JPS6431411A - Device for closing tube opening of heat treatment furnace - Google Patents

Abstract

PURPOSE:To eliminate the leakage of a gas due to deterioration of materials and facilitate mechanization as well as automation, by inserting a seal holder in the opening side end part of a core tube, thereby abutting a closing plate on this side face and also by making a connection part between the core tube and closing plate communicate with the exhaust side of a disposal gas. CONSTITUTION:After inserting a wafer into the inside of a core tube 2, the core tube 2 where its closing plate 4 comes closely into contact with the side face 10c of a seal holder 10 is hermetically sealed. After that, a gas is supplied from a gas inlet to the core tube 2 and is compulsorily exhausted from an opening through an exhaust port 10f of the seal holder 10, thereby passing through a connector 13, a hose 14, a pipe 15, and a duct 16 after treating the wafer of the inside. As a disposal gas is compulsorily exhausted, grooves 10b and 10d prepared at the seal holder 10 are always in a state of negative pressure. Then gases which are leaking out from gaps between seal holder 10 and a contact part of the core tube 2 as well as between the closing plate 4 and the contact part of the seal holder 10 are drawn in the grooves 10b and 10d and then are exhausted from the exhaust port 10f. Thus no leakage of them develops at all.