JPS6412208A - Measurement of film thickness and/or refractive index - Google Patents
Measurement of film thickness and/or refractive indexInfo
- Publication number
- JPS6412208A JPS6412208A JP16747187A JP16747187A JPS6412208A JP S6412208 A JPS6412208 A JP S6412208A JP 16747187 A JP16747187 A JP 16747187A JP 16747187 A JP16747187 A JP 16747187A JP S6412208 A JPS6412208 A JP S6412208A
- Authority
- JP
- Japan
- Prior art keywords
- electromagnetic wave
- film
- refractive index
- reflection
- film thickness
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Length Measuring Devices By Optical Means (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
Abstract
PURPOSE:To achieve a higher accuracy, by prescribing intensity of reflection or transmission due to an interference action of an electromagnetic wave in a film by a specified formula. CONSTITUTION:A film is irradiated with an electromagnetic wave with varying angles of incidence to measure intensity of reflection or transmission of the electromagnetic wave due to an interference action thereof at several angles of incidence and a film thickness and/or refractive index is determined so that a relationship to be prescribed by the formula I coincides with a measured value. In this manner, as measured values of intensity of reflection or transmission of the electromagnetic wave coincide well with a theory value at various angles of incidence when the film is irradiated with the electromagnetic wave, errors in the measured values, if any, little affect the film thickness and refractive index to be obtained, thereby enabling the obtaining of measured values at a high accuracy. In the formula I, I represents intensity of reflection or transmission, (d) film thickness, (n) refractive index of film, n0 refractive index of medium contacting film, lambda0 wavelength of electromagnetic wave in vacuum, deltaphase compensation and G0 and G1 reflection factor and function of transmissivity, respectively.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP16747187A JPS6412208A (en) | 1987-07-04 | 1987-07-04 | Measurement of film thickness and/or refractive index |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP16747187A JPS6412208A (en) | 1987-07-04 | 1987-07-04 | Measurement of film thickness and/or refractive index |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6412208A true JPS6412208A (en) | 1989-01-17 |
Family
ID=15850290
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP16747187A Pending JPS6412208A (en) | 1987-07-04 | 1987-07-04 | Measurement of film thickness and/or refractive index |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6412208A (en) |
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH07198342A (en) * | 1993-11-09 | 1995-08-01 | Nova Measuring Instr Ltd | Thin-film-thickness measuring device |
JPH1038753A (en) * | 1996-07-26 | 1998-02-13 | Dainippon Printing Co Ltd | Method for inspecting transparent film |
JP2004279296A (en) * | 2003-03-18 | 2004-10-07 | Japan Science & Technology Agency | Film thickness acquiring method |
JP2007121266A (en) * | 2005-09-29 | 2007-05-17 | Sumitomo Osaka Cement Co Ltd | Film thickness evaluation method |
USRE40225E1 (en) | 1993-11-09 | 2008-04-08 | Nova Measuring Instruments Ltd. | Two-dimensional beam deflector |
JP2019148584A (en) * | 2018-01-26 | 2019-09-05 | 株式会社トプコン | Two-dimensional multi-layer thickness measurement |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6285846A (en) * | 1985-10-11 | 1987-04-20 | Asahi Optical Co Ltd | Optical constant calculator for vapor-deposited film |
JPS62119403A (en) * | 1985-11-19 | 1987-05-30 | Toyobo Co Ltd | Film thickness measurement |
-
1987
- 1987-07-04 JP JP16747187A patent/JPS6412208A/en active Pending
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6285846A (en) * | 1985-10-11 | 1987-04-20 | Asahi Optical Co Ltd | Optical constant calculator for vapor-deposited film |
JPS62119403A (en) * | 1985-11-19 | 1987-05-30 | Toyobo Co Ltd | Film thickness measurement |
Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH07198342A (en) * | 1993-11-09 | 1995-08-01 | Nova Measuring Instr Ltd | Thin-film-thickness measuring device |
USRE40225E1 (en) | 1993-11-09 | 2008-04-08 | Nova Measuring Instruments Ltd. | Two-dimensional beam deflector |
USRE41906E1 (en) | 1993-11-09 | 2010-11-02 | Nova Measuring Instruments, Ltd. | Two dimensional beam deflector |
JPH1038753A (en) * | 1996-07-26 | 1998-02-13 | Dainippon Printing Co Ltd | Method for inspecting transparent film |
JP2004279296A (en) * | 2003-03-18 | 2004-10-07 | Japan Science & Technology Agency | Film thickness acquiring method |
JP2007121266A (en) * | 2005-09-29 | 2007-05-17 | Sumitomo Osaka Cement Co Ltd | Film thickness evaluation method |
JP2019148584A (en) * | 2018-01-26 | 2019-09-05 | 株式会社トプコン | Two-dimensional multi-layer thickness measurement |
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