JPS6410561A - Electrostatic lens with secondary electron detector function - Google Patents
Electrostatic lens with secondary electron detector functionInfo
- Publication number
- JPS6410561A JPS6410561A JP62163984A JP16398487A JPS6410561A JP S6410561 A JPS6410561 A JP S6410561A JP 62163984 A JP62163984 A JP 62163984A JP 16398487 A JP16398487 A JP 16398487A JP S6410561 A JPS6410561 A JP S6410561A
- Authority
- JP
- Japan
- Prior art keywords
- secondary electron
- electrode
- electron
- sample
- light
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000004075 alteration Effects 0.000 abstract 1
- 238000010894 electron beam technology Methods 0.000 abstract 1
- 239000012528 membrane Substances 0.000 abstract 1
- 230000005855 radiation Effects 0.000 abstract 1
Abstract
PURPOSE:To increase the secondary electron detecting amount even though the working distance is made shorter by composing a necessary central electrode to form a unipotential type conductive lens, and giving a secondary electron detecting function to it concurrently. CONSTITUTION:A central electrode 11, which composes a unipotential type electron lens together with an upper electrode 1 and a lower electrode 2, is composed of a scintilater 13 to convert secondary electrons e1 into a light, a light guide 12 to transmit the light, a secondary electron detecting device of a photo-electron multiplying tube 15, and a metallic membrane 14 over its surface, while having the secondary electron detecting function concurrently. In such a composition, a separate secondary electron detector is not necessary to furnish between the electrode 2 and the sample 5, for the secondary electrons e1 from the sample 5 generated by the radiation of electron beams (e) from an electron gun 4. And the secondary electron detecting amount is increased even though the working distance between the electrode 2 and the sample 5 is made shorter, and the observation image with smaller lens aberration and with a good image quality can be obtained.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62163984A JPS6410561A (en) | 1987-07-02 | 1987-07-02 | Electrostatic lens with secondary electron detector function |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62163984A JPS6410561A (en) | 1987-07-02 | 1987-07-02 | Electrostatic lens with secondary electron detector function |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6410561A true JPS6410561A (en) | 1989-01-13 |
Family
ID=15784544
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP62163984A Pending JPS6410561A (en) | 1987-07-02 | 1987-07-02 | Electrostatic lens with secondary electron detector function |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6410561A (en) |
Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0428906A2 (en) * | 1989-11-21 | 1991-05-29 | ICT Integrated Circuit Testing Gesellschaft für HalbleiterprÀ¼ftechnik mbH | Particle beam apparatus |
EP0472938A2 (en) * | 1990-08-27 | 1992-03-04 | Advantest Corporation | Device for testing and repairing an integrated circuit |
JPH10134754A (en) * | 1996-11-05 | 1998-05-22 | Jeol Ltd | Scanning electron microscope |
JP2011249273A (en) * | 2010-05-31 | 2011-12-08 | Jeol Ltd | Scanning electron microscope |
NL2007053A (en) * | 2010-07-06 | 2012-01-09 | Zeiss Carl Nts Gmbh | Particle beam system. |
JP2017120192A (en) * | 2015-12-28 | 2017-07-06 | 国立大学法人島根大学 | Scintillator and electron detector |
WO2021255886A1 (en) * | 2020-06-18 | 2021-12-23 | 株式会社日立ハイテク | Charged particle beam device |
-
1987
- 1987-07-02 JP JP62163984A patent/JPS6410561A/en active Pending
Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0428906A2 (en) * | 1989-11-21 | 1991-05-29 | ICT Integrated Circuit Testing Gesellschaft für HalbleiterprÀ¼ftechnik mbH | Particle beam apparatus |
EP0472938A2 (en) * | 1990-08-27 | 1992-03-04 | Advantest Corporation | Device for testing and repairing an integrated circuit |
JPH10134754A (en) * | 1996-11-05 | 1998-05-22 | Jeol Ltd | Scanning electron microscope |
JP2011249273A (en) * | 2010-05-31 | 2011-12-08 | Jeol Ltd | Scanning electron microscope |
NL2007053A (en) * | 2010-07-06 | 2012-01-09 | Zeiss Carl Nts Gmbh | Particle beam system. |
JP2017120192A (en) * | 2015-12-28 | 2017-07-06 | 国立大学法人島根大学 | Scintillator and electron detector |
WO2021255886A1 (en) * | 2020-06-18 | 2021-12-23 | 株式会社日立ハイテク | Charged particle beam device |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JPS5568056A (en) | X-ray tube | |
JPS6410561A (en) | Electrostatic lens with secondary electron detector function | |
EP0084850B1 (en) | Apparatus for irradiation with charged particle beams | |
JPS5730253A (en) | Secondary electron detector for scan type electron microscope | |
JPS6322609Y2 (en) | ||
JPS6471051A (en) | Photomultiplier device | |
GB879569A (en) | Improvements in or relating to electron discharge devices and to circuit arrangements embodying such devices | |
JPS57145259A (en) | Scanning type electron microscope and its similar device | |
GB971495A (en) | Improvements