JPS6416911A - Vibration gyro - Google Patents

Vibration gyro

Info

Publication number
JPS6416911A
JPS6416911A JP17263087A JP17263087A JPS6416911A JP S6416911 A JPS6416911 A JP S6416911A JP 17263087 A JP17263087 A JP 17263087A JP 17263087 A JP17263087 A JP 17263087A JP S6416911 A JPS6416911 A JP S6416911A
Authority
JP
Japan
Prior art keywords
vibrator
support rod
piezoelectric elements
angular velocity
detected
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP17263087A
Other languages
Japanese (ja)
Inventor
Seiichi Fujimura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Home Electronics Ltd
NEC Corp
Original Assignee
NEC Home Electronics Ltd
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Home Electronics Ltd, Nippon Electric Co Ltd filed Critical NEC Home Electronics Ltd
Priority to JP17263087A priority Critical patent/JPS6416911A/en
Publication of JPS6416911A publication Critical patent/JPS6416911A/en
Pending legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01CMEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Gyroscopes (AREA)

Abstract

PURPOSE:To detect the angular velocities of two axial components by fixing two vibrators which differ in resonance frequency to one support rod orthogonally to each other, sticking a piezoelectric element for driving on each vibrator, and sticking piezoelectric elements for detection on two orthogonal surfaces of the support rod. CONSTITUTION:When AC voltages having the same polarity are applied to four driving piezoelectric elements 4 of a 1st vibrator 1, the vibrator 1 vibrates in an X direction in up-down and right-left symmetrical vibration mode viewed in a Y-direction. Here, an angular velocity in a Z-axial direction is added, Corioli's force is generated by the vibrator 1 as shown by an arrow (a) and in the opposite direction alternately and the vibrator 1 rotates around the Z axis, so that the support rod 3 deforms by deflection. This deflection deformation of this support rod 3 is detected by detecting piezoelectric elements 6 stuck on both-X-directional surfaces and the Z-directional angular velocity is detected according to the detection results. similarly, when AC voltages having the same polarity are applied to four driving piezoelectric elements 5 of the 2nd vibrator 2, the deflection deformation of the support rod 3 is detected by detecting piezoelectric elements 7 stuck on both upper and lower surfaces of the support rod 4 and the X-axial angular velocity is detected according to the detection results.
JP17263087A 1987-07-10 1987-07-10 Vibration gyro Pending JPS6416911A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17263087A JPS6416911A (en) 1987-07-10 1987-07-10 Vibration gyro

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17263087A JPS6416911A (en) 1987-07-10 1987-07-10 Vibration gyro

Publications (1)

Publication Number Publication Date
JPS6416911A true JPS6416911A (en) 1989-01-20

Family

ID=15945435

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17263087A Pending JPS6416911A (en) 1987-07-10 1987-07-10 Vibration gyro

Country Status (1)

Country Link
JP (1) JPS6416911A (en)

Cited By (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02306111A (en) * 1989-05-19 1990-12-19 Matsushita Electric Ind Co Ltd Angular velocity detector
JPH04339264A (en) * 1991-07-29 1992-11-26 Matsushita Electric Ind Co Ltd Angular velocity detection device
JPH05118854A (en) * 1991-10-24 1993-05-14 Akai Electric Co Ltd Vibration gyro
JPH0592635U (en) * 1992-03-11 1993-12-17 株式会社トーキン Piezoelectric vibration gyro
US5476007A (en) * 1992-11-04 1995-12-19 Murata Manufacturing Co., Ltd. Vibrating gyroscope
US5625145A (en) * 1993-04-16 1997-04-29 Canon Kabushiki Kaisha Angular velocity detection method and angular velocity detection apparatus
US5675083A (en) * 1994-12-15 1997-10-07 Murata Manufacturing Co., Ltd. Vibrating gyroscope having divided detection elements
US5693998A (en) * 1995-03-31 1997-12-02 Murata Manufacturing Co., Ltd. Oscillation gyroscope
US5751093A (en) * 1995-03-14 1998-05-12 Murat Manufacturing Co., Ltd. Vibrating gyroscope
US5773915A (en) * 1995-08-08 1998-06-30 Murata Manufacturing Co., Ltd. Vibrating gyroscope
US6242848B1 (en) 1994-12-02 2001-06-05 Murata Manufacturing Co., Ltd. Oscillation gyroscope

Cited By (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02306111A (en) * 1989-05-19 1990-12-19 Matsushita Electric Ind Co Ltd Angular velocity detector
JPH04339264A (en) * 1991-07-29 1992-11-26 Matsushita Electric Ind Co Ltd Angular velocity detection device
JPH05118854A (en) * 1991-10-24 1993-05-14 Akai Electric Co Ltd Vibration gyro
JPH0592635U (en) * 1992-03-11 1993-12-17 株式会社トーキン Piezoelectric vibration gyro
US5476007A (en) * 1992-11-04 1995-12-19 Murata Manufacturing Co., Ltd. Vibrating gyroscope
US5625145A (en) * 1993-04-16 1997-04-29 Canon Kabushiki Kaisha Angular velocity detection method and angular velocity detection apparatus
US6242848B1 (en) 1994-12-02 2001-06-05 Murata Manufacturing Co., Ltd. Oscillation gyroscope
US5675083A (en) * 1994-12-15 1997-10-07 Murata Manufacturing Co., Ltd. Vibrating gyroscope having divided detection elements
US5751093A (en) * 1995-03-14 1998-05-12 Murat Manufacturing Co., Ltd. Vibrating gyroscope
US5693998A (en) * 1995-03-31 1997-12-02 Murata Manufacturing Co., Ltd. Oscillation gyroscope
US5773915A (en) * 1995-08-08 1998-06-30 Murata Manufacturing Co., Ltd. Vibrating gyroscope

Similar Documents

Publication Publication Date Title
US8176779B2 (en) Vibrating micro-mechanical sensor of angular velocity
US7971483B2 (en) Systems and methods for acceleration and rotational determination from an out-of-plane MEMS device
JPH08145683A (en) Acceleration/angular acceleration detector
JP4178192B2 (en) Physical quantity detection sensor
JP2005241500A (en) Angular velocity sensor
JPS6416911A (en) Vibration gyro
JP2002277248A (en) Angular velocity sensor
EP0932817A1 (en) A solid-state, multi-axis gyroscope
JP3307907B2 (en) Micro gyroscope
JP2000074673A (en) Compound movement sensor
JPH0868636A (en) Apparatus for detecting both acceleration and angular velocity
JP2001133268A (en) Angular velocity sensor
JPH02218914A (en) Vibrating gyroscope
JPH0429012A (en) Vibration gyro
JP3336730B2 (en) Angular velocity sensor
JP2607395B2 (en) Acceleration sensor
RU2222780C1 (en) Sensitive element of micromechanical gyroscope
JP3092022B2 (en) 2-axis acceleration sensor
JPS6459006A (en) Vibration gyroscope
JPS6416912A (en) Vibration gyro
JP3307101B2 (en) Angular velocity sensor
JP3136544B2 (en) Gyro device
JPS6416913A (en) Vibration gyro
JPS60216210A (en) Angular velocity sensor
JP3873266B2 (en) 3D angular velocity sensor