JPS6410561A - Electrostatic lens with secondary electron detector function - Google Patents

Electrostatic lens with secondary electron detector function

Info

Publication number
JPS6410561A
JPS6410561A JP62163984A JP16398487A JPS6410561A JP S6410561 A JPS6410561 A JP S6410561A JP 62163984 A JP62163984 A JP 62163984A JP 16398487 A JP16398487 A JP 16398487A JP S6410561 A JPS6410561 A JP S6410561A
Authority
JP
Japan
Prior art keywords
secondary electron
electrode
electron
sample
light
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP62163984A
Other languages
Japanese (ja)
Inventor
Akio Ishikawa
Shigetomo Yamazaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
AKASHI BIIMU TECHNOL KK
Original Assignee
AKASHI BIIMU TECHNOL KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by AKASHI BIIMU TECHNOL KK filed Critical AKASHI BIIMU TECHNOL KK
Priority to JP62163984A priority Critical patent/JPS6410561A/en
Publication of JPS6410561A publication Critical patent/JPS6410561A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE:To increase the secondary electron detecting amount even though the working distance is made shorter by composing a necessary central electrode to form a unipotential type conductive lens, and giving a secondary electron detecting function to it concurrently. CONSTITUTION:A central electrode 11, which composes a unipotential type electron lens together with an upper electrode 1 and a lower electrode 2, is composed of a scintilater 13 to convert secondary electrons e1 into a light, a light guide 12 to transmit the light, a secondary electron detecting device of a photo-electron multiplying tube 15, and a metallic membrane 14 over its surface, while having the secondary electron detecting function concurrently. In such a composition, a separate secondary electron detector is not necessary to furnish between the electrode 2 and the sample 5, for the secondary electrons e1 from the sample 5 generated by the radiation of electron beams (e) from an electron gun 4. And the secondary electron detecting amount is increased even though the working distance between the electrode 2 and the sample 5 is made shorter, and the observation image with smaller lens aberration and with a good image quality can be obtained.
JP62163984A 1987-07-02 1987-07-02 Electrostatic lens with secondary electron detector function Pending JPS6410561A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62163984A JPS6410561A (en) 1987-07-02 1987-07-02 Electrostatic lens with secondary electron detector function

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62163984A JPS6410561A (en) 1987-07-02 1987-07-02 Electrostatic lens with secondary electron detector function

Publications (1)

Publication Number Publication Date
JPS6410561A true JPS6410561A (en) 1989-01-13

Family

ID=15784544

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62163984A Pending JPS6410561A (en) 1987-07-02 1987-07-02 Electrostatic lens with secondary electron detector function

Country Status (1)

Country Link
JP (1) JPS6410561A (en)

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0428906A2 (en) * 1989-11-21 1991-05-29 ICT Integrated Circuit Testing Gesellschaft für HalbleiterprÀ¼ftechnik mbH Particle beam apparatus
EP0472938A2 (en) * 1990-08-27 1992-03-04 Advantest Corporation Device for testing and repairing an integrated circuit
JPH10134754A (en) * 1996-11-05 1998-05-22 Jeol Ltd Scanning electron microscope
JP2011249273A (en) * 2010-05-31 2011-12-08 Jeol Ltd Scanning electron microscope
NL2007053A (en) * 2010-07-06 2012-01-09 Zeiss Carl Nts Gmbh Particle beam system.
JP2017120192A (en) * 2015-12-28 2017-07-06 国立大学法人島根大学 Scintillator and electron detector
WO2021255886A1 (en) * 2020-06-18 2021-12-23 株式会社日立ハイテク Charged particle beam device

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0428906A2 (en) * 1989-11-21 1991-05-29 ICT Integrated Circuit Testing Gesellschaft für HalbleiterprÀ¼ftechnik mbH Particle beam apparatus
EP0472938A2 (en) * 1990-08-27 1992-03-04 Advantest Corporation Device for testing and repairing an integrated circuit
JPH10134754A (en) * 1996-11-05 1998-05-22 Jeol Ltd Scanning electron microscope
JP2011249273A (en) * 2010-05-31 2011-12-08 Jeol Ltd Scanning electron microscope
NL2007053A (en) * 2010-07-06 2012-01-09 Zeiss Carl Nts Gmbh Particle beam system.
JP2017120192A (en) * 2015-12-28 2017-07-06 国立大学法人島根大学 Scintillator and electron detector
WO2021255886A1 (en) * 2020-06-18 2021-12-23 株式会社日立ハイテク Charged particle beam device

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