JPS64454A - Apparatus for inspecting shape of object - Google Patents

Apparatus for inspecting shape of object

Info

Publication number
JPS64454A
JPS64454A JP62178859A JP17885987A JPS64454A JP S64454 A JPS64454 A JP S64454A JP 62178859 A JP62178859 A JP 62178859A JP 17885987 A JP17885987 A JP 17885987A JP S64454 A JPS64454 A JP S64454A
Authority
JP
Japan
Prior art keywords
region
mirrors
lens
reflected light
sensor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP62178859A
Other languages
Japanese (ja)
Other versions
JPH01454A (en
Inventor
Giichi Kakigi
Koji Oka
Moritoshi Ando
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP62178859A priority Critical patent/JPS64454A/en
Publication of JPH01454A publication Critical patent/JPH01454A/en
Publication of JPS64454A publication Critical patent/JPS64454A/en
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/89—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
    • G01N21/8901—Optical details; Scanning details
    • G01N21/8903—Optical details; Scanning details using a multiple detector array

Landscapes

  • Engineering & Computer Science (AREA)
  • Textile Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Supply And Installment Of Electrical Components (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)

Abstract

PURPOSE:To make detection of long regions at one time by projecting a linear light beam onto an object to be inspected, splitting the reflected light horizontally by a mirror optical system, arraying the split rays of the light respectively perpendicularly on a two-dimensional photodetector and imaging the same. CONSTITUTION:The detecting optical system is constituted, for example, by disposing the mirror system consisting of two pairs of mirrors 13, 14, 15, 16 between a detecting region R on the object to be inspected and a lens 12 for optical imaging to a two-dimensional CCD sensor 11. The region R is bisected horizontally by a center line. The reflected light from the region R1 is imaged by the mirrors 13, 14 via the lens 12 to the lower region 11a of the sensor 11 and the reflected light from the region R2 is imaged by the mirrors 15, 16 via the lens 12 to the upper region 11b of the sensor 11, respectively. The optically cut images of the regions R1, R2 are, therefore, arrayed vertically and are put into one detecting image so that twice larger region can be examined at one time.
JP62178859A 1987-03-19 1987-07-20 Apparatus for inspecting shape of object Pending JPS64454A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62178859A JPS64454A (en) 1987-03-19 1987-07-20 Apparatus for inspecting shape of object

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP6247187 1987-03-19
JP62-62471 1987-03-19
JP62178859A JPS64454A (en) 1987-03-19 1987-07-20 Apparatus for inspecting shape of object

Publications (2)

Publication Number Publication Date
JPH01454A JPH01454A (en) 1989-01-05
JPS64454A true JPS64454A (en) 1989-01-05

Family

ID=26403509

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62178859A Pending JPS64454A (en) 1987-03-19 1987-07-20 Apparatus for inspecting shape of object

Country Status (1)

Country Link
JP (1) JPS64454A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008275577A (en) * 2007-04-27 2008-11-13 King Yuan Electronics Co Ltd Apparatus and method for monitoring overlapping

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008275577A (en) * 2007-04-27 2008-11-13 King Yuan Electronics Co Ltd Apparatus and method for monitoring overlapping

Similar Documents

Publication Publication Date Title
US5159322A (en) Apparatus to digitize graphic and scenic information and to determine the position of a stylus for input into a computer or the like
US5486692A (en) Glassware inspection machine comprising diffused light sources and two-dimensional cameras
US6075591A (en) Optical method and apparatus for detecting low frequency defects
ATE137588T1 (en) OPTICAL SCANNING DEVICE WITH CONFOCAL BEAM PATH USING LIGHT SOURCE AND DETECTOR MATRIX
ES8500445A1 (en) Optical detection of radial reflective defects
CA2089079A1 (en) Machine vision surface characterization system
JPH09229819A (en) Method and instrument for measuring lens parameter using optical section
RU95113612A (en) OPTOELECTRONIC SYSTEM OF NON-CONTACT MEASUREMENT IN THE MOTION OF GEOMETRIC CHARACTERISTICS OF A RAILWAY TRACK, OPTO-ELECTRONIC SENSOR OF A NON-CONTACT MEASUREMENT OF THE POSITION AND WEAR OF THE RAIL
DE3270640D1 (en) Off-axis light beam defect detector
ATE88560T1 (en) ARRANGEMENT FOR THE OPTICAL DETECTION OF SPATIAL UNEVENNESSES IN THE STRUCTURE OF AN OBJECT TO BE EXAMINED.
CA2160955A1 (en) Process and apparatus for the inspection of objects, particularly bottles
FR2729220B1 (en) COLORIMETRIC MEASUREMENT DEVICE OF A DISPLAY SCREEN
JPS64454A (en) Apparatus for inspecting shape of object
GB1328877A (en) Apparatus and method for optically inspecting the physical condition of a surface
DE69327909D1 (en) Method and device for spectral image acquisition
ES2077081T3 (en) PHASE MEASUREMENT IN OPTICAL SCANNING MICROSCOPES.
JPH0560544B2 (en)
TW359937B (en) Optical apparatus and optical system
JPS57139636A (en) Radius-of-curvature measuring device
JPS57161608A (en) Measuring device for object size
GB1429536A (en) Device to introduce an optic measuring index at photoelectric detection of photographic plates
JPS57118105A (en) Detector
JPS6288932A (en) Detecting device for liquid leak in container
JPS5756704A (en) Detector for surface flaw of bloom
JPS6431026A (en) Infrared measuring apparatus