JPS6417387A - Heat treatment device for substrate - Google Patents

Heat treatment device for substrate

Info

Publication number
JPS6417387A
JPS6417387A JP17243687A JP17243687A JPS6417387A JP S6417387 A JPS6417387 A JP S6417387A JP 17243687 A JP17243687 A JP 17243687A JP 17243687 A JP17243687 A JP 17243687A JP S6417387 A JPS6417387 A JP S6417387A
Authority
JP
Japan
Prior art keywords
heating element
tubular
heating
constitution
flow
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP17243687A
Other languages
Japanese (ja)
Inventor
Kiyohiro Sasaki
Izuru Izeki
Akihiro Azuma
Yusuke Muraoka
Takayuki Baba
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Dainippon Screen Manufacturing Co Ltd
Original Assignee
Dainippon Screen Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Dainippon Screen Manufacturing Co Ltd filed Critical Dainippon Screen Manufacturing Co Ltd
Priority to JP17243687A priority Critical patent/JPS6417387A/en
Publication of JPS6417387A publication Critical patent/JPS6417387A/en
Pending legal-status Critical Current

Links

Landscapes

  • Resistance Heating (AREA)
  • Chemical Vapour Deposition (AREA)

Abstract

PURPOSE:To prevent any heating unevenness from occurring by setting a heating element down to a tubular heating element made up of forming metallic heating material into a porous tubular body, and installing a core pipe in this tubular heating element as its constitution. CONSTITUTION:A heating element 4 is set down to a tubular heating element made up of forming metallic electric heating material into a porous tubular body, and it is constituted in a way of installing a core pipe 2 in this tubular heating element 4. This tubular heating element 4 is of porosity in the peripheral surface, and since a current will not flow at hole parts, a flow of electricity is limited to a part where no hole is formed so that electric resistance becomes higher, therefore heating efficiently takes place. Moreover, the flow of electricity is dispersed in response to the arrangement of holes, whereby generation of heat takes place with a thermal distribution based on the hole arrangement. With this constitution, the peripheral surface is heated by the required thermal distribution, thus any heating unevenness is eliminable, the whole furnace is made into small diametral size and miniaturizable.
JP17243687A 1987-07-09 1987-07-09 Heat treatment device for substrate Pending JPS6417387A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17243687A JPS6417387A (en) 1987-07-09 1987-07-09 Heat treatment device for substrate

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17243687A JPS6417387A (en) 1987-07-09 1987-07-09 Heat treatment device for substrate

Publications (1)

Publication Number Publication Date
JPS6417387A true JPS6417387A (en) 1989-01-20

Family

ID=15941946

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17243687A Pending JPS6417387A (en) 1987-07-09 1987-07-09 Heat treatment device for substrate

Country Status (1)

Country Link
JP (1) JPS6417387A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2009096311A1 (en) * 2008-01-29 2009-08-06 Tounetsu Corporation Dip-type heater
WO2016123738A1 (en) * 2015-02-02 2016-08-11 深圳麦克韦尔股份有限公司 Cigarette heater and heating assembly thereof

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2009096311A1 (en) * 2008-01-29 2009-08-06 Tounetsu Corporation Dip-type heater
US8422871B2 (en) 2008-01-29 2013-04-16 Tounetsu Corporation Immersion heater
JP5371784B2 (en) * 2008-01-29 2013-12-18 株式会社トウネツ Immersion heater
WO2016123738A1 (en) * 2015-02-02 2016-08-11 深圳麦克韦尔股份有限公司 Cigarette heater and heating assembly thereof

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