JPS6457644U

JPS6457644U -

Info

Publication number: JPS6457644U
Application number: JP15259387U
Authority: JP
Priority date: 1987-10-05
Filing date: 1987-10-05
Publication date: 1989-04-10

Description

【図面の簡単な説明】[Brief explanation of drawings]

第１図は本考案の一実施例を示すＬＳＩ試験機
の構成図、第２図は従来のＬＳＩ試験機の構成例
を示した図、第３図は他のプローブカードの例を
示した図、である。図において、３ａ〜３ｄは探針、３ａ′〜３ｄ
′はスルーホール、４ａ〜４ｄは取り付け具、７
はテスタヘツド、８は電源供給ピン、９ａ〜９ｄ
は信号入出力ピン、１０，１０′は基準孔、１１
，１１′はガイドピン、１２はテーブル、２１は
プローブカード、２２はプリント基板、２２ａ〜
２２ｄは導体、２３は導体、２３′はスルーホー
ル、２３ａ′〜２３ｄ′はスルーホール、２４ａ
〜２４ｄはパツド、２５は電源用パツド、２５′
はスルーホール、２６は電源リング基板、２６ａ
′〜２６ｄ′，２６ａ″〜２６ｄ″は貫通孔、２
７は電源用コンタクトピン、２８はコンタクトピ
ン、３１はウエハ、３２はＬＳＩチツプ、３２ａ
〜３２ｄはボンデイングパツド、をそれぞれ表わ
す。 Fig. 1 is a diagram showing the configuration of an LSI testing machine that is an embodiment of the present invention, Fig. 2 is a diagram showing an example of the configuration of a conventional LSI testing machine, and Fig. 3 is a diagram showing an example of another probe card. , is. In the figure, 3a to 3d are probes, 3a' to 3d
' is a through hole, 4a to 4d are attachments, 7
is the tester head, 8 is the power supply pin, 9a to 9d
are signal input/output pins, 10, 10' are reference holes, 11
, 11' is a guide pin, 12 is a table, 21 is a probe card, 22 is a printed circuit board, 22a~
22d is a conductor, 23 is a conductor, 23' is a through hole, 23a' to 23d' are through holes, 24a
~24d is pad, 25 is power pad, 25'
is a through hole, 26 is a power ring board, 26a
'~26d', 26a''~26d'' are through holes, 2
7 is a power supply contact pin, 28 is a contact pin, 31 is a wafer, 32 is an LSI chip, 32a
-32d represent bonding pads, respectively.

Claims

【実用新案登録請求の範囲】テーブル上に載置したＬＳＩチツプに設けてあ
る複数のボンデイングパツトにプローブカードの
下面に備えた複数の探針を圧接すると共に、該プ
ローブカード上面に設けてある複数のパツドにテ
スタヘツドの信号入出力ピンと電源供給ピンとを
圧接して前記ＬＳＩチツプを試験する試験機にお
いて、上記プローブカードが電源リング基板２６とプ
リント基板２２との組合せによつて構成されてお
り、該電源リング基板２６には該基板に一体化固定
してある電源用コンタクトピン２７と、着脱自在な複数個のコンタクトピン２８および
該コンタクトピン２８用の複数組の貫通孔２６ａ
′と２６ａ″〜２６ｄ′と２６ｄ″と、を備え、またプリント基板２２には、電源用コンタクトピン２７の一端が挿入される
スルーホール２５′を備えた電源用パツド２５と
、電源用コンタクトピン２７の他端が挿入される
スルーホール２３′とコンタクトピン２８の一端
が挿入される複数のスルーホール２３ａ′〜２３
ｄ′を備えた導体２３と、コンタククトピン２８の他端が挿入される複数
のスルーホール３ａ′〜３ｄ′を備えた複数のパ
ツド２４ａ〜２４ｄと、を上面に、また下面には複数の探針３ａ〜３ｄを備えて構
成されることを特徴とするＬＳＩ試験機。[Claims for Utility Model Registration] A plurality of probes provided on the bottom surface of a probe card are pressed against a plurality of bonding pads provided on an LSI chip placed on a table. In the testing machine for testing the LSI chip by pressing the signal input/output pins and power supply pins of the tester head onto the pads of the tester, the probe card is constituted by a combination of a power ring board 26 and a printed circuit board 22, and The power ring board 26 includes a power contact pin 27 that is integrally fixed to the board, a plurality of removable contact pins 28, and a plurality of sets of through holes 26a for the contact pins 28.
', 26a'' to 26d' and 26d'', and the printed circuit board 22 includes a power supply pad 25 having a through hole 25' into which one end of a power supply contact pin 27 is inserted, and a power supply contact pin. A through hole 23' into which the other end of the contact pin 27 is inserted and a plurality of through holes 23a' to 23 into which one end of the contact pin 28 is inserted.
d', and a plurality of pads 24a to 24d each having a plurality of through holes 3a' to 3d' into which the other end of the contact pin 28 is inserted. An LSI testing machine comprising probes 3a to 3d.