JPS641768B2 - - Google Patents
Info
- Publication number
- JPS641768B2 JPS641768B2 JP9751182A JP9751182A JPS641768B2 JP S641768 B2 JPS641768 B2 JP S641768B2 JP 9751182 A JP9751182 A JP 9751182A JP 9751182 A JP9751182 A JP 9751182A JP S641768 B2 JPS641768 B2 JP S641768B2
- Authority
- JP
- Japan
- Prior art keywords
- mirror
- ceramic
- polygonal rotating
- rotating mirror
- present
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000000919 ceramic Substances 0.000 claims description 14
- 230000003287 optical effect Effects 0.000 claims description 4
- 229910010293 ceramic material Inorganic materials 0.000 claims description 2
- 238000010586 diagram Methods 0.000 description 4
- 229910002593 Fe-Ti Inorganic materials 0.000 description 3
- 229910045601 alloy Inorganic materials 0.000 description 3
- 239000000956 alloy Substances 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- 230000005484 gravity Effects 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 238000004026 adhesive bonding Methods 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 230000002542 deteriorative effect Effects 0.000 description 1
- 230000004907 flux Effects 0.000 description 1
- 230000020169 heat generation Effects 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/10—Scanning systems
- G02B26/12—Scanning systems using multifaceted mirrors
- G02B26/121—Mechanical drive devices for polygonal mirrors
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Laser Beam Printer (AREA)
- Optical Elements Other Than Lenses (AREA)
- Mechanical Optical Scanning Systems (AREA)
- Exposure Or Original Feeding In Electrophotography (AREA)
Description
【発明の詳細な説明】
(1) 発明の技術分野
本発明は光走査を行なうための多角形回転鏡に
関するものである。DETAILED DESCRIPTION OF THE INVENTION (1) Technical Field of the Invention The present invention relates to a polygonal rotating mirror for optical scanning.
(2) 技術の背景
電子写真式高速漢字プリンタ装置においては、
感光ドラムにレーザ光を走査する為に超高速で回
転する多角形回転鏡が用いられている。この回転
鏡は鏡面の倒れ精度が印字品質に大きく影響す
る。このため超高速回転での面精度を保持するに
は遠心膨張や熱膨張による変形が小さく、しかも
軽い材料であることが必要とされている。(2) Technical background In electrophotographic high-speed kanji printers,
A polygonal rotating mirror that rotates at extremely high speed is used to scan the photosensitive drum with laser light. In this rotating mirror, the precision with which the mirror surface falls greatly affects printing quality. For this reason, in order to maintain surface accuracy during ultra-high-speed rotation, it is necessary to use a material that is lightweight and has little deformation due to centrifugal expansion or thermal expansion.
(3) 従来技術と問題点
第１図は従来の多角形回転鏡のユニツトの構造
を示す図である。同図において、１，１′はハウ
ジング、２は軸、３は空気軸受用シリンダー部、
４はスラスト軸受、５はミラー部、６はヒステリ
シスリング、７は駆動用コイル、８は光入出射用
窓をそれぞれ示す。(3) Prior Art and Problems Figure 1 is a diagram showing the structure of a conventional polygonal rotating mirror unit. In the figure, 1 and 1' are housings, 2 is a shaft, 3 is an air bearing cylinder part,
4 is a thrust bearing, 5 is a mirror portion, 6 is a hysteresis ring, 7 is a drive coil, and 8 is a light input/output window.
この多角形回転鏡ユニツトにおいて、ミラー部
５とシリンダー部３は分割構造となつており、シ
リンダー部３には低摩擦、耐摩耗で熱膨張率が低
くしかも軸２と近似した値をもつ異種材料である
セラミツクが用いられ、ミラー部５には高速回転
時の遠心膨張による変形を防ぐ為、ヤング率の高
いFe−Ti合金等が用いられ、シリンダー部３と
焼ばめにより結合されている。このように焼ばめ
により結合された多角形回転鏡は超高速で回転し
温度が上昇すると結合部分に歪を生じ、それが鏡
面の精度に影響して印字品質を低下させるという
欠点があつた。 In this polygonal rotating mirror unit, the mirror part 5 and the cylinder part 3 have a divided structure, and the cylinder part 3 is made of a different material with low friction, wear resistance, and a low coefficient of thermal expansion that is similar to that of the shaft 2. In order to prevent deformation due to centrifugal expansion during high-speed rotation, the mirror portion 5 is made of a Fe-Ti alloy having a high Young's modulus, and is connected to the cylinder portion 3 by shrink fit. Polygonal rotating mirrors connected by shrink fitting in this way rotate at extremely high speeds, and when the temperature rises, distortion occurs in the joint, which affects the precision of the mirror surface and reduces printing quality. .
