JPS6451252A - Cutting device - Google Patents

Cutting device

Info

Publication number
JPS6451252A
JPS6451252A JP62204017A JP20401787A JPS6451252A JP S6451252 A JPS6451252 A JP S6451252A JP 62204017 A JP62204017 A JP 62204017A JP 20401787 A JP20401787 A JP 20401787A JP S6451252 A JPS6451252 A JP S6451252A
Authority
JP
Japan
Prior art keywords
cover
water
chips
nozzle
flows
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP62204017A
Other languages
Japanese (ja)
Inventor
Chiyoshi Kamata
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP62204017A priority Critical patent/JPS6451252A/en
Publication of JPS6451252A publication Critical patent/JPS6451252A/en
Pending legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q11/00—Accessories fitted to machine tools for keeping tools or parts of the machine in good working condition or for cooling work; Safety devices specially combined with or arranged in, or specially adapted for use in connection with, machine tools
    • B23Q11/0042—Devices for removing chips

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Auxiliary Devices For Machine Tools (AREA)
  • Processing Of Stones Or Stones Resemblance Materials (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)

Abstract

PURPOSE:To prevent chips from scattering into work environment in an effective manner by enclosing the circumference of a stage where a workpiece is mounted, with a cover, while setting up a shower nozzle, for spraying water, in this cover. CONSTITUTION:Water is sprayed in every direction from all shower nozzles 12 set up in an inner wall of a cover 2, then a blade 5 is rotated at high speed, while it moves downward toward a stage 3 whereby cutting of a wafer 4 is started. At this time, a large quantity of chips 14 produced are mixed in cooling water to be fed to a cutting spot of the wafer 4 from a cooling water nozzle 9, and these chips are accelerated by high speed rotation of the blade 5 and scattered sprayfully. A part of this spray flows in a drain hole 19 by its own weight, another part flows into the hole 10 by water sprayed out of the nozzle 12 after colliding with a side wall of the cover 2, furthermore the spray floated in the cover 2 also flows into the drain hole 10 by mixing with the water out of the nozzle 12. Accordingly, these chips are in no case scattered into work environment after coming to dust.
JP62204017A 1987-08-19 1987-08-19 Cutting device Pending JPS6451252A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62204017A JPS6451252A (en) 1987-08-19 1987-08-19 Cutting device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62204017A JPS6451252A (en) 1987-08-19 1987-08-19 Cutting device

Publications (1)

Publication Number Publication Date
JPS6451252A true JPS6451252A (en) 1989-02-27

Family

ID=16483391

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62204017A Pending JPS6451252A (en) 1987-08-19 1987-08-19 Cutting device

Country Status (1)

Country Link
JP (1) JPS6451252A (en)

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2751254A1 (en) * 1996-07-19 1998-01-23 Renault DEVICE FOR REMOVING PROJECTED CHIPS FROM THE MACHINING HEAD OF A TOOL MACHINE
FR2771041A1 (en) * 1997-11-17 1999-05-21 Peugeot Cooling fluid distributor in a homogeneous manner of the machining zone of a machine tool
JP2010094769A (en) * 2008-10-15 2010-04-30 Ｓｕｍｃｏ Ｔｅｃｈｘｉｖ株式会社 Grinding method and grinding device
JP2014100783A (en) * 2012-11-16 2014-06-05 Hon Hai Precision Industry Co Ltd Dustproof device
JP2014220447A (en) * 2013-05-10 2014-11-20 株式会社ディスコ Cutting apparatus
CN105132664A (en) * 2015-09-14 2015-12-09 苏州凯锝微电子有限公司 Dual-cooling type cooling device
CN108637813A (en) * 2018-05-10 2018-10-12 彭云秋 A kind of petroleum pipeline installation pipeline head end grinding device
WO2024057951A1 (en) * 2022-09-16 2024-03-21 東京エレクトロン株式会社 Substrate processing apparatus and substrate processing method

Cited By (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2751254A1 (en) * 1996-07-19 1998-01-23 Renault DEVICE FOR REMOVING PROJECTED CHIPS FROM THE MACHINING HEAD OF A TOOL MACHINE
WO1998003301A1 (en) * 1996-07-19 1998-01-29 Renault Device for removing chips produced by the machining head of a machine tool
FR2771041A1 (en) * 1997-11-17 1999-05-21 Peugeot Cooling fluid distributor in a homogeneous manner of the machining zone of a machine tool
WO1999025518A1 (en) * 1997-11-17 1999-05-27 Automobiles Peugeot Device for homogeneous cooling of a machine-tool machining zone
JP2010094769A (en) * 2008-10-15 2010-04-30 Ｓｕｍｃｏ Ｔｅｃｈｘｉｖ株式会社 Grinding method and grinding device
JP2014100783A (en) * 2012-11-16 2014-06-05 Hon Hai Precision Industry Co Ltd Dustproof device
JP2014220447A (en) * 2013-05-10 2014-11-20 株式会社ディスコ Cutting apparatus
CN105132664A (en) * 2015-09-14 2015-12-09 苏州凯锝微电子有限公司 Dual-cooling type cooling device
CN108637813A (en) * 2018-05-10 2018-10-12 彭云秋 A kind of petroleum pipeline installation pipeline head end grinding device
WO2024057951A1 (en) * 2022-09-16 2024-03-21 東京エレクトロン株式会社 Substrate processing apparatus and substrate processing method

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