JPS6454711A - Manufacture of ruthenium oxide group thin-film - Google Patents
Manufacture of ruthenium oxide group thin-filmInfo
- Publication number
- JPS6454711A JPS6454711A JP62212008A JP21200887A JPS6454711A JP S6454711 A JPS6454711 A JP S6454711A JP 62212008 A JP62212008 A JP 62212008A JP 21200887 A JP21200887 A JP 21200887A JP S6454711 A JPS6454711 A JP S6454711A
- Authority
- JP
- Japan
- Prior art keywords
- film
- oxide group
- substrate
- group thin
- manufacture
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
PURPOSE:To obtain the uniform surface of a film by applying the mixed solution of a compound containing Ru and a compound containing Ba or/and Sr in structure onto a base body and drying the mixed solution and baking a substrate. CONSTITUTION:A compound containing Ru in structure is dissolved into an organic solvent, an alcohol group compound is added to the solvent and Ba or Sr is added and melted. The coating fluid is applied onto a substrate, and dried. The substrate is heated and baked, thus acquiring a Ru oxide group thin-film. The coating fluid having the desired composition of a metal is obtained by using the method, the range of the selectivity of the Ru compound is widened, and the Ru oxide group thin-film, the surface of the formed film of which is equalized and which has excellent electrical characteristics, can be acquired.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62212008A JPS6454711A (en) | 1987-08-26 | 1987-08-26 | Manufacture of ruthenium oxide group thin-film |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62212008A JPS6454711A (en) | 1987-08-26 | 1987-08-26 | Manufacture of ruthenium oxide group thin-film |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6454711A true JPS6454711A (en) | 1989-03-02 |
Family
ID=16615356
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP62212008A Pending JPS6454711A (en) | 1987-08-26 | 1987-08-26 | Manufacture of ruthenium oxide group thin-film |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6454711A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH05337255A (en) * | 1992-06-05 | 1993-12-21 | Sega Enterp Ltd | Animated picture display game machine |
US6612929B2 (en) | 2000-03-07 | 2003-09-02 | Konami Corporation | Rotary device for game machine and game machine with rotary device |
-
1987
- 1987-08-26 JP JP62212008A patent/JPS6454711A/en active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH05337255A (en) * | 1992-06-05 | 1993-12-21 | Sega Enterp Ltd | Animated picture display game machine |
US6612929B2 (en) | 2000-03-07 | 2003-09-02 | Konami Corporation | Rotary device for game machine and game machine with rotary device |
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