JPS6429815A - Optical switching element - Google Patents

Optical switching element

Info

Publication number
JPS6429815A
JPS6429815A JP18585287A JP18585287A JPS6429815A JP S6429815 A JPS6429815 A JP S6429815A JP 18585287 A JP18585287 A JP 18585287A JP 18585287 A JP18585287 A JP 18585287A JP S6429815 A JPS6429815 A JP S6429815A
Authority
JP
Japan
Prior art keywords
heater electrode
optical waveguide
buffer layer
heat radiation
switching element
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP18585287A
Other languages
Japanese (ja)
Other versions
JP2687362B2 (en
Inventor
Minoru Kiyono
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP62185852A priority Critical patent/JP2687362B2/en
Publication of JPS6429815A publication Critical patent/JPS6429815A/en
Application granted granted Critical
Publication of JP2687362B2 publication Critical patent/JP2687362B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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  • Optical Integrated Circuits (AREA)

Abstract

PURPOSE:To obtain a temperature control type optical switching element which is excellent in the heating and radiation efficiency of an optical waveguide and has stable characteristics by forming heat radiation projections of metal, etc., on an electric insulating layer coated with a heater electrode. CONSTITUTION:The optical waveguide 2 is formed on the surface of a waveguide substrate 1 made of silicon, a buffer layer 4 which provides insulation is formed on its entire surface, and the heater electrode 3 made of a thin film of gold is arranged by vapor deposition on the surface of the buffer layer 4 very closely to the optical waveguide 2. Then a thin film of a semiconductor such as silicon is formed on the surface of the buffer layer 4 while as the electric insulating layer 5 while covering the heater electrode 3, and the heat radiation projections 6 for improving the radiation effect of heating are formed lastly. Consequently, the heater electrode is shielded from an atmosphere to obtain the optical waveguide which is characteristically stable and heat generated by the heater electrode is radiated forcibly by the heat radiation projections 6 to enable fast switching.
JP62185852A 1987-07-24 1987-07-24 Optical switching element Expired - Fee Related JP2687362B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62185852A JP2687362B2 (en) 1987-07-24 1987-07-24 Optical switching element

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62185852A JP2687362B2 (en) 1987-07-24 1987-07-24 Optical switching element

Publications (2)

Publication Number Publication Date
JPS6429815A true JPS6429815A (en) 1989-01-31
JP2687362B2 JP2687362B2 (en) 1997-12-08

Family

ID=16178007

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62185852A Expired - Fee Related JP2687362B2 (en) 1987-07-24 1987-07-24 Optical switching element

Country Status (1)

Country Link
JP (1) JP2687362B2 (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0634925A (en) * 1992-07-20 1994-02-10 Nippon Telegr & Teleph Corp <Ntt> Optical waveguide circuit device
JPH0720334A (en) * 1993-06-17 1995-01-24 Oki Electric Ind Co Ltd Mounting structure for quartz optical waveguide substrate in optical changeover switch module
US7369794B2 (en) 2004-08-04 2008-05-06 Brother Kogyo Kabushiki Kaisha Image recording apparatus and opening and closing mechanism

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4899393B2 (en) 2005-09-21 2012-03-21 日立電線株式会社 Waveguide-type variable optical attenuator
KR20240053670A (en) * 2020-12-07 2024-04-24 오로라 오퍼레이션스, 인크. Heat dissipation in an optical device

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5013058A (en) * 1973-06-04 1975-02-10
JPS5855914A (en) * 1981-09-30 1983-04-02 Ricoh Co Ltd Optical switch
JPS5858524A (en) * 1981-10-02 1983-04-07 Ricoh Co Ltd Optical switch
JPS58125024A (en) * 1982-01-20 1983-07-25 Omron Tateisi Electronics Co Two-dimensional optical deflector

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5013058A (en) * 1973-06-04 1975-02-10
JPS5855914A (en) * 1981-09-30 1983-04-02 Ricoh Co Ltd Optical switch
JPS5858524A (en) * 1981-10-02 1983-04-07 Ricoh Co Ltd Optical switch
JPS58125024A (en) * 1982-01-20 1983-07-25 Omron Tateisi Electronics Co Two-dimensional optical deflector

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0634925A (en) * 1992-07-20 1994-02-10 Nippon Telegr & Teleph Corp <Ntt> Optical waveguide circuit device
JPH0720334A (en) * 1993-06-17 1995-01-24 Oki Electric Ind Co Ltd Mounting structure for quartz optical waveguide substrate in optical changeover switch module
US7369794B2 (en) 2004-08-04 2008-05-06 Brother Kogyo Kabushiki Kaisha Image recording apparatus and opening and closing mechanism

Also Published As

Publication number Publication date
JP2687362B2 (en) 1997-12-08

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Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees