JPS6427177A - Resistance heating element of graphite - Google Patents

Resistance heating element of graphite

Info

Publication number
JPS6427177A
JPS6427177A JP18104187A JP18104187A JPS6427177A JP S6427177 A JPS6427177 A JP S6427177A JP 18104187 A JP18104187 A JP 18104187A JP 18104187 A JP18104187 A JP 18104187A JP S6427177 A JPS6427177 A JP S6427177A
Authority
JP
Japan
Prior art keywords
heating element
graphite
protection tube
gas
damage
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP18104187A
Other languages
Japanese (ja)
Other versions
JPH048910B2 (en
Inventor
Tadaoki Morimoto
Michiya Okada
Kenichi Usami
Toshimi Matsumoto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP18104187A priority Critical patent/JPS6427177A/en
Publication of JPS6427177A publication Critical patent/JPS6427177A/en
Publication of JPH048910B2 publication Critical patent/JPH048910B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Resistance Heating (AREA)
  • Furnace Details (AREA)

Abstract

PURPOSE:To prevent an alumina protection tube from deterioration and damage and to improve life performance of a graphite heating element by employing a CO gas atmosphere in a heat generator space. CONSTITUTION:Carbon monoxide gas is introduced from an end 14 of a graphite heating element 1 into an inner hole. Part of the CO gas, after filling the inside of an alumina protection tube 2 via a gas flow hole 3 arranged near the other end of the heating element, flows again to the inner hole and is discharged out of the other end 15. Use of the carbon monoxide gas prevents the heating element 1 from being damaged by oxidation and the protection tube 2 is protected from deterioration and damage. Furthermore, since graphite packings 9, 10 are able to slide easily, mechanical damage such as cracks due to the changes in lengths of the heating element 1 and the protection tube 2 as a result of the temperature changes at the time of applying and stopping current to the heating element is prevented.
JP18104187A 1987-07-22 1987-07-22 Resistance heating element of graphite Granted JPS6427177A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18104187A JPS6427177A (en) 1987-07-22 1987-07-22 Resistance heating element of graphite

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18104187A JPS6427177A (en) 1987-07-22 1987-07-22 Resistance heating element of graphite

Publications (2)

Publication Number Publication Date
JPS6427177A true JPS6427177A (en) 1989-01-30
JPH048910B2 JPH048910B2 (en) 1992-02-18

Family

ID=16093731

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18104187A Granted JPS6427177A (en) 1987-07-22 1987-07-22 Resistance heating element of graphite

Country Status (1)

Country Link
JP (1) JPS6427177A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03108323A (en) * 1989-09-19 1991-05-08 Watkins Johnson Co Heating method for heater assembly and substrate
JPH03146751A (en) * 1989-10-31 1991-06-21 Japan Vilene Co Ltd Nonwoven cloth
JP2007198669A (en) * 2006-01-26 2007-08-09 Ibiden Co Ltd Heating furnace

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03108323A (en) * 1989-09-19 1991-05-08 Watkins Johnson Co Heating method for heater assembly and substrate
JPH03146751A (en) * 1989-10-31 1991-06-21 Japan Vilene Co Ltd Nonwoven cloth
JP2007198669A (en) * 2006-01-26 2007-08-09 Ibiden Co Ltd Heating furnace

Also Published As

Publication number Publication date
JPH048910B2 (en) 1992-02-18

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Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees