JPS6417743A - Sealing roll device - Google Patents

Sealing roll device

Info

Publication number
JPS6417743A
JPS6417743A JP17341887A JP17341887A JPS6417743A JP S6417743 A JPS6417743 A JP S6417743A JP 17341887 A JP17341887 A JP 17341887A JP 17341887 A JP17341887 A JP 17341887A JP S6417743 A JPS6417743 A JP S6417743A
Authority
JP
Japan
Prior art keywords
roll
pressing
sealing
onto
rolls
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP17341887A
Other languages
Japanese (ja)
Inventor
Koken Otsu
Tsutomu Oi
Yoshihiro Yamaguchi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kobe Steel Ltd
Original Assignee
Kobe Steel Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kobe Steel Ltd filed Critical Kobe Steel Ltd
Priority to JP17341887A priority Critical patent/JPS6417743A/en
Publication of JPS6417743A publication Critical patent/JPS6417743A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE:To facilitate the maintenance of vacuum state by press-attaching a pressing roll onto a roll which is installed in an auxiliary vacuum chamber for carrying-in and -out a plate member into a vacuum chamber and onto which soft elastic sealing members are laid and pressing the peripheral surface of the pressing roll by a low frictional member. CONSTITUTION:A plurality of auxiliary vacuum chambers are formed in series on the carrying-in and -out sides of a vacuum chamber for applying vacuum evaporation onto a plate member, and a sealing roll device 9 consisting of a roll and a sealing member which are pressed each other is installed at the inlet/outlet of each vacuum chamber. A soft elastic sealing member 10 is laid onto the surface of the sealing rolls 9a and 9b which nipping-transport the plate member 1. Sealing rolls 9a and 9b are pressed onto the pressing rolls 16a and 16b. Further, a pressing member 14 consisting of a low frictional member accommodated into the projection parts 11a and 11b of a spring 11 presses the peripheral surfaces of the pressing rolls 16a and 16b by the pressure of a spring 15. Therefore, the airtight state is surely maintained for a long period, and the vacuum pump is miniaturized, and the service life of a sealing roll can be prolonged.
JP17341887A 1987-07-10 1987-07-10 Sealing roll device Pending JPS6417743A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17341887A JPS6417743A (en) 1987-07-10 1987-07-10 Sealing roll device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17341887A JPS6417743A (en) 1987-07-10 1987-07-10 Sealing roll device

Publications (1)

Publication Number Publication Date
JPS6417743A true JPS6417743A (en) 1989-01-20

Family

ID=15960077

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17341887A Pending JPS6417743A (en) 1987-07-10 1987-07-10 Sealing roll device

Country Status (1)

Country Link
JP (1) JPS6417743A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010248575A (en) * 2009-04-16 2010-11-04 Nishi Kogyo Kk Sealing device, and continuous film-forming apparatus having the sealing device
CN108602637A (en) * 2016-01-28 2018-09-28 株式会社参特伦 The transfer method of graphene

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010248575A (en) * 2009-04-16 2010-11-04 Nishi Kogyo Kk Sealing device, and continuous film-forming apparatus having the sealing device
CN108602637A (en) * 2016-01-28 2018-09-28 株式会社参特伦 The transfer method of graphene

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