JPS6412877A - Electrostatic actuator - Google Patents

Electrostatic actuator

Info

Publication number
JPS6412877A
JPS6412877A JP16561887A JP16561887A JPS6412877A JP S6412877 A JPS6412877 A JP S6412877A JP 16561887 A JP16561887 A JP 16561887A JP 16561887 A JP16561887 A JP 16561887A JP S6412877 A JPS6412877 A JP S6412877A
Authority
JP
Japan
Prior art keywords
movable body
spherical bodies
gap
fixed
arranging
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP16561887A
Other languages
Japanese (ja)
Inventor
Shiro Kenji
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Instruments Inc
Original Assignee
Seiko Instruments Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seiko Instruments Inc filed Critical Seiko Instruments Inc
Priority to JP16561887A priority Critical patent/JPS6412877A/en
Publication of JPS6412877A publication Critical patent/JPS6412877A/en
Pending legal-status Critical Current

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  • Linear Motors (AREA)

Abstract

PURPOSE:To increase a torque and prevent deformation due to external force, by arranging a dielectric substance, having a circular section with substantially the same size as a gap, in the gap between a fixed body and a movable body. CONSTITUTION:A movable body 7 is rotated about a rotary shaft 9. Spherical bodies 10 are arranged in contact with both axial side surfaces of the movable body 7 and functions as ball bearings while the spherical bodies 10 are formed by dielectrics. The arranging positions of the spherical bodies 10 are limited by guides 11a, 11b. A voltage, whose polarity is inverse to the polarity of electrodes fixed to the movable body 7, is impressed on a fixed body 12.
JP16561887A 1987-07-02 1987-07-02 Electrostatic actuator Pending JPS6412877A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16561887A JPS6412877A (en) 1987-07-02 1987-07-02 Electrostatic actuator

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16561887A JPS6412877A (en) 1987-07-02 1987-07-02 Electrostatic actuator

Publications (1)

Publication Number Publication Date
JPS6412877A true JPS6412877A (en) 1989-01-17

Family

ID=15815786

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16561887A Pending JPS6412877A (en) 1987-07-02 1987-07-02 Electrostatic actuator

Country Status (1)

Country Link
JP (1) JPS6412877A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5480675A (en) * 1991-11-20 1996-01-02 Nec Corporation Method of and apparatus for plating printed circuit board
US5863603A (en) * 1993-04-14 1999-01-26 Micron Technology, Inc. Liquid vapor deposition or etching method
WO2003041259A1 (en) * 2001-11-09 2003-05-15 Universitatea Din Oradea Electrostatic motor
US20080211342A1 (en) * 2005-07-08 2008-09-04 Commissariat A L'energie Atomique Device For Assisting The Variable Capacity Generating Movement

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5480675A (en) * 1991-11-20 1996-01-02 Nec Corporation Method of and apparatus for plating printed circuit board
US5863603A (en) * 1993-04-14 1999-01-26 Micron Technology, Inc. Liquid vapor deposition or etching method
WO2003041259A1 (en) * 2001-11-09 2003-05-15 Universitatea Din Oradea Electrostatic motor
US20080211342A1 (en) * 2005-07-08 2008-09-04 Commissariat A L'energie Atomique Device For Assisting The Variable Capacity Generating Movement
US8174163B2 (en) * 2005-07-08 2012-05-08 Commissariat A L'energie Atomique Device for assisting relative movements between two parts of a mechanical system, forming a variable capacitance device

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