JPS6419305A - Production of multi-layered thin film - Google Patents
Production of multi-layered thin filmInfo
- Publication number
- JPS6419305A JPS6419305A JP17631987A JP17631987A JPS6419305A JP S6419305 A JPS6419305 A JP S6419305A JP 17631987 A JP17631987 A JP 17631987A JP 17631987 A JP17631987 A JP 17631987A JP S6419305 A JPS6419305 A JP S6419305A
- Authority
- JP
- Japan
- Prior art keywords
- compd
- metal oxide
- film
- coated
- org
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Surface Treatment Of Glass (AREA)
- Optical Filters (AREA)
- Laminated Bodies (AREA)
Abstract
PURPOSE:To prevent cracking by compounding an org. tin compd. which is converted by calcination to SnO2 to at least either of a coated film contg. an org. metal compd. which is converted to a 1st metal oxide and a coated film contg. an org. compd. which is converted to the 2nd metal oxide. CONSTITUTION:A coating compd. is prepd. by dissolving metal alcoholate Si(OC2 H5)4 to be converted to SiO2 which is the 1st metal oxide with ethyl alcohol, hydrochloric acid and water and compounding di-n-butyl tin dimaleate therewith. This coating compd. is coated on the surface of a quartz glass plate and is dried to form the coated film. The film is calcined to form the thin film of the 1st metal oxide. The coating compd. prepd. by dissolving the metal alcoholate with ethyl alcohol, hydrochloric acid and water and compounding the di-n-butyl tin maleate which is the above-mentioned org. tin compd. is then coated on the thin film of the 1st metal oxide and is dried to form the coated film. The film is calcined under the same conditions to laminate the thin film of the 2nd metal oxide. The multi-layered thin films obtd. by repeating these operations a prescribed number of times do not crack and exfoliate.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17631987A JPS6419305A (en) | 1987-07-15 | 1987-07-15 | Production of multi-layered thin film |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17631987A JPS6419305A (en) | 1987-07-15 | 1987-07-15 | Production of multi-layered thin film |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6419305A true JPS6419305A (en) | 1989-01-23 |
Family
ID=16011506
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17631987A Pending JPS6419305A (en) | 1987-07-15 | 1987-07-15 | Production of multi-layered thin film |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6419305A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO1999042863A1 (en) * | 1998-02-18 | 1999-08-26 | Seiko Epson Corporation | Method of fabricating distributed reflection multilayer mirror |
| EP2498024A2 (en) | 2008-02-13 | 2012-09-12 | Hitachi Plant Technologies, Ltd. | Cooling system for electronic equipment |
-
1987
- 1987-07-15 JP JP17631987A patent/JPS6419305A/en active Pending
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO1999042863A1 (en) * | 1998-02-18 | 1999-08-26 | Seiko Epson Corporation | Method of fabricating distributed reflection multilayer mirror |
| US6337222B1 (en) | 1998-02-18 | 2002-01-08 | Seiko Epson Corporation | Methods for fabricating distributed reflection multi-layer film mirrors |
| EP2498024A2 (en) | 2008-02-13 | 2012-09-12 | Hitachi Plant Technologies, Ltd. | Cooling system for electronic equipment |
| EP2498025A2 (en) | 2008-02-13 | 2012-09-12 | Hitachi Plant Technologies, Ltd. | Cooling system for electronic equipment |
| EP2503866A2 (en) | 2008-02-13 | 2012-09-26 | Hitachi Plant Technologies, Ltd. | Cooling system for electronic equipment |
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