JPS6458947A - Clean room - Google Patents
Clean roomInfo
- Publication number
- JPS6458947A JPS6458947A JP21676387A JP21676387A JPS6458947A JP S6458947 A JPS6458947 A JP S6458947A JP 21676387 A JP21676387 A JP 21676387A JP 21676387 A JP21676387 A JP 21676387A JP S6458947 A JPS6458947 A JP S6458947A
- Authority
- JP
- Japan
- Prior art keywords
- clean room
- computer
- signal
- sends
- damper
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Ventilation (AREA)
Abstract
PURPOSE:To make it possible to keep air current distribution in the optimum condition all the time and maintain the high level of cleanliness in a clean room by a method wherein the position or the speed of a moving object existing in the clean room is detected and air current control is dynamically carried out in response to such detection. CONSTITUTION:In each of small sections of a clean room, a detecting device 20 detects the presence of a moving object within the small section, and according to such detection, the adjustment for the number of revolutions or a fan 5, the opening and closing of the damper of a grating floor 3 and the opening and closing of the damper of a damper partition 7 are carried out so that air current distribution is controlled to be always in the optimum condition. A control computer system is of hierarchical structure. A computer 35 in the small section receives a signal S1 released out of the detecting device 20 and, in response to the received signal, sends a control signal S2 to the small section. A sectional clean room computer 34 calculates the relative velocity of each of the moving objects within the sectional clean room and sends the signal of control contents to the computer 35 in each of the small sections. Further, said computer 35 sends the signal of indicating a condition at respective moments to a main computer 33.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP21676387A JPS6458947A (en) | 1987-08-31 | 1987-08-31 | Clean room |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP21676387A JPS6458947A (en) | 1987-08-31 | 1987-08-31 | Clean room |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6458947A true JPS6458947A (en) | 1989-03-06 |
Family
ID=16693525
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP21676387A Pending JPS6458947A (en) | 1987-08-31 | 1987-08-31 | Clean room |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6458947A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2020112853A (en) * | 2019-01-08 | 2020-07-27 | 株式会社竹中工務店 | Behavior grasp system |
-
1987
- 1987-08-31 JP JP21676387A patent/JPS6458947A/en active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2020112853A (en) * | 2019-01-08 | 2020-07-27 | 株式会社竹中工務店 | Behavior grasp system |
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