JPS644818A - Actuator fitting structure for minutely positioning device - Google Patents

Actuator fitting structure for minutely positioning device

Info

Publication number
JPS644818A
JPS644818A JP15982587A JP15982587A JPS644818A JP S644818 A JPS644818 A JP S644818A JP 15982587 A JP15982587 A JP 15982587A JP 15982587 A JP15982587 A JP 15982587A JP S644818 A JPS644818 A JP S644818A
Authority
JP
Japan
Prior art keywords
abutting member
piezoelectric actuator
actuator
fine motion
motion table
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP15982587A
Other languages
Japanese (ja)
Other versions
JPH071456B2 (en
Inventor
Takeshi Murayama
Kiyoshi Nagasawa
Kojiro Ogata
Kozo Ono
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Construction Machinery Co Ltd
Original Assignee
Hitachi Construction Machinery Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Construction Machinery Co Ltd filed Critical Hitachi Construction Machinery Co Ltd
Priority to JP62159825A priority Critical patent/JPH071456B2/en
Publication of JPS644818A publication Critical patent/JPS644818A/en
Publication of JPH071456B2 publication Critical patent/JPH071456B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q1/00—Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
    • B23Q1/25—Movable or adjustable work or tool supports
    • B23Q1/26—Movable or adjustable work or tool supports characterised by constructional features relating to the co-operation of relatively movable members; Means for preventing relative movement of such members
    • B23Q1/34—Relative movement obtained by use of deformable elements, e.g. piezoelectric, magnetostrictive, elastic or thermally-dilatable elements
    • B23Q1/36—Springs

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Details Of Measuring And Other Instruments (AREA)
  • Control Of Position Or Direction (AREA)

Abstract

PURPOSE:To surely fix an actuator without using an adhesive agent, and also, without exerting an undesirable influence on a displacement mechanism, by providing an abutting member for abutting on the end of the actuator through the second elastic member, on the first rigid body part, and pressing this abutting member by a wedge mechanism. CONSTITUTION:When a wedge 17b is pushed into a groove 17a1 in a state that a piezoelectric actuator 6 has been inserted and held between a fine motion table 2 and an abutting member 15, an elastic hinge 1b is bent to the left, and accordingly, the abutting member 15 is pressed against the right end face of the piezoelectric actuator 6. In such a way, the piezoelectric actuator 6 is fixed surely between the fine motion table 2 and the abutting member 15. Also, the reaction force at the time of tightening the piezoelectric actuator 6 by a wedge mechanism 17 is obtained by a deformation of parallel springs 3a, 3b and the elastic hinge 1b. In such a case, the parallel springs 3a, 3b are deformed a little, but this deformation allows the fine motion table 2 to only generate a small translational displacement, and in case when positioning is executed, no undesirable influence is exerted.
JP62159825A 1987-06-29 1987-06-29 Multi-layer piezoelectric actuator mounting structure for fine positioning device Expired - Lifetime JPH071456B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62159825A JPH071456B2 (en) 1987-06-29 1987-06-29 Multi-layer piezoelectric actuator mounting structure for fine positioning device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62159825A JPH071456B2 (en) 1987-06-29 1987-06-29 Multi-layer piezoelectric actuator mounting structure for fine positioning device

Publications (2)

Publication Number Publication Date
JPS644818A true JPS644818A (en) 1989-01-10
JPH071456B2 JPH071456B2 (en) 1995-01-11

Family

ID=15702073

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62159825A Expired - Lifetime JPH071456B2 (en) 1987-06-29 1987-06-29 Multi-layer piezoelectric actuator mounting structure for fine positioning device

Country Status (1)

Country Link
JP (1) JPH071456B2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02301979A (en) * 1989-05-16 1990-12-14 Fujitsu Ltd Semiconductor element socket

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59137041U (en) * 1983-03-03 1984-09-12 日本電気株式会社 Impact printing unit
JPS60259347A (en) * 1984-06-02 1985-12-21 Canon Inc Piezoelectric type finely moving element and finely positioning device using thereof
JPS61243511A (en) * 1985-04-20 1986-10-29 Yotaro Hatamura Fine positioning device

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59137041U (en) * 1983-03-03 1984-09-12 日本電気株式会社 Impact printing unit
JPS60259347A (en) * 1984-06-02 1985-12-21 Canon Inc Piezoelectric type finely moving element and finely positioning device using thereof
JPS61243511A (en) * 1985-04-20 1986-10-29 Yotaro Hatamura Fine positioning device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02301979A (en) * 1989-05-16 1990-12-14 Fujitsu Ltd Semiconductor element socket

Also Published As

Publication number Publication date
JPH071456B2 (en) 1995-01-11

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