JPS6419726A - Wet treater - Google Patents

Wet treater

Info

Publication number
JPS6419726A
JPS6419726A JP17460887A JP17460887A JPS6419726A JP S6419726 A JPS6419726 A JP S6419726A JP 17460887 A JP17460887 A JP 17460887A JP 17460887 A JP17460887 A JP 17460887A JP S6419726 A JPS6419726 A JP S6419726A
Authority
JP
Japan
Prior art keywords
treating tank
unit moving
wet treating
moving members
drives
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP17460887A
Other languages
Japanese (ja)
Other versions
JP2601829B2 (en
Inventor
Masateru Wakui
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP17460887A priority Critical patent/JP2601829B2/en
Publication of JPS6419726A publication Critical patent/JPS6419726A/en
Application granted granted Critical
Publication of JP2601829B2 publication Critical patent/JP2601829B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Landscapes

  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Photosensitive Polymer And Photoresist Processing (AREA)
  • Weting (AREA)

Abstract

PURPOSE:To decrease drives, and to simplify a conveyor by composing unit moving members carrying a substrate to be treated to a wet treating tank at the next stage from a wet treating tank at every wet treating tank, connecting the unit moving members at every wet treating tank and driving the unit moving members by a common drive. CONSTITUTION:Unit moving members 42A carrying a transparent glass substrate SUB to a wet treating tank at the next stage from a wet treating tank are constituted at every wet treating tank, the unit moving members 42A at every wet treating tank are connected by connecting members 42C, and common drives 42D and 42E for carrying the transparent glass substrate SUB are connected to a plurality of the coupled unit moving members 42A. Accordingly, drives for the unit moving members 42A need not be installed at every unit moving member 42A among each wet treating tank, thus decreasing drives, then simplifying a conveyor 42.
JP17460887A 1987-07-15 1987-07-15 Wet processing equipment Expired - Fee Related JP2601829B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17460887A JP2601829B2 (en) 1987-07-15 1987-07-15 Wet processing equipment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17460887A JP2601829B2 (en) 1987-07-15 1987-07-15 Wet processing equipment

Publications (2)

Publication Number Publication Date
JPS6419726A true JPS6419726A (en) 1989-01-23
JP2601829B2 JP2601829B2 (en) 1997-04-16

Family

ID=15981561

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17460887A Expired - Fee Related JP2601829B2 (en) 1987-07-15 1987-07-15 Wet processing equipment

Country Status (1)

Country Link
JP (1) JP2601829B2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2014216383A (en) * 2013-04-23 2014-11-17 株式会社島津製作所 Substrate transfer system and substrate transfer method

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6084823A (en) * 1983-10-15 1985-05-14 Mitsubishi Electric Corp Device for etching semiconductor wafer
JPS61121337A (en) * 1984-11-16 1986-06-09 Matsushita Electric Ind Co Ltd Treatment of wafer

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6084823A (en) * 1983-10-15 1985-05-14 Mitsubishi Electric Corp Device for etching semiconductor wafer
JPS61121337A (en) * 1984-11-16 1986-06-09 Matsushita Electric Ind Co Ltd Treatment of wafer

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2014216383A (en) * 2013-04-23 2014-11-17 株式会社島津製作所 Substrate transfer system and substrate transfer method

Also Published As

Publication number Publication date
JP2601829B2 (en) 1997-04-16

Similar Documents

Publication Publication Date Title
DK568786D0 (en) SIZE-INDEPENDENT MODULAR PATH TREATMENT LINE AND MODULES
DE3789015D1 (en) Apparatus for sorting by color.
FI884742A0 (en) ELEKTRISK KABEL FOER GENOMFOERNING AV AOTMINSTONE EN STIMULATION OCH / ELLER MAETNING I EN MAENSKO- ELLER DJURKROPP.
FI874356A (en) REGLERING AV LUFTMAENGDEN SOM MATAS IN I EN GASMASK.
DE3884956D1 (en) Clarification process.
FI854458A (en) FOERFARANDE OCH APPARAT FOER UTFOERANDE AV EN MICROBIOLOGICAL ELLER ENZYMATISK PROCESS.
DE3789765D1 (en) Inkjet printing process.
DE3851400D1 (en) Refining process of ethylene glycol.
DE3481412D1 (en) APPARATUS FOR PRODUCING LABELS.
DE3773382D1 (en) DEVICE FOR CONVEYING UNTREATED GOODS.
DE58907478D1 (en) Light guides based on polycarbonate fibers and process for their production.
DE69010373D1 (en) Spinneret for pulling glass fibers.
JPS6419726A (en) Wet treater
IT8848314A0 (en) DYEING PROCESS FOR MIXED SUBSTRATES
DE68909674D1 (en) Process for multi-stage reforming with intermediate removal of aromatics.
IT1231508B (en) PROCESS FOR DYING OR PRINTING CELLULOSE SUBSTRATES WITH SULFUR DYES.
IT1138134B (en) ENDOPROTEINASE-LYS-C FROM BACTERIA, PROCESS FOR ITS OBTAINING AND USE
DE3785611D1 (en) METHOD FOR PRODUCING INDIVIDUALLY CROSSLINKED FIBERS.
DE3888362D1 (en) TIRE PRODUCTION.
IT7923405A0 (en) PROCESS FOR DYEING TEXTILE PRODUCTS.
DE3774041D1 (en) APPARATUS FOR HANDLING BOWS.
FI953141A0 (en) Method for Isolation and Purification of HIV Glycoprotein GP 160, Produced in Cells
DE3868681D1 (en) APPARATUS FOR TRANSPORTING BOWS.
FI894725A (en) FOERFARANDE OCH APPARATUR FOER BEHANDLING AV UTSPAEDD SVAVELSYRALOESNING SOM INNEHAOLLER LOEST JAERN (II) SULFAT ELLER EN METALLSULFATBLANDNING BESTAOENDE FOERETRAEDESVIS AV JAERN (II) SULFAT.
DE3769922D1 (en) APPARATUS FOR HANDLING PRINTED PRODUCTS.

Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees