JPS6454393A - Flap stage - Google Patents
Flap stageInfo
- Publication number
- JPS6454393A JPS6454393A JP62213377A JP21337787A JPS6454393A JP S6454393 A JPS6454393 A JP S6454393A JP 62213377 A JP62213377 A JP 62213377A JP 21337787 A JP21337787 A JP 21337787A JP S6454393 A JPS6454393 A JP S6454393A
- Authority
- JP
- Japan
- Prior art keywords
- sections
- cantilevers
- swinging
- displacement
- hinges
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
- Details Of Measuring And Other Instruments (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
Abstract
PURPOSE: To obtain swinging displacement with high resolution and high accuracy by providing radially arranged cantilevers and fixing a swinging plate to the front end sections of the cantilevers and a piezoelectric element to a supporting section, and then, fixing the element to the cantilevers by means of connecting sections. CONSTITUTION: A swinging stage is composed of supporting sections formed of hinges 1 and 2, intermediate sections 4, cantilevers 6 having the intermediate sections 4 and front end sections 5, a swinging plate 7 fixed to the front end sections 5 of the cantilevers 6, piezoelectric elements 8 fixed to the supporting sections 3 of the cantilevers 6, and connecting sections 10 which is fitted to the mobile sections of the elements 8 and fixed to the intermediate sections 4 of the cantilevers 6 through hinges 9. When a voltage is applied across the element 8, linear forward displacement (s) is generated and converted into angular displacement (t) around the hinge 1 by means of a link mechanism constituted of the supporting sections 3, hinges 1, intermediate sections 4, and the hinges 9 of the sections 10. The intermediate sections 4 transmit the displacement (t) to the front end sections 5 through the hinges 2 and make the plate 7 to generate swinging displacement. Since the swinging stage does not contain any joint section, the stage can be formed with high dimensional accuracy and swinging displacement can be obtained with high resolution and high accuracy.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62213377A JPS6454393A (en) | 1987-08-26 | 1987-08-26 | Flap stage |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62213377A JPS6454393A (en) | 1987-08-26 | 1987-08-26 | Flap stage |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS6454393A true JPS6454393A (en) | 1989-03-01 |
JPH0557556B2 JPH0557556B2 (en) | 1993-08-24 |
Family
ID=16638184
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP62213377A Granted JPS6454393A (en) | 1987-08-26 | 1987-08-26 | Flap stage |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6454393A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2006235019A (en) * | 2005-02-23 | 2006-09-07 | Hitachi High-Technologies Corp | Exposure device, exposure method, and manufacturing method of panel substrate for display |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5993249A (en) * | 1982-10-19 | 1984-05-29 | バリアン・アソシエイツ・インコ−ポレイテツド | Clearance controller for partial vacuum treatment |
JPS6069593A (en) * | 1983-09-26 | 1985-04-20 | オムロン株式会社 | Minutely movable stage mechanism |
-
1987
- 1987-08-26 JP JP62213377A patent/JPS6454393A/en active Granted
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5993249A (en) * | 1982-10-19 | 1984-05-29 | バリアン・アソシエイツ・インコ−ポレイテツド | Clearance controller for partial vacuum treatment |
JPS6069593A (en) * | 1983-09-26 | 1985-04-20 | オムロン株式会社 | Minutely movable stage mechanism |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2006235019A (en) * | 2005-02-23 | 2006-09-07 | Hitachi High-Technologies Corp | Exposure device, exposure method, and manufacturing method of panel substrate for display |
Also Published As
Publication number | Publication date |
---|---|
JPH0557556B2 (en) | 1993-08-24 |
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