(4) 発明の目的
本発明は上記従来の欠点に鑑み、超高速回転時
にも歪の生じ難い多角形回転鏡を提供することを
目的とするものである。(4) Object of the Invention In view of the above-mentioned drawbacks of the conventional art, it is an object of the present invention to provide a polygonal rotating mirror that does not easily cause distortion even during ultra-high speed rotation.
(5) 発明の構成
そしてこの目的は超高速の光走査を行なう多角
形回転鏡であつて、軸受シリンダー部とミラー部
とをセラミツク材料にて一体形成して成ることを
特徴とするセラミツク多角形回転鏡を提供するこ
とによつて達成される。(5) Structure of the Invention The object is a polygonal rotating mirror that performs ultra-high-speed optical scanning, which is a ceramic polygon characterized in that the bearing cylinder part and the mirror part are integrally formed from a ceramic material. This is achieved by providing a rotating mirror.
(6) 発明の実施例 以下本発明実施例を図面によつて詳述する。(6) Examples of the invention Embodiments of the present invention will be described in detail below with reference to the drawings.
第２図は本発明によるセラミツク多角形回転鏡
を説明するための図である。同図において、１
０，１０′はハウジング、１１は軸、１２はスラ
スト軸受、１３は本発明のセラミツク多角形回転
鏡、１４は駆動用ヒステリシスリング、１５は駆
動用コイル、１６は光入出射窓をそれぞれ示して
いる。 FIG. 2 is a diagram for explaining a ceramic polygonal rotating mirror according to the present invention. In the same figure, 1
0 and 10' are housings, 11 is a shaft, 12 is a thrust bearing, 13 is a ceramic polygonal rotating mirror of the present invention, 14 is a driving hysteresis ring, 15 is a driving coil, and 16 is a light input/output window. There is.
図に示す如く本発明のセラミツク多角形回転鏡
は空気軸受用のシリンダー部１３ａとミラー部１
３ｂとをセラミツクにて一体成形したものであ
る。なお鏡面部分１３ｃは使用波長によりAuめ
つき、Alスパツタ等の加工により必要な反射率
となるような鏡面としている。 As shown in the figure, the ceramic polygonal rotating mirror of the present invention has a cylinder part 13a for air bearing and a mirror part 1.
3b are integrally molded from ceramic. Note that the mirror surface portion 13c is made into a mirror surface that provides the necessary reflectance by processing such as Au plating or Al sputtering depending on the wavelength used.
このように形成された本発明のセラミツク多角
形回転鏡は次の如き利点を生ずる。 The ceramic polygonal rotating mirror of the present invention formed in this manner has the following advantages.
セラミツクの比重はFe−Ti合金よりも小さ
いので軽量化が実現され、駆動モータのトルク
マージンが向上すると共に、ミラー浮上の立上
りが早くスタートストツプによるスラスト軸受
部の磨耗が軽減され寿命が延長される。 Ceramic has a lower specific gravity than Fe-Ti alloy, so it is lighter, which improves the torque margin of the drive motor, and the mirror floats up quickly, reducing wear on the thrust bearing due to start-stops and extending its life. Ru.
セラミツクはヤング率がFe−Ti合金よりも
高く、比重も小さい、又熱膨張係数も小さいの
で高速回転時の遠心力、熱膨張などによるミラ
ー面の歪みが少なくなり、超高速回転時の寸法
安定性が優れている。 Ceramic has a higher Young's modulus than Fe-Ti alloys, a lower specific gravity, and a lower coefficient of thermal expansion, so distortion of the mirror surface due to centrifugal force and thermal expansion during high-speed rotation is reduced, resulting in dimensional stability during ultra-high-speed rotation. Excellent quality.
シリンダー部とミラー部をセラミツクで一体
化したことにより、接着、焼ばめ工程等が削除
され大幅な加工工数の低減が計れる。又高速回
転時のミラー面の面精度の面からも接合部の歪
発生を防ぐ為にも効果がある。 By integrating the cylinder part and mirror part with ceramic, processes such as gluing and shrink fitting are eliminated, resulting in a significant reduction in processing man-hours. It is also effective in terms of the surface accuracy of the mirror surface during high-speed rotation and in preventing the occurrence of distortion at the joint.
