JPS6420615A - Cantilever for semiconductor treatment - Google Patents

Cantilever for semiconductor treatment

Info

Publication number
JPS6420615A
JPS6420615A JP17741587A JP17741587A JPS6420615A JP S6420615 A JPS6420615 A JP S6420615A JP 17741587 A JP17741587 A JP 17741587A JP 17741587 A JP17741587 A JP 17741587A JP S6420615 A JPS6420615 A JP S6420615A
Authority
JP
Japan
Prior art keywords
grooves
cantilever
wafer
deflection
strength
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP17741587A
Other languages
Japanese (ja)
Other versions
JP2568209B2 (en
Inventor
Masahiro Yamaguchi
Yoshinobu Tanada
Takashi Tanaka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Coorstek KK
Original Assignee
Toshiba Ceramics Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Ceramics Co Ltd filed Critical Toshiba Ceramics Co Ltd
Priority to JP17741587A priority Critical patent/JP2568209B2/en
Publication of JPS6420615A publication Critical patent/JPS6420615A/en
Application granted granted Critical
Publication of JP2568209B2 publication Critical patent/JP2568209B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Landscapes

  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)

Abstract

PURPOSE:To eliminate a deflection and a decrease in a strength by detachably attaching a plurality of quartz glass rods, each with many wafer supporting grooves formed in it, on a cantilever body made of silicon carbide, a jig for semiconductor diffusion. CONSTITUTION:The end of a cantilever body 1 made of silicon carbide is formed in a recess corresponding to the shape of a wafer, and three engaging grooves, two of which are at the upper end and one of which is at a bottom, are formed along a longitudinal direction. A quartz glass rod 2 formed with many wafer supporting grooves 2a is detachably attached to the grooves, and a wafer 10 is supported by the grooves 2a. Thus, since a wafer boat is not used, the deflection of a cantilever does not almost become a problem, and since the supporting groove is not formed on the body, its strength is not decreased. Further, since the rod 2 is detachable, it can be easily cleaned and replaced.
JP17741587A 1987-07-16 1987-07-16 Cantilever for semiconductor processing Expired - Fee Related JP2568209B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17741587A JP2568209B2 (en) 1987-07-16 1987-07-16 Cantilever for semiconductor processing

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17741587A JP2568209B2 (en) 1987-07-16 1987-07-16 Cantilever for semiconductor processing

Publications (2)

Publication Number Publication Date
JPS6420615A true JPS6420615A (en) 1989-01-24
JP2568209B2 JP2568209B2 (en) 1996-12-25

Family

ID=16030525

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17741587A Expired - Fee Related JP2568209B2 (en) 1987-07-16 1987-07-16 Cantilever for semiconductor processing

Country Status (1)

Country Link
JP (1) JP2568209B2 (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7055702B1 (en) 2000-06-06 2006-06-06 Saint-Gobain Ceramics & Plastics, Inc. Slip resistant horizontal semiconductor wafer boat
JP2021504738A (en) * 2017-11-22 2021-02-15 マジック リープ， インコーポレイテッドＭａｇｉｃ Ｌｅａｐ，Ｉｎｃ． Thermal cantilever beam optical scanner

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7055702B1 (en) 2000-06-06 2006-06-06 Saint-Gobain Ceramics & Plastics, Inc. Slip resistant horizontal semiconductor wafer boat
JP2021504738A (en) * 2017-11-22 2021-02-15 マジック リープ， インコーポレイテッドＭａｇｉｃ Ｌｅａｐ，Ｉｎｃ． Thermal cantilever beam optical scanner

Also Published As

Publication number Publication date
JP2568209B2 (en) 1996-12-25

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