JPS6426182A - Intensity monitor for exposure of x rays - Google Patents

Intensity monitor for exposure of x rays

Info

Publication number
JPS6426182A
JPS6426182A JP62182641A JP18264187A JPS6426182A JP S6426182 A JPS6426182 A JP S6426182A JP 62182641 A JP62182641 A JP 62182641A JP 18264187 A JP18264187 A JP 18264187A JP S6426182 A JPS6426182 A JP S6426182A
Authority
JP
Japan
Prior art keywords
rays
exposure
ssd
ray beam
intensity
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP62182641A
Other languages
Japanese (ja)
Inventor
Toshiharu Goto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP62182641A priority Critical patent/JPS6426182A/en
Publication of JPS6426182A publication Critical patent/JPS6426182A/en
Pending legal-status Critical Current

Links

Landscapes

  • Measurement Of Radiation (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)

Abstract

PURPOSE:To continuously execute monitoring by using an SSD even against an SOR light, by utilizing gaseous scattering of X rays. CONSTITUTION:X rays incoming into an exposure chamber 10 are divided into an X-ray beam 13 for exposure and an X-ray beam 14 for monitoring by a slit and a shielding plate 12. An SSD 4 being a solid state detector is placed vertically under a scattering area 6. The X-ray beam is allowed to pass through in gaseous helium of an atmospheric pressure. By changing the size of the slit, gaseous helium pressure, and the kind of gas, the scattering intensity is adjusted. In such a way, the SSD can be used against an SOR light (X rays) whose intensity is high, and also, even in the course of exposure of X rays, the intensity can be monitored without obstructing the exposure.
JP62182641A 1987-07-22 1987-07-22 Intensity monitor for exposure of x rays Pending JPS6426182A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62182641A JPS6426182A (en) 1987-07-22 1987-07-22 Intensity monitor for exposure of x rays

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62182641A JPS6426182A (en) 1987-07-22 1987-07-22 Intensity monitor for exposure of x rays

Publications (1)

Publication Number Publication Date
JPS6426182A true JPS6426182A (en) 1989-01-27

Family

ID=16121851

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62182641A Pending JPS6426182A (en) 1987-07-22 1987-07-22 Intensity monitor for exposure of x rays

Country Status (1)

Country Link
JP (1) JPS6426182A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2016526171A (en) * 2013-06-03 2016-09-01 アンフォース・レイセイフ・アーベー X-ray imaging apparatus and apparatus for measuring X-ray dose parameters in an X-ray detector

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2016526171A (en) * 2013-06-03 2016-09-01 アンフォース・レイセイフ・アーベー X-ray imaging apparatus and apparatus for measuring X-ray dose parameters in an X-ray detector

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