JPS6430366U - - Google Patents
Info
- Publication number
- JPS6430366U JPS6430366U JP12247387U JP12247387U JPS6430366U JP S6430366 U JPS6430366 U JP S6430366U JP 12247387 U JP12247387 U JP 12247387U JP 12247387 U JP12247387 U JP 12247387U JP S6430366 U JPS6430366 U JP S6430366U
- Authority
- JP
- Japan
- Prior art keywords
- graphite crucible
- silicon single
- single crystals
- pulling silicon
- sealing material
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 10
- 229910002804 graphite Inorganic materials 0.000 claims description 10
- 239000010439 graphite Substances 0.000 claims description 10
- 239000003566 sealing material Substances 0.000 claims description 4
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims 2
- 239000013078 crystal Substances 0.000 claims 2
- 229910052710 silicon Inorganic materials 0.000 claims 2
- 239000010703 silicon Substances 0.000 claims 2
- 238000000034 method Methods 0.000 claims 1
- 239000010453 quartz Substances 0.000 claims 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims 1
- 238000007789 sealing Methods 0.000 description 2
- 238000012856 packing Methods 0.000 description 1
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP12247387U JPH0519338Y2 (fr) | 1987-08-12 | 1987-08-12 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP12247387U JPH0519338Y2 (fr) | 1987-08-12 | 1987-08-12 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS6430366U true JPS6430366U (fr) | 1989-02-23 |
JPH0519338Y2 JPH0519338Y2 (fr) | 1993-05-21 |
Family
ID=31370439
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP12247387U Expired - Lifetime JPH0519338Y2 (fr) | 1987-08-12 | 1987-08-12 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0519338Y2 (fr) |
-
1987
- 1987-08-12 JP JP12247387U patent/JPH0519338Y2/ja not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
JPH0519338Y2 (fr) | 1993-05-21 |