947A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP21676387A JPS6458947A (en) 1987-08-31 1987-08-31 Clean room

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP21676387A JPS6458947A (en) 1987-08-31 1987-08-31 Clean room

Publications (1)

Publication Number Publication Date
JPS6458947A true JPS6458947A (en) 1989-03-06

Family

ID=16693525

Family Applications (1)

Application Number Title Priority Date Filing Date
JP21676387A Pending JPS6458947A (en) 1987-08-31 1987-08-31 Clean room

Country Status (1)

Country Link
JP (1) JPS6458947A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2020112853A (en) * 2019-01-08 2020-07-27 株式会社竹中工務店 Behavior grasp system

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2020112853A (en) * 2019-01-08 2020-07-27 株式会社竹中工務店 Behavior grasp system

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