JPS6451670A - Manufacture of amorphous semiconductor device - Google Patents
Manufacture of amorphous semiconductor deviceInfo
- Publication number
- JPS6451670A JPS6451670A JP62208433A JP20843387A JPS6451670A JP S6451670 A JPS6451670 A JP S6451670A JP 62208433 A JP62208433 A JP 62208433A JP 20843387 A JP20843387 A JP 20843387A JP S6451670 A JPS6451670 A JP S6451670A
- Authority
- JP
- Japan
- Prior art keywords
- electrode
- metal layer
- layer
- metal
- amorphous semiconductor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
Landscapes
- Weting (AREA)
- Photovoltaic Devices (AREA)
Abstract
PURPOSE:To reduce the number of processes, and decrease the manufacturing cost, by spreading a metal layer on an amorphous semiconductor layer formed on an insulating substrate via a first electrode, and forming a second electrode by dividing said metal layer by electrochemical machining. CONSTITUTION:On a glass substrate 1, is formed a first electrode 2 which is transparent and conductive, and thereon, an amorphous semiconductor layer 3 having a PIN junction is arranged. In order to divide a metal electrode layer of semiconductor element formed in thickness of 1mum on the layer 3 by vapor deposition or sputtering, a processing electrode 5 surrounded by an insulator 6 is arranged at a position facing the part to be divided. From a nozzle 7, electrolytic solution 8 is supplied between the processing electrode 5 and the metal layer 4. By applying a voltage to the metal layer 4 and the processing electrode 5 in the manner in which the metal layer becomes positive, the metal electrode is subjected to solvent reaction with a speed proportional to the current quantity, and the metal layer of the part to be divided is very simply eliminated.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62208433A JP2590918B2 (en) | 1987-08-22 | 1987-08-22 | Manufacturing method of amorphous semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62208433A JP2590918B2 (en) | 1987-08-22 | 1987-08-22 | Manufacturing method of amorphous semiconductor device |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS6451670A true JPS6451670A (en) | 1989-02-27 |
JP2590918B2 JP2590918B2 (en) | 1997-03-19 |
Family
ID=16556130
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP62208433A Expired - Fee Related JP2590918B2 (en) | 1987-08-22 | 1987-08-22 | Manufacturing method of amorphous semiconductor device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP2590918B2 (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0394476A (en) * | 1989-06-16 | 1991-04-19 | Canon Inc | Manufacture of substrate for selective crystal growth and selective crystal growth method and manufacture of solar cell by using these substrates |
JP2006229188A (en) * | 2005-01-18 | 2006-08-31 | Shinko Electric Ind Co Ltd | Processing method and equipment for conductive thin film |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS61214584A (en) * | 1985-03-15 | 1986-09-24 | アトランテイツク・リツチフイールド・カンパニー | Method of forming part of solar battery by inscribing thin film of material wilded on substrate |
-
1987
- 1987-08-22 JP JP62208433A patent/JP2590918B2/en not_active Expired - Fee Related
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS61214584A (en) * | 1985-03-15 | 1986-09-24 | アトランテイツク・リツチフイールド・カンパニー | Method of forming part of solar battery by inscribing thin film of material wilded on substrate |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0394476A (en) * | 1989-06-16 | 1991-04-19 | Canon Inc | Manufacture of substrate for selective crystal growth and selective crystal growth method and manufacture of solar cell by using these substrates |
JP2006229188A (en) * | 2005-01-18 | 2006-08-31 | Shinko Electric Ind Co Ltd | Processing method and equipment for conductive thin film |
Also Published As
Publication number | Publication date |
---|---|
JP2590918B2 (en) | 1997-03-19 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
LAPS | Cancellation because of no payment of annual fees |