JPS644027A - Vapor drying device - Google Patents

Vapor drying device

Info

Publication number
JPS644027A
JPS644027A JP15765387A JP15765387A JPS644027A JP S644027 A JPS644027 A JP S644027A JP 15765387 A JP15765387 A JP 15765387A JP 15765387 A JP15765387 A JP 15765387A JP S644027 A JPS644027 A JP S644027A
Authority
JP
Japan
Prior art keywords
treatment chamber
treatment
vapor
chamber
fluid
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP15765387A
Other languages
English (en)
Inventor
Shoji Hara
Masami Kanegae
Yoshio Saito
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP15765387A priority Critical patent/JPS644027A/ja
Publication of JPS644027A publication Critical patent/JPS644027A/ja
Pending legal-status Critical Current

Links

Landscapes

  • Drying Of Solid Materials (AREA)
  • Cleaning Or Drying Semiconductors (AREA)
JP15765387A 1987-06-26 1987-06-26 Vapor drying device Pending JPS644027A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15765387A JPS644027A (en) 1987-06-26 1987-06-26 Vapor drying device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15765387A JPS644027A (en) 1987-06-26 1987-06-26 Vapor drying device

Publications (1)

Publication Number Publication Date
JPS644027A true JPS644027A (en) 1989-01-09

Family

ID=15654428

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15765387A Pending JPS644027A (en) 1987-06-26 1987-06-26 Vapor drying device

Country Status (1)

Country Link
JP (1) JPS644027A (ja)

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