JPS6427155A - Electric field forming device - Google Patents
Electric field forming deviceInfo
- Publication number
- JPS6427155A JPS6427155A JP18224887A JP18224887A JPS6427155A JP S6427155 A JPS6427155 A JP S6427155A JP 18224887 A JP18224887 A JP 18224887A JP 18224887 A JP18224887 A JP 18224887A JP S6427155 A JPS6427155 A JP S6427155A
- Authority
- JP
- Japan
- Prior art keywords
- electric field
- electrode
- borides
- iva
- carbides
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
Abstract
PURPOSE:To form a required electric field stably for a long time by forming at least the surface of an electrode for formation of electric field from electroconductive ceramic containing one or more of borides, carbides, nitrides of transition metals belonging to IVa, Va groups in amounts exceeding a specific vol% value. CONSTITUTION:Electroconductive ceramic is used for an electrode for forming electric field, wherein the ceramic shall contain one or more of borides, carbides, and nitrides of transition metals belonging to the IVa, Va groups at least in an amount over 30% by volume. This compound or compounds will generally have an electric conductivity of 10<4>-10<5>OMEGA<-1>cm<-1>, with no problem to serve as electrode. As it has covalent crystals as clear from its structure, possible damages because of electrons or other particles in the electric field are much less than any metal consisting merely of metal bonds. Because of higher chemical stability than metals, it is strong against oxidation and corrosion, and therefore hard to deteriorate.
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP18224887A JPS6427155A (en) | 1987-07-23 | 1987-07-23 | Electric field forming device |
EP88111694A EP0300452B1 (en) | 1987-07-23 | 1988-07-20 | Field formation apparatus |
DE8888111694T DE3866043D1 (en) | 1987-07-23 | 1988-07-20 | FIELD GENERATION DEVICE. |
US07/683,129 US5102629A (en) | 1987-07-23 | 1991-04-10 | Field formation apparatus |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP18224887A JPS6427155A (en) | 1987-07-23 | 1987-07-23 | Electric field forming device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6427155A true JPS6427155A (en) | 1989-01-30 |
Family
ID=16114936
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP18224887A Pending JPS6427155A (en) | 1987-07-23 | 1987-07-23 | Electric field forming device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6427155A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH02297853A (en) * | 1989-02-28 | 1990-12-10 | Tokyo Electron Ltd | Electron beam exciting ion source |
-
1987
- 1987-07-23 JP JP18224887A patent/JPS6427155A/en active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH02297853A (en) * | 1989-02-28 | 1990-12-10 | Tokyo Electron Ltd | Electron beam exciting ion source |
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