JPS6415937A - Normal atmospheric pressure cvd system - Google Patents
Normal atmospheric pressure cvd systemInfo
- Publication number
- JPS6415937A JPS6415937A JP17217787A JP17217787A JPS6415937A JP S6415937 A JPS6415937 A JP S6415937A JP 17217787 A JP17217787 A JP 17217787A JP 17217787 A JP17217787 A JP 17217787A JP S6415937 A JPS6415937 A JP S6415937A
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor substrate
- outer circumferential
- substrate
- susceptor
- section
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
PURPOSE:To prevent the adhesion of dust on the rear of a semiconductor substrate, and to improve reliability and yield by forming a susceptor in structure in which the outer circumferential end section of the rear of the semiconductor substrate is supported under a contact state. CONSTITUTION:A substrate supporter 3 is installed between a heating source 1 and a gas supply port 2 in a system. The substrate supporter 3 consists of a plate made of inconel, and a recessed section 5 smaller than the outer circumferential size of a semiconductor substrate 4 and taking a similar figure to the outer circumferential shape of the substrate 4 is shaped where the semiconductor substrate 4 is placed. The semiconductor substrate 4 is put on the susceptor 3 having such structure by using an automatic carry-out-in machine section 6 so as to completely bring the recessed section 5 to a closed state. A contact surface between the semiconductor substrate 4 and the susceptor 3 extends over several mm in the outer circumferential end section of the rear of the semiconductor substrate, and a raw material gas is prevented from creeping to the rear, thus remarkably reducing dust adhering on the rear.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17217787A JPS6415937A (en) | 1987-07-10 | 1987-07-10 | Normal atmospheric pressure cvd system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17217787A JPS6415937A (en) | 1987-07-10 | 1987-07-10 | Normal atmospheric pressure cvd system |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6415937A true JPS6415937A (en) | 1989-01-19 |
Family
ID=15937001
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17217787A Pending JPS6415937A (en) | 1987-07-10 | 1987-07-10 | Normal atmospheric pressure cvd system |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6415937A (en) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5571958A (en) * | 1994-04-15 | 1996-11-05 | Unisia Jecs Corporation | Apparatus and method for detecting misfire in an internal combustion engine |
| EP1662244A2 (en) | 2004-11-29 | 2006-05-31 | HONDA MOTOR CO., Ltd. | A misfire detection apparatus |
| JP2006234469A (en) * | 2005-02-23 | 2006-09-07 | Honda Motor Co Ltd | Abnormality detector for cylinder pressure sensor |
| US9279406B2 (en) | 2012-06-22 | 2016-03-08 | Illinois Tool Works, Inc. | System and method for analyzing carbon build up in an engine |
| CN106825686A (en) * | 2017-03-01 | 2017-06-13 | 刘旭玲 | A kind of adjustable machine components punch device of damping effect |
-
1987
- 1987-07-10 JP JP17217787A patent/JPS6415937A/en active Pending
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5571958A (en) * | 1994-04-15 | 1996-11-05 | Unisia Jecs Corporation | Apparatus and method for detecting misfire in an internal combustion engine |
| EP1662244A2 (en) | 2004-11-29 | 2006-05-31 | HONDA MOTOR CO., Ltd. | A misfire detection apparatus |
| JP2006234469A (en) * | 2005-02-23 | 2006-09-07 | Honda Motor Co Ltd | Abnormality detector for cylinder pressure sensor |
| US9279406B2 (en) | 2012-06-22 | 2016-03-08 | Illinois Tool Works, Inc. | System and method for analyzing carbon build up in an engine |
| CN106825686A (en) * | 2017-03-01 | 2017-06-13 | 刘旭玲 | A kind of adjustable machine components punch device of damping effect |
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