JPS6416272A - Piezoelectric motor - Google Patents

Piezoelectric motor

Info

Publication number
JPS6416272A
JPS6416272A JP17138087A JP17138087A JPS6416272A JP S6416272 A JPS6416272 A JP S6416272A JP 17138087 A JP17138087 A JP 17138087A JP 17138087 A JP17138087 A JP 17138087A JP S6416272 A JPS6416272 A JP S6416272A
Authority
JP
Japan
Prior art keywords
driving
rigidity
driven body
piezo
units
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP17138087A
Other languages
Japanese (ja)
Inventor
Kenji Mori
Hirotake Hirai
Isao Kobayashi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP17138087A priority Critical patent/JPS6416272A/en
Priority to EP19880110469 priority patent/EP0297574A3/en
Publication of JPS6416272A publication Critical patent/JPS6416272A/en
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/0005—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing non-specific motion; Details common to machines covered by H02N2/02 - H02N2/16
    • H02N2/001—Driving devices, e.g. vibrators
    • H02N2/002—Driving devices, e.g. vibrators using only longitudinal or radial modes
    • H02N2/0025—Driving devices, e.g. vibrators using only longitudinal or radial modes using combined longitudinal modes
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
    • H02N2/026—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors by pressing one or more vibrators against the driven body
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/10—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors
    • H02N2/103—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors by pressing one or more vibrators against the rotor

Landscapes

  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)

Abstract

PURPOSE:To stabilize driving performance, by a method wherein a piezoelectric driving unit is supported so that a rigidity in the driving direction of a driven body is different from the rigidity in a direction orthogonal to the driving direction. CONSTITUTION:A piezo-electric motor is constituted of a table 17, blocks 18a, 18b, fixed to the table, parallel leaf springs 19-21, piezo-electric driving unit 1a, 1b, provided opposingly at both sides of a rod type driven body 4, bearing means such as roller guide bearings 22a, 22b and the like, and a base board 23. The pushing force of the leaf springs 20, 21 can be set so as to have a proper given value by presetting the amount of deflection of the parallel leaf springs 20, 21 which support said units 1a, 1b. Further, one of the driving units is supported so as to have a high rigidity in the driving direction of the driven body 4 but a low rigidity in the direction normal to a driving surface. When synchronized high-frequency voltages are impressed on the piezo-electric elements of both units 1a, 1b under this condition, driving forces having the same direction may be generated and the driven body 4 may be driven.
JP17138087A 1987-07-01 1987-07-09 Piezoelectric motor Pending JPS6416272A (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP17138087A JPS6416272A (en) 1987-07-09 1987-07-09 Piezoelectric motor
EP19880110469 EP0297574A3 (en) 1987-07-01 1988-06-30 Actuator which drives a driven member by using piezo-electric elements

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17138087A JPS6416272A (en) 1987-07-09 1987-07-09 Piezoelectric motor

Publications (1)

Publication Number Publication Date
JPS6416272A true JPS6416272A (en) 1989-01-19

Family

ID=15922104

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17138087A Pending JPS6416272A (en) 1987-07-01 1987-07-09 Piezoelectric motor

Country Status (1)

Country Link
JP (1) JPS6416272A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100353455B1 (en) * 1996-06-05 2003-01-06 삼성전자 주식회사 Piezoelectric linear step motor
WO2007083475A1 (en) * 2006-01-17 2007-07-26 Murata Manufacturing Co., Ltd. Resonance actuator
JP2013236527A (en) * 2012-05-11 2013-11-21 Seiko Epson Corp Piezoelectric motor, robot hand, robot, electronic component transfer device, electronic component inspection device, liquid sending pump, printing device, electronic clock, projection device, and transfer device

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100353455B1 (en) * 1996-06-05 2003-01-06 삼성전자 주식회사 Piezoelectric linear step motor
WO2007083475A1 (en) * 2006-01-17 2007-07-26 Murata Manufacturing Co., Ltd. Resonance actuator
JPWO2007083475A1 (en) * 2006-01-17 2009-06-11 株式会社村田製作所 Resonant actuator
JP5013269B2 (en) * 2006-01-17 2012-08-29 株式会社村田製作所 Resonant actuator
JP2013236527A (en) * 2012-05-11 2013-11-21 Seiko Epson Corp Piezoelectric motor, robot hand, robot, electronic component transfer device, electronic component inspection device, liquid sending pump, printing device, electronic clock, projection device, and transfer device

Similar Documents

Publication Publication Date Title
EP0393994A3 (en) A linear driving apparatus
DE3560265D1 (en) Particles superficially modified by hydrophilic and hydrophobic groups
MY121907A (en) A floor-care disk that can be snapped onto the driving disk of a floor-care apparatus
US5180941A (en) Vibration driven motor apparatus
EP0290057A3 (en) Slider wheel pitch and roll control stick apparatus for an aircraft
ES2116881A1 (en) Apparatus for converting eolian energy into another usable energy
GB2331398A (en) Bearings and supports
EP0128030A3 (en) Precision slide
JPS6416272A (en) Piezoelectric motor
ES8202921A1 (en) Mounting for a rotor
JPS5774601A (en) Apparatus for fixing finely displacing table
ES475783A1 (en) Motor jacking apparatus
DE60306923T2 (en) RESPONSE TRANSMISSION SYSTEM
ATE231590T1 (en) METHOD AND DEVICE FOR CHANGING THE DEFLECTION OF A SHAFT, AXLE OR OTHER SUPPORT
DE19543745C2 (en) Magnetic bearing
ES8402436A1 (en) Equipment for controlling the drive element of a horizontal movement
ES8507231A1 (en) Spring driven motor.
EP0202105A3 (en) Scanning microscope
EP0663716A3 (en) Support for a self-propelled linear motion drive apparatus
EP0005887A1 (en) Drive
AU3257093A (en) Process and arrangement for reducing vibrations caused by jolts in drives having mechanical arrangements capable of vibrating
DE3865897D1 (en) DRIVE DEVICE WITH PRESSURE ELEMENT.
EP0289811A3 (en) A device for retaining two parallel tracks
EP0808689A3 (en) Device for stepwise feeding panels
FR2428497A1 (en) Mounting for tool rectifying edge of plate glass - uses folding parallelogram frame with split locating block to position spindle