JPS6444501A - Method for controlling variable value control system - Google Patents
Method for controlling variable value control systemInfo
- Publication number
- JPS6444501A JPS6444501A JP20003487A JP20003487A JPS6444501A JP S6444501 A JPS6444501 A JP S6444501A JP 20003487 A JP20003487 A JP 20003487A JP 20003487 A JP20003487 A JP 20003487A JP S6444501 A JPS6444501 A JP S6444501A
- Authority
- JP
- Japan
- Prior art keywords
- control
- control system
- variable value
- value control
- controlling variable
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Feedback Control In General (AREA)
Abstract
PURPOSE:To improve adaptability and control accuracy by applying feedforward control to a reference control system and adding feedback control in accordance with the state of a control system. CONSTITUTION:In a linear area of a control system, Gf(S).Gp(S) 1 [Gf(S) is a transfer function of a feedforwared control element 10 and Gp(S) is a product of a transmission function Ga(S) of an operation part 8 and a transfer function Go(S) of a controlled system 9 can be formed, and an non-linear area, Gf(S).Gp(S) 1 can not be held and the control system goes to unstable. Thereby, the control system is basically controlled by the feedforward control element 10, and when a difference between an objective speed and a real speed is included within a fixed range, a feedback control element 7 is added and feedback control is mainly executed to secure the control accuracy.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP20003487A JPS6444501A (en) | 1987-08-12 | 1987-08-12 | Method for controlling variable value control system |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP20003487A JPS6444501A (en) | 1987-08-12 | 1987-08-12 | Method for controlling variable value control system |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6444501A true JPS6444501A (en) | 1989-02-16 |
Family
ID=16417720
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP20003487A Pending JPS6444501A (en) | 1987-08-12 | 1987-08-12 | Method for controlling variable value control system |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6444501A (en) |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH03255205A (en) * | 1990-03-02 | 1991-11-14 | Tokimec Inc | Closed loop pressure control device |
JPH05176571A (en) * | 1991-12-20 | 1993-07-13 | Tokyo Electric Co Ltd | Drive controller for servomotor |
JP2013167678A (en) * | 2012-02-14 | 2013-08-29 | Fuji Xerox Co Ltd | Endless belt driving device and image forming apparatus having the same |
JP2018527599A (en) * | 2015-06-19 | 2018-09-20 | エーエスエムエル ネザーランズ ビー.ブイ. | Control system, positioning system, lithographic apparatus and device manufacturing method |
WO2019049477A1 (en) * | 2017-09-07 | 2019-03-14 | 日本精工株式会社 | Rack and manufacturing method for same, steering device, vehicle and preforming mold for rack |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS62154002A (en) * | 1985-12-27 | 1987-07-09 | Hitachi Ltd | Control method and its device |
-
1987
- 1987-08-12 JP JP20003487A patent/JPS6444501A/en active Pending
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS62154002A (en) * | 1985-12-27 | 1987-07-09 | Hitachi Ltd | Control method and its device |
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH03255205A (en) * | 1990-03-02 | 1991-11-14 | Tokimec Inc | Closed loop pressure control device |
JPH05176571A (en) * | 1991-12-20 | 1993-07-13 | Tokyo Electric Co Ltd | Drive controller for servomotor |
JP2013167678A (en) * | 2012-02-14 | 2013-08-29 | Fuji Xerox Co Ltd | Endless belt driving device and image forming apparatus having the same |
JP2018527599A (en) * | 2015-06-19 | 2018-09-20 | エーエスエムエル ネザーランズ ビー.ブイ. | Control system, positioning system, lithographic apparatus and device manufacturing method |
US10401743B2 (en) | 2015-06-19 | 2019-09-03 | Asml Netherlands B.V. | Control system, positioning system, lithographic apparatus and device manufacturing method |
WO2019049477A1 (en) * | 2017-09-07 | 2019-03-14 | 日本精工株式会社 | Rack and manufacturing method for same, steering device, vehicle and preforming mold for rack |
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