JPS6428372A - Substrate holding mechanism - Google Patents

Substrate holding mechanism

Info

Publication number
JPS6428372A
JPS6428372A JP18472087A JP18472087A JPS6428372A JP S6428372 A JPS6428372 A JP S6428372A JP 18472087 A JP18472087 A JP 18472087A JP 18472087 A JP18472087 A JP 18472087A JP S6428372 A JPS6428372 A JP S6428372A
Authority
JP
Japan
Prior art keywords
substrate
medium
substrate holding
periphery
optical recording
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP18472087A
Other languages
Japanese (ja)
Inventor
Akira Aoyama
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Epson Corp
Original Assignee
Seiko Epson Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seiko Epson Corp filed Critical Seiko Epson Corp
Priority to JP18472087A priority Critical patent/JPS6428372A/en
Publication of JPS6428372A publication Critical patent/JPS6428372A/en
Pending legal-status Critical Current

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Abstract

PURPOSE:To obtain a substrate holding mechanism enabling the production of an unscratched magneto-optical recording medium on a discoid substrate or a thin film, by providing an angle to each contact part between the periphery of the substrate and a substrate fitting jig. CONSTITUTION:In a side sputtering device in which a plastic discoid substrate 2 and a target are placed opposite to each other, 5 deg. angle is provided to the substrate holding parts A, A' (especially to the film forming surface sides) of a rotating and revolving Al jig 1 which brings the substrate 2 into rotation and revolution. Thus, the damage of the substrate 2 on the film forming surface side can be prevented. The external appearance of a formed magneto-optical recording medium is improved and the initial characteristics of the periphery of the medium are also improved, so the intrasurface distribution of the medium disappears. Accordingly, mass productivity and prolonged service life can be attained.
JP18472087A 1987-07-24 1987-07-24 Substrate holding mechanism Pending JPS6428372A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18472087A JPS6428372A (en) 1987-07-24 1987-07-24 Substrate holding mechanism

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18472087A JPS6428372A (en) 1987-07-24 1987-07-24 Substrate holding mechanism

Publications (1)

Publication Number Publication Date
JPS6428372A true JPS6428372A (en) 1989-01-30

Family

ID=16158184

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18472087A Pending JPS6428372A (en) 1987-07-24 1987-07-24 Substrate holding mechanism

Country Status (1)

Country Link
JP (1) JPS6428372A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03191059A (en) * 1989-12-20 1991-08-21 Matsushita Electric Ind Co Ltd Sputtering device
JP2007290426A (en) * 2006-04-21 2007-11-08 Toyota Motor Corp Structure of front part of car body
JP2008037123A (en) * 2006-08-01 2008-02-21 Toyota Motor Corp Upper structure for car body

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03191059A (en) * 1989-12-20 1991-08-21 Matsushita Electric Ind Co Ltd Sputtering device
JP2007290426A (en) * 2006-04-21 2007-11-08 Toyota Motor Corp Structure of front part of car body
JP2008037123A (en) * 2006-08-01 2008-02-21 Toyota Motor Corp Upper structure for car body

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