JPS6417463A - Image reader - Google Patents
Image readerInfo
- Publication number
- JPS6417463A JPS6417463A JP62172484A JP17248487A JPS6417463A JP S6417463 A JPS6417463 A JP S6417463A JP 62172484 A JP62172484 A JP 62172484A JP 17248487 A JP17248487 A JP 17248487A JP S6417463 A JPS6417463 A JP S6417463A
- Authority
- JP
- Japan
- Prior art keywords
- line
- element isolation
- section
- larger
- pattern
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Solid State Image Pick-Up Elements (AREA)
- Transforming Light Signals Into Electric Signals (AREA)
Abstract
PURPOSE:To solve a problem due to misalignment of a mask at the time of isolation of elements by employing a pattern for the element isolation of a shape having a larger area than the area of a section specified by the superposition of upper and lower wiring lines and containing the section specified by the superposition inside. CONSTITUTION:The element isolation pattern of a photoresist of a matrix wiring section is formed in a stripe state along an upper wiring line 15, the line width at a cross point between a lower wiring line 11 and the line 15 is larger than that except it, and the width of a section extended on the line 11 is larger than that of the lower wiring line. Thereafter, unnecessary intrinsic semiconductor layer and insulating layer are removed for element isolation. Then, an element isolation pattern 9 os the semiconductor layer and the insulating layer is formed, and an image reader is manufactured.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62172484A JPS6417463A (en) | 1987-07-10 | 1987-07-10 | Image reader |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62172484A JPS6417463A (en) | 1987-07-10 | 1987-07-10 | Image reader |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6417463A true JPS6417463A (en) | 1989-01-20 |
Family
ID=15942843
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP62172484A Pending JPS6417463A (en) | 1987-07-10 | 1987-07-10 | Image reader |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6417463A (en) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6446970A (en) * | 1987-08-14 | 1989-02-21 | Ricoh Kk | Contact type image sensor |
JPH03120755A (en) * | 1989-10-03 | 1991-05-22 | Fuji Xerox Co Ltd | Image reader |
US5142990A (en) * | 1990-06-11 | 1992-09-01 | Ecole Superieure Des Sciences Et Technologies De L'ingenieur De Nancy (Esstin) | Self-propelled and articulated vehicle with telescopic jacks to carry pipework inspection equipment |
US5172639A (en) * | 1991-03-26 | 1992-12-22 | Gas Research Institute | Cornering pipe traveler |
-
1987
- 1987-07-10 JP JP62172484A patent/JPS6417463A/en active Pending
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6446970A (en) * | 1987-08-14 | 1989-02-21 | Ricoh Kk | Contact type image sensor |
JPH03120755A (en) * | 1989-10-03 | 1991-05-22 | Fuji Xerox Co Ltd | Image reader |
US5142990A (en) * | 1990-06-11 | 1992-09-01 | Ecole Superieure Des Sciences Et Technologies De L'ingenieur De Nancy (Esstin) | Self-propelled and articulated vehicle with telescopic jacks to carry pipework inspection equipment |
US5172639A (en) * | 1991-03-26 | 1992-12-22 | Gas Research Institute | Cornering pipe traveler |
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