JPS6429815A - Optical switching element - Google Patents
Optical switching elementInfo
- Publication number
- JPS6429815A JPS6429815A JP18585287A JP18585287A JPS6429815A JP S6429815 A JPS6429815 A JP S6429815A JP 18585287 A JP18585287 A JP 18585287A JP 18585287 A JP18585287 A JP 18585287A JP S6429815 A JPS6429815 A JP S6429815A
- Authority
- JP
- Japan
- Prior art keywords
- heater electrode
- optical waveguide
- buffer layer
- heat radiation
- switching element
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Optical Integrated Circuits (AREA)
Abstract
PURPOSE:To obtain a temperature control type optical switching element which is excellent in the heating and radiation efficiency of an optical waveguide and has stable characteristics by forming heat radiation projections of metal, etc., on an electric insulating layer coated with a heater electrode. CONSTITUTION:The optical waveguide 2 is formed on the surface of a waveguide substrate 1 made of silicon, a buffer layer 4 which provides insulation is formed on its entire surface, and the heater electrode 3 made of a thin film of gold is arranged by vapor deposition on the surface of the buffer layer 4 very closely to the optical waveguide 2. Then a thin film of a semiconductor such as silicon is formed on the surface of the buffer layer 4 while as the electric insulating layer 5 while covering the heater electrode 3, and the heat radiation projections 6 for improving the radiation effect of heating are formed lastly. Consequently, the heater electrode is shielded from an atmosphere to obtain the optical waveguide which is characteristically stable and heat generated by the heater electrode is radiated forcibly by the heat radiation projections 6 to enable fast switching.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62185852A JP2687362B2 (en) | 1987-07-24 | 1987-07-24 | Optical switching element |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62185852A JP2687362B2 (en) | 1987-07-24 | 1987-07-24 | Optical switching element |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS6429815A true JPS6429815A (en) | 1989-01-31 |
JP2687362B2 JP2687362B2 (en) | 1997-12-08 |
Family
ID=16178007
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP62185852A Expired - Fee Related JP2687362B2 (en) | 1987-07-24 | 1987-07-24 | Optical switching element |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP2687362B2 (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0634925A (en) * | 1992-07-20 | 1994-02-10 | Nippon Telegr & Teleph Corp <Ntt> | Optical waveguide circuit device |
JPH0720334A (en) * | 1993-06-17 | 1995-01-24 | Oki Electric Ind Co Ltd | Mounting structure for quartz optical waveguide substrate in optical changeover switch module |
US7369794B2 (en) | 2004-08-04 | 2008-05-06 | Brother Kogyo Kabushiki Kaisha | Image recording apparatus and opening and closing mechanism |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4899393B2 (en) | 2005-09-21 | 2012-03-21 | 日立電線株式会社 | Waveguide-type variable optical attenuator |
KR20240053670A (en) * | 2020-12-07 | 2024-04-24 | 오로라 오퍼레이션스, 인크. | Heat dissipation in an optical device |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5013058A (en) * | 1973-06-04 | 1975-02-10 | ||
JPS5855914A (en) * | 1981-09-30 | 1983-04-02 | Ricoh Co Ltd | Optical switch |
JPS5858524A (en) * | 1981-10-02 | 1983-04-07 | Ricoh Co Ltd | Optical switch |
JPS58125024A (en) * | 1982-01-20 | 1983-07-25 | Omron Tateisi Electronics Co | Two-dimensional optical deflector |
-
1987
- 1987-07-24 JP JP62185852A patent/JP2687362B2/en not_active Expired - Fee Related
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5013058A (en) * | 1973-06-04 | 1975-02-10 | ||
JPS5855914A (en) * | 1981-09-30 | 1983-04-02 | Ricoh Co Ltd | Optical switch |
JPS5858524A (en) * | 1981-10-02 | 1983-04-07 | Ricoh Co Ltd | Optical switch |
JPS58125024A (en) * | 1982-01-20 | 1983-07-25 | Omron Tateisi Electronics Co | Two-dimensional optical deflector |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0634925A (en) * | 1992-07-20 | 1994-02-10 | Nippon Telegr & Teleph Corp <Ntt> | Optical waveguide circuit device |
JPH0720334A (en) * | 1993-06-17 | 1995-01-24 | Oki Electric Ind Co Ltd | Mounting structure for quartz optical waveguide substrate in optical changeover switch module |
US7369794B2 (en) | 2004-08-04 | 2008-05-06 | Brother Kogyo Kabushiki Kaisha | Image recording apparatus and opening and closing mechanism |
Also Published As
Publication number | Publication date |
---|---|
JP2687362B2 (en) | 1997-12-08 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
LAPS | Cancellation because of no payment of annual fees |