JPS6412208A - Measurement of film thickness and/or refractive index - Google Patents

Measurement of film thickness and/or refractive index

Info

Publication number
JPS6412208A
JPS6412208A JP16747187A JP16747187A JPS6412208A JP S6412208 A JPS6412208 A JP S6412208A JP 16747187 A JP16747187 A JP 16747187A JP 16747187 A JP16747187 A JP 16747187A JP S6412208 A JPS6412208 A JP S6412208A
Authority
JP
Japan
Prior art keywords
electromagnetic wave
film
refractive index
reflection
film thickness
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP16747187A
Other languages
Japanese (ja)
Inventor
Sumihiko Kawashima
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toyobo Co Ltd
Original Assignee
Toyobo Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toyobo Co Ltd filed Critical Toyobo Co Ltd
Priority to JP16747187A priority Critical patent/JPS6412208A/en
Publication of JPS6412208A publication Critical patent/JPS6412208A/en
Pending legal-status Critical Current

Links

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  • Length Measuring Devices By Optical Means (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)

Abstract

PURPOSE:To achieve a higher accuracy, by prescribing intensity of reflection or transmission due to an interference action of an electromagnetic wave in a film by a specified formula. CONSTITUTION:A film is irradiated with an electromagnetic wave with varying angles of incidence to measure intensity of reflection or transmission of the electromagnetic wave due to an interference action thereof at several angles of incidence and a film thickness and/or refractive index is determined so that a relationship to be prescribed by the formula I coincides with a measured value. In this manner, as measured values of intensity of reflection or transmission of the electromagnetic wave coincide well with a theory value at various angles of incidence when the film is irradiated with the electromagnetic wave, errors in the measured values, if any, little affect the film thickness and refractive index to be obtained, thereby enabling the obtaining of measured values at a high accuracy. In the formula I, I represents intensity of reflection or transmission, (d) film thickness, (n) refractive index of film, n0 refractive index of medium contacting film, lambda0 wavelength of electromagnetic wave in vacuum, deltaphase compensation and G0 and G1 reflection factor and function of transmissivity, respectively.
JP16747187A 1987-07-04 1987-07-04 Measurement of film thickness and/or refractive index Pending JPS6412208A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16747187A JPS6412208A (en) 1987-07-04 1987-07-04 Measurement of film thickness and/or refractive index

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16747187A JPS6412208A (en) 1987-07-04 1987-07-04 Measurement of film thickness and/or refractive index

Publications (1)

Publication Number Publication Date
JPS6412208A true JPS6412208A (en) 1989-01-17

Family

ID=15850290

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16747187A Pending JPS6412208A (en) 1987-07-04 1987-07-04 Measurement of film thickness and/or refractive index

Country Status (1)

Country Link
JP (1) JPS6412208A (en)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07198342A (en) * 1993-11-09 1995-08-01 Nova Measuring Instr Ltd Thin-film-thickness measuring device
JPH1038753A (en) * 1996-07-26 1998-02-13 Dainippon Printing Co Ltd Method for inspecting transparent film
JP2004279296A (en) * 2003-03-18 2004-10-07 Japan Science & Technology Agency Film thickness acquiring method
JP2007121266A (en) * 2005-09-29 2007-05-17 Sumitomo Osaka Cement Co Ltd Film thickness evaluation method
USRE40225E1 (en) 1993-11-09 2008-04-08 Nova Measuring Instruments Ltd. Two-dimensional beam deflector
JP2019148584A (en) * 2018-01-26 2019-09-05 株式会社トプコン Two-dimensional multi-layer thickness measurement

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6285846A (en) * 1985-10-11 1987-04-20 Asahi Optical Co Ltd Optical constant calculator for vapor-deposited film
JPS62119403A (en) * 1985-11-19 1987-05-30 Toyobo Co Ltd Film thickness measurement

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6285846A (en) * 1985-10-11 1987-04-20 Asahi Optical Co Ltd Optical constant calculator for vapor-deposited film
JPS62119403A (en) * 1985-11-19 1987-05-30 Toyobo Co Ltd Film thickness measurement

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07198342A (en) * 1993-11-09 1995-08-01 Nova Measuring Instr Ltd Thin-film-thickness measuring device
USRE40225E1 (en) 1993-11-09 2008-04-08 Nova Measuring Instruments Ltd. Two-dimensional beam deflector
USRE41906E1 (en) 1993-11-09 2010-11-02 Nova Measuring Instruments, Ltd. Two dimensional beam deflector
JPH1038753A (en) * 1996-07-26 1998-02-13 Dainippon Printing Co Ltd Method for inspecting transparent film
JP2004279296A (en) * 2003-03-18 2004-10-07 Japan Science & Technology Agency Film thickness acquiring method
JP2007121266A (en) * 2005-09-29 2007-05-17 Sumitomo Osaka Cement Co Ltd Film thickness evaluation method
JP2019148584A (en) * 2018-01-26 2019-09-05 株式会社トプコン Two-dimensional multi-layer thickness measurement

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