JPS6453549A - Drying of work - Google Patents

Drying of work

Info

Publication number
JPS6453549A
JPS6453549A JP21119287A JP21119287A JPS6453549A JP S6453549 A JPS6453549 A JP S6453549A JP 21119287 A JP21119287 A JP 21119287A JP 21119287 A JP21119287 A JP 21119287A JP S6453549 A JPS6453549 A JP S6453549A
Authority
JP
Japan
Prior art keywords
work
water
pure water
warm pure
dried
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP21119287A
Other languages
Japanese (ja)
Other versions
JP2610441B2 (en
Inventor
Shigenori Tsuchida
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
SUPIIDE FUAMU CLEAN SYST KK
Original Assignee
SUPIIDE FUAMU CLEAN SYST KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by SUPIIDE FUAMU CLEAN SYST KK filed Critical SUPIIDE FUAMU CLEAN SYST KK
Priority to JP62211192A priority Critical patent/JP2610441B2/en
Publication of JPS6453549A publication Critical patent/JPS6453549A/en
Application granted granted Critical
Publication of JP2610441B2 publication Critical patent/JP2610441B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Landscapes

  • Drying Of Solid Materials (AREA)
  • Cleaning Or Drying Semiconductors (AREA)

Abstract

PURPOSE:To dry a work by its own heat simultaneously with its pulling up by a method wherein the work to be dried is immersed in warm pure water and the work is pulled up slowly at a speed at which the surface of the water does not wave while steam near the surface of the water is being discharged in a horizontal direction. CONSTITUTION:A work 1 is transferred to a drying chamber; it is immersed in warm pure water 2 where an impurity has been removed and whose temperature has been raised to a prescribed temperature. The warm pure water 2 is heated to a prescribed temperature by using a heater 5 inside a heating tank 4; after that, the water is fed to a warm pure water tank 3 by using a pump 6. Then, the work 1 immersed in the warm pure water 2 is pulled up from the warm pure water 2 at a speed at which the surface of the water does not wave and at which the work 1 can be dried by its own heat simultaneously with its pulling up while steam near the surface of the water is being discharged in a horizontal direction by means of suction or the like. By this setup, the work 1 is dried successively from a pulled-up part; it is dried uniformly; a stain due to drying uneveness is not caused.
JP62211192A 1987-08-25 1987-08-25 Work drying method Expired - Fee Related JP2610441B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62211192A JP2610441B2 (en) 1987-08-25 1987-08-25 Work drying method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62211192A JP2610441B2 (en) 1987-08-25 1987-08-25 Work drying method

Publications (2)

Publication Number Publication Date
JPS6453549A true JPS6453549A (en) 1989-03-01
JP2610441B2 JP2610441B2 (en) 1997-05-14

Family

ID=16601913

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62211192A Expired - Fee Related JP2610441B2 (en) 1987-08-25 1987-08-25 Work drying method

Country Status (1)

Country Link
JP (1) JP2610441B2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0566972U (en) * 1992-02-21 1993-09-03 大日本スクリーン製造株式会社 Substrate pure water pull-up drying device

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002222790A (en) * 2001-01-24 2002-08-09 Speedfam Clean System Co Ltd Drying method of work

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58207376A (en) * 1982-05-27 1983-12-02 Hitachi Ltd Method and device for treatment of base board
JPS6367735A (en) * 1986-09-09 1988-03-26 Texas Instr Japan Ltd Substrate dry and substrate container

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58207376A (en) * 1982-05-27 1983-12-02 Hitachi Ltd Method and device for treatment of base board
JPS6367735A (en) * 1986-09-09 1988-03-26 Texas Instr Japan Ltd Substrate dry and substrate container

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0566972U (en) * 1992-02-21 1993-09-03 大日本スクリーン製造株式会社 Substrate pure water pull-up drying device

Also Published As

Publication number Publication date
JP2610441B2 (en) 1997-05-14

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Legal Events

Date Code Title Description
R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

LAPS Cancellation because of no payment of annual fees