JPS6454711A - Manufacture of ruthenium oxide group thin-film - Google Patents

Manufacture of ruthenium oxide group thin-film

Info

Publication number
JPS6454711A
JPS6454711A JP62212008A JP21200887A JPS6454711A JP S6454711 A JPS6454711 A JP S6454711A JP 62212008 A JP62212008 A JP 62212008A JP 21200887 A JP21200887 A JP 21200887A JP S6454711 A JPS6454711 A JP S6454711A
Authority
JP
Japan
Prior art keywords
film
oxide group
substrate
group thin
manufacture
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP62212008A
Other languages
Japanese (ja)
Inventor
Chiharu Niki
Kazuyuki Okano
Yasuto Isozaki
Hiroshi Hasegawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP62212008A priority Critical patent/JPS6454711A/en
Publication of JPS6454711A publication Critical patent/JPS6454711A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE:To obtain the uniform surface of a film by applying the mixed solution of a compound containing Ru and a compound containing Ba or/and Sr in structure onto a base body and drying the mixed solution and baking a substrate. CONSTITUTION:A compound containing Ru in structure is dissolved into an organic solvent, an alcohol group compound is added to the solvent and Ba or Sr is added and melted. The coating fluid is applied onto a substrate, and dried. The substrate is heated and baked, thus acquiring a Ru oxide group thin-film. The coating fluid having the desired composition of a metal is obtained by using the method, the range of the selectivity of the Ru compound is widened, and the Ru oxide group thin-film, the surface of the formed film of which is equalized and which has excellent electrical characteristics, can be acquired.
JP62212008A 1987-08-26 1987-08-26 Manufacture of ruthenium oxide group thin-film Pending JPS6454711A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62212008A JPS6454711A (en) 1987-08-26 1987-08-26 Manufacture of ruthenium oxide group thin-film

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62212008A JPS6454711A (en) 1987-08-26 1987-08-26 Manufacture of ruthenium oxide group thin-film

Publications (1)

Publication Number Publication Date
JPS6454711A true JPS6454711A (en) 1989-03-02

Family

ID=16615356

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62212008A Pending JPS6454711A (en) 1987-08-26 1987-08-26 Manufacture of ruthenium oxide group thin-film

Country Status (1)

Country Link
JP (1) JPS6454711A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05337255A (en) * 1992-06-05 1993-12-21 Sega Enterp Ltd Animated picture display game machine
US6612929B2 (en) 2000-03-07 2003-09-02 Konami Corporation Rotary device for game machine and game machine with rotary device

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05337255A (en) * 1992-06-05 1993-12-21 Sega Enterp Ltd Animated picture display game machine
US6612929B2 (en) 2000-03-07 2003-09-02 Konami Corporation Rotary device for game machine and game machine with rotary device

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