回転駆動用のモーターは従来より２極ヒステ
リシスモータが使用され、第１図に示す如く従
来そのヒステリシスリング６がシリンダー部３
に接着されていた為、モータ通電により導電体
であるミラー側にも磁束の漏れが発生しモータ
効率が低下し、これが発熱にもつながつていた
が、本発明の場合はミラー部が非磁性体である
ので従来の如き不具合はなく、従つてモータ効
率も向上する。 Conventionally, a two-pole hysteresis motor has been used as a rotary drive motor, and as shown in FIG.
When the motor is energized, magnetic flux leaks to the mirror side, which is a conductor, reducing motor efficiency and causing heat generation. However, in the case of the present invention, the mirror part is non-magnetic. Since it is a body, there are no problems like the conventional ones, and the motor efficiency is also improved.
(7) 発明の効果
以上、詳細に説明したように本発明のセラミツ
ク多角形回転鏡は、その空気軸受用シリンダー部
とミラー部とをセラミツクにて一体に成形したこ
とにより、超高速回転時におけるミラー面の面精
度の低下を防止することが可能となつた。これを
電子写真式高速漢字プリンタ等に用いれば面倒れ
のレンズ補正等光学的な処置を講ずることなく高
い印字品質が得られるといつた効果大なるもので
ある。(7) Effects of the Invention As explained above in detail, the ceramic polygonal rotating mirror of the present invention has an air bearing cylinder part and a mirror part integrally molded from ceramic, so that it can be rotated at ultra high speeds. It has become possible to prevent the surface precision of the mirror surface from deteriorating. If this is used in an electrophotographic high-speed kanji printer or the like, it will have a great effect in that high printing quality can be obtained without taking any optical measures such as lens tilt correction.
第１図は従来の多角形回転鏡の構造を説明する
ための図、第２図は本発明によるセラミツク多角
形回転鏡の構造を説明するための図である。
図面において、１０，１０′はハウジング、１
１は軸、１２はスラスト軸受、１３はセラミツク
多角形回転鏡、１３ａは空気軸受用シリンダー
部、１３ｂはミラー部、１４はヒステリシスリン
グ、１５はコイル、１６は光入出射窓をそれぞれ
示す。
FIG. 1 is a diagram for explaining the structure of a conventional polygonal rotating mirror, and FIG. 2 is a diagram for explaining the structure of a ceramic polygonal rotating mirror according to the present invention. In the drawing, 10, 10' are housings, 1
1 is a shaft, 12 is a thrust bearing, 13 is a ceramic polygonal rotating mirror, 13a is a cylinder portion for an air bearing, 13b is a mirror portion, 14 is a hysteresis ring, 15 is a coil, and 16 is a light input/output window.
Claims (1)
て、軸受シリンダー部とミラー部とをセラミツク
材料にて一体成形して成ることを特徴とするセラ
ミツク多角形回転鏡。1. A ceramic polygonal rotating mirror that performs ultra-high-speed optical scanning, characterized in that a bearing cylinder portion and a mirror portion are integrally molded from a ceramic material.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9751182A JPS58215602A (en) | 1982-06-09 | 1982-06-09 | Ceramic polygon rotating mirror |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9751182A JPS58215602A (en) | 1982-06-09 | 1982-06-09 | Ceramic polygon rotating mirror |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS58215602A JPS58215602A (en) | 1983-12-15 |
| JPS641768B2 true JPS641768B2 (en) | 1989-01-12 |
Family
ID=14194279
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9751182A Granted JPS58215602A (en) | 1982-06-09 | 1982-06-09 | Ceramic polygon rotating mirror |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS58215602A (en) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS612618U (en) * | 1984-06-12 | 1986-01-09 | 富士写真フイルム株式会社 | galvanometer mirror |
| JPS63241516A (en) * | 1987-03-30 | 1988-10-06 | Ebara Corp | Polygon mirror |
| JP2555584Y2 (en) * | 1989-07-31 | 1997-11-26 | 日本電産株式会社 | Motor for laser beam printer |
-
1982
- 1982-06-09 JP JP9751182A patent/JPS58215602A/en active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS58215602A (en) | 1983-12-15 |
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