JPS6417463A - Image reader - Google Patents

Image reader

Info

Publication number
JPS6417463A
JPS6417463A JP62172484A JP17248487A JPS6417463A JP S6417463 A JPS6417463 A JP S6417463A JP 62172484 A JP62172484 A JP 62172484A JP 17248487 A JP17248487 A JP 17248487A JP S6417463 A JPS6417463 A JP S6417463A
Authority
JP
Japan
Prior art keywords
line
element isolation
section
larger
pattern
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP62172484A
Other languages
Japanese (ja)
Inventor
Kazuaki Tashiro
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP62172484A priority Critical patent/JPS6417463A/en
Publication of JPS6417463A publication Critical patent/JPS6417463A/en
Pending legal-status Critical Current

Links

Landscapes

  • Solid State Image Pick-Up Elements (AREA)
  • Transforming Light Signals Into Electric Signals (AREA)

Abstract

PURPOSE:To solve a problem due to misalignment of a mask at the time of isolation of elements by employing a pattern for the element isolation of a shape having a larger area than the area of a section specified by the superposition of upper and lower wiring lines and containing the section specified by the superposition inside. CONSTITUTION:The element isolation pattern of a photoresist of a matrix wiring section is formed in a stripe state along an upper wiring line 15, the line width at a cross point between a lower wiring line 11 and the line 15 is larger than that except it, and the width of a section extended on the line 11 is larger than that of the lower wiring line. Thereafter, unnecessary intrinsic semiconductor layer and insulating layer are removed for element isolation. Then, an element isolation pattern 9 os the semiconductor layer and the insulating layer is formed, and an image reader is manufactured.
JP62172484A 1987-07-10 1987-07-10 Image reader Pending JPS6417463A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62172484A JPS6417463A (en) 1987-07-10 1987-07-10 Image reader

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62172484A JPS6417463A (en) 1987-07-10 1987-07-10 Image reader

Publications (1)

Publication Number Publication Date
JPS6417463A true JPS6417463A (en) 1989-01-20

Family

ID=15942843

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62172484A Pending JPS6417463A (en) 1987-07-10 1987-07-10 Image reader

Country Status (1)

Country Link
JP (1) JPS6417463A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6446970A (en) * 1987-08-14 1989-02-21 Ricoh Kk Contact type image sensor
JPH03120755A (en) * 1989-10-03 1991-05-22 Fuji Xerox Co Ltd Image reader
US5142990A (en) * 1990-06-11 1992-09-01 Ecole Superieure Des Sciences Et Technologies De L'ingenieur De Nancy (Esstin) Self-propelled and articulated vehicle with telescopic jacks to carry pipework inspection equipment
US5172639A (en) * 1991-03-26 1992-12-22 Gas Research Institute Cornering pipe traveler

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6446970A (en) * 1987-08-14 1989-02-21 Ricoh Kk Contact type image sensor
JPH03120755A (en) * 1989-10-03 1991-05-22 Fuji Xerox Co Ltd Image reader
US5142990A (en) * 1990-06-11 1992-09-01 Ecole Superieure Des Sciences Et Technologies De L'ingenieur De Nancy (Esstin) Self-propelled and articulated vehicle with telescopic jacks to carry pipework inspection equipment
US5172639A (en) * 1991-03-26 1992-12-22 Gas Research Institute Cornering pipe traveler

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