JPS645440U - - Google Patents

Info

Publication number
JPS645440U
JPS645440U JP1987098461U JP9846187U JPS645440U JP S645440 U JPS645440 U JP S645440U JP 1987098461 U JP1987098461 U JP 1987098461U JP 9846187 U JP9846187 U JP 9846187U JP S645440 U JPS645440 U JP S645440U
Authority
JP
Japan
Prior art keywords
tank
cleaning
cleaning liquid
end connected
generating means
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1987098461U
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1987098461U priority Critical patent/JPS645440U/ja
Publication of JPS645440U publication Critical patent/JPS645440U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Cleaning By Liquid Or Steam (AREA)

Description

【図面の簡単な説明】[Brief explanation of drawings]

第1図は本考案の一実施例を示す構成図、第2
図は洗浄装置の従来例を示す構成図、第3図は気
泡発生器の斜視図である。 1……洗浄装置、2……被洗浄物、3……タン
ク、4……洗浄液、5……ポンプ、6……洗浄液
供給用配管、7……洗浄槽、8……ノズル、10
……気泡発生器、11……気体送給用配管、14
……洗浄液排出用配管、16,17,18,19
……制御弁、30……PHセンサ、31……制御部
Fig. 1 is a configuration diagram showing one embodiment of the present invention;
The figure is a configuration diagram showing a conventional example of a cleaning device, and FIG. 3 is a perspective view of a bubble generator. DESCRIPTION OF SYMBOLS 1...Cleaning device, 2...Object to be cleaned, 3...Tank, 4...Cleaning liquid, 5...Pump, 6...Cleaning liquid supply piping, 7...Cleaning tank, 8...Nozzle, 10
... Bubble generator, 11 ... Gas supply piping, 14
...Cleaning liquid discharge piping, 16, 17, 18, 19
... Control valve, 30 ... PH sensor, 31 ... Control section.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] 洗浄液を貯蔵するタンクと、洗浄槽と、一端が
前記タンクに接続され途中にポンプおよび制御弁
が設けられ他端には前記タンクより送られてくる
洗浄液を前記洗浄槽内の被洗浄物に向けて噴射す
る手段が取付けられた洗浄液供給用配管と、制御
弁を有して一端が前記洗浄槽に接続された洗浄液
排出用配管と、前記洗浄槽内に配設された気泡発
生手段と、制御弁を有して一端が前記気泡発生手
段に接続された気体送給用配管と、前記洗浄槽内
の洗浄液のPH値を測定するPHセンサと、この
PHセンサによる検出信号にもとずいて前記各配
管の制御弁を開閉制御する制御部とを備えたこと
を特徴とする洗浄装置。
A tank for storing cleaning liquid, a cleaning tank, one end connected to the tank, a pump and a control valve provided in the middle, and the other end directing the cleaning liquid sent from the tank to the object to be cleaned in the cleaning tank. a cleaning liquid supply pipe equipped with a means for injecting the cleaning liquid; a cleaning liquid discharge pipe having a control valve and one end connected to the cleaning tank; a bubble generating means disposed in the cleaning tank; a gas supply pipe having a valve and one end connected to the bubble generating means; a PH sensor for measuring the PH value of the cleaning liquid in the cleaning tank; A cleaning device characterized by comprising a control section that controls opening and closing of control valves of each pipe.
JP1987098461U 1987-06-29 1987-06-29 Pending JPS645440U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987098461U JPS645440U (en) 1987-06-29 1987-06-29

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987098461U JPS645440U (en) 1987-06-29 1987-06-29

Publications (1)

Publication Number Publication Date
JPS645440U true JPS645440U (en) 1989-01-12

Family

ID=31324748

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987098461U Pending JPS645440U (en) 1987-06-29 1987-06-29

Country Status (1)

Country Link
JP (1) JPS645440U (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0629271A (en) * 1992-03-12 1994-02-04 Kyushu Electron Metal Co Ltd Method of washing semiconductor wafer and its device

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6178124A (en) * 1984-09-26 1986-04-21 Oki Electric Ind Co Ltd Automatic cleaner for semiconductor wafer
JPS62123738A (en) * 1985-11-25 1987-06-05 Hitachi Ltd Dicing equipment

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6178124A (en) * 1984-09-26 1986-04-21 Oki Electric Ind Co Ltd Automatic cleaner for semiconductor wafer
JPS62123738A (en) * 1985-11-25 1987-06-05 Hitachi Ltd Dicing equipment

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0629271A (en) * 1992-03-12 1994-02-04 Kyushu Electron Metal Co Ltd Method of washing semiconductor wafer and its device

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