JPS6418758U - - Google Patents
Info
- Publication number
- JPS6418758U JPS6418758U JP11427887U JP11427887U JPS6418758U JP S6418758 U JPS6418758 U JP S6418758U JP 11427887 U JP11427887 U JP 11427887U JP 11427887 U JP11427887 U JP 11427887U JP S6418758 U JPS6418758 U JP S6418758U
- Authority
- JP
- Japan
- Prior art keywords
- gate electrode
- film
- substrate
- utility
- thin film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000010408 film Substances 0.000 claims description 10
- 239000010409 thin film Substances 0.000 claims description 7
- 239000000758 substrate Substances 0.000 claims description 5
- 229920001721 polyimide Polymers 0.000 claims description 3
- 239000009719 polyimide resin Substances 0.000 claims description 3
- 239000004065 semiconductor Substances 0.000 claims description 2
- 229920002120 photoresistant polymer Polymers 0.000 claims 2
- 229920005575 poly(amic acid) Polymers 0.000 claims 2
- 238000005530 etching Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 3
Landscapes
- Thin Film Transistor (AREA)
- Liquid Crystal (AREA)
- Devices For Indicating Variable Information By Combining Individual Elements (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11427887U JPS6418758U (zh) | 1987-07-25 | 1987-07-25 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11427887U JPS6418758U (zh) | 1987-07-25 | 1987-07-25 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6418758U true JPS6418758U (zh) | 1989-01-30 |
Family
ID=31354876
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11427887U Pending JPS6418758U (zh) | 1987-07-25 | 1987-07-25 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6418758U (zh) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2002067335A1 (fr) * | 2001-02-19 | 2002-08-29 | International Business Machines Corporation | Structure de transistor en couches minces, procede de fabrication d'une structure de transistor en couches minces, et dispositif d'affichage utilisant une structure de transistor en couches minces |
-
1987
- 1987-07-25 JP JP11427887U patent/JPS6418758U/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2002067335A1 (fr) * | 2001-02-19 | 2002-08-29 | International Business Machines Corporation | Structure de transistor en couches minces, procede de fabrication d'une structure de transistor en couches minces, et dispositif d'affichage utilisant une structure de transistor en couches minces |
| US7326600B2 (en) | 2001-02-19 | 2008-02-05 | International Business Machines Corpoartion | Method for manufacturing a thin-film transistor structure |
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