JPS6419726A - Wet treater - Google Patents
Wet treaterInfo
- Publication number
- JPS6419726A JPS6419726A JP17460887A JP17460887A JPS6419726A JP S6419726 A JPS6419726 A JP S6419726A JP 17460887 A JP17460887 A JP 17460887A JP 17460887 A JP17460887 A JP 17460887A JP S6419726 A JPS6419726 A JP S6419726A
- Authority
- JP
- Japan
- Prior art keywords
- treating tank
- unit moving
- wet treating
- moving members
- drives
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
- Photosensitive Polymer And Photoresist Processing (AREA)
- Weting (AREA)
Abstract
PURPOSE:To decrease drives, and to simplify a conveyor by composing unit moving members carrying a substrate to be treated to a wet treating tank at the next stage from a wet treating tank at every wet treating tank, connecting the unit moving members at every wet treating tank and driving the unit moving members by a common drive. CONSTITUTION:Unit moving members 42A carrying a transparent glass substrate SUB to a wet treating tank at the next stage from a wet treating tank are constituted at every wet treating tank, the unit moving members 42A at every wet treating tank are connected by connecting members 42C, and common drives 42D and 42E for carrying the transparent glass substrate SUB are connected to a plurality of the coupled unit moving members 42A. Accordingly, drives for the unit moving members 42A need not be installed at every unit moving member 42A among each wet treating tank, thus decreasing drives, then simplifying a conveyor 42.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP17460887A JP2601829B2 (en) | 1987-07-15 | 1987-07-15 | Wet processing equipment |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP17460887A JP2601829B2 (en) | 1987-07-15 | 1987-07-15 | Wet processing equipment |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS6419726A true JPS6419726A (en) | 1989-01-23 |
JP2601829B2 JP2601829B2 (en) | 1997-04-16 |
Family
ID=15981561
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP17460887A Expired - Fee Related JP2601829B2 (en) | 1987-07-15 | 1987-07-15 | Wet processing equipment |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP2601829B2 (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2014216383A (en) * | 2013-04-23 | 2014-11-17 | 株式会社島津製作所 | Substrate transfer system and substrate transfer method |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6084823A (en) * | 1983-10-15 | 1985-05-14 | Mitsubishi Electric Corp | Device for etching semiconductor wafer |
JPS61121337A (en) * | 1984-11-16 | 1986-06-09 | Matsushita Electric Ind Co Ltd | Treatment of wafer |
-
1987
- 1987-07-15 JP JP17460887A patent/JP2601829B2/en not_active Expired - Fee Related
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6084823A (en) * | 1983-10-15 | 1985-05-14 | Mitsubishi Electric Corp | Device for etching semiconductor wafer |
JPS61121337A (en) * | 1984-11-16 | 1986-06-09 | Matsushita Electric Ind Co Ltd | Treatment of wafer |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2014216383A (en) * | 2013-04-23 | 2014-11-17 | 株式会社島津製作所 | Substrate transfer system and substrate transfer method |
Also Published As
Publication number | Publication date |
---|---|
JP2601829B2 (en) | 1997-04-16 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
LAPS | Cancellation because of no payment of annual fees |