JPS6417743A - Sealing roll device - Google Patents
Sealing roll deviceInfo
- Publication number
- JPS6417743A JPS6417743A JP17341887A JP17341887A JPS6417743A JP S6417743 A JPS6417743 A JP S6417743A JP 17341887 A JP17341887 A JP 17341887A JP 17341887 A JP17341887 A JP 17341887A JP S6417743 A JPS6417743 A JP S6417743A
- Authority
- JP
- Japan
- Prior art keywords
- roll
- pressing
- sealing
- onto
- rolls
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
PURPOSE:To facilitate the maintenance of vacuum state by press-attaching a pressing roll onto a roll which is installed in an auxiliary vacuum chamber for carrying-in and -out a plate member into a vacuum chamber and onto which soft elastic sealing members are laid and pressing the peripheral surface of the pressing roll by a low frictional member. CONSTITUTION:A plurality of auxiliary vacuum chambers are formed in series on the carrying-in and -out sides of a vacuum chamber for applying vacuum evaporation onto a plate member, and a sealing roll device 9 consisting of a roll and a sealing member which are pressed each other is installed at the inlet/outlet of each vacuum chamber. A soft elastic sealing member 10 is laid onto the surface of the sealing rolls 9a and 9b which nipping-transport the plate member 1. Sealing rolls 9a and 9b are pressed onto the pressing rolls 16a and 16b. Further, a pressing member 14 consisting of a low frictional member accommodated into the projection parts 11a and 11b of a spring 11 presses the peripheral surfaces of the pressing rolls 16a and 16b by the pressure of a spring 15. Therefore, the airtight state is surely maintained for a long period, and the vacuum pump is miniaturized, and the service life of a sealing roll can be prolonged.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP17341887A JPS6417743A (en) | 1987-07-10 | 1987-07-10 | Sealing roll device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP17341887A JPS6417743A (en) | 1987-07-10 | 1987-07-10 | Sealing roll device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6417743A true JPS6417743A (en) | 1989-01-20 |
Family
ID=15960077
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP17341887A Pending JPS6417743A (en) | 1987-07-10 | 1987-07-10 | Sealing roll device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6417743A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2010248575A (en) * | 2009-04-16 | 2010-11-04 | Nishi Kogyo Kk | Sealing device, and continuous film-forming apparatus having the sealing device |
CN108602637A (en) * | 2016-01-28 | 2018-09-28 | 株式会社参特伦 | The transfer method of graphene |
-
1987
- 1987-07-10 JP JP17341887A patent/JPS6417743A/en active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2010248575A (en) * | 2009-04-16 | 2010-11-04 | Nishi Kogyo Kk | Sealing device, and continuous film-forming apparatus having the sealing device |
CN108602637A (en) * | 2016-01-28 | 2018-09-28 | 株式会社参特伦 | The transfer method of graphene |
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