JPS6439746A - Manufacture of semiconductor integrated circuit - Google Patents
Manufacture of semiconductor integrated circuitInfo
- Publication number
- JPS6439746A JPS6439746A JP19666187A JP19666187A JPS6439746A JP S6439746 A JPS6439746 A JP S6439746A JP 19666187 A JP19666187 A JP 19666187A JP 19666187 A JP19666187 A JP 19666187A JP S6439746 A JPS6439746 A JP S6439746A
- Authority
- JP
- Japan
- Prior art keywords
- film
- metal wiring
- metal
- wiring film
- wafer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
- Semiconductor Integrated Circuits (AREA)
Abstract
PURPOSE:To reduce in size a whole semiconductor chip and to suppress a malfunction of an interlayer insulating film by providing a first metal wiring film for controlling a small current and a second metal wiring film larger in thickness than the first film for controlling a large current on the same chip. CONSTITUTION:A first metal film B having a thickness, such as 1mum adapted for a metal wiring film for a small current controlling circuit element 2 is formed on a wafer A formed with the element 2 and a large current controlling circuit element 3 on the same semiconductor chip 1, the part corresponding to the former 2 is patterned in a predetermined shape to form a small current metal wiring film 4. Then, an interlayer insulating film 7 having a contact hole 7a arriving at the film 4 is formed on the wafer A. Then, a second metal film D having a thickness larger than that of the metal B, such as 4mum is formed on the wafer A, the part corresponding to the latter 3 and the part corresponding to the interlayer insulating film are patterned in a predetermined shape to form a large current metal wiring film 5 and an auxiliary metal wiring film 6 for the former 2.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19666187A JPS6439746A (en) | 1987-08-06 | 1987-08-06 | Manufacture of semiconductor integrated circuit |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19666187A JPS6439746A (en) | 1987-08-06 | 1987-08-06 | Manufacture of semiconductor integrated circuit |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6439746A true JPS6439746A (en) | 1989-02-10 |
Family
ID=16361493
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP19666187A Pending JPS6439746A (en) | 1987-08-06 | 1987-08-06 | Manufacture of semiconductor integrated circuit |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6439746A (en) |
-
1987
- 1987-08-06 JP JP19666187A patent/JPS6439746A/en active Pending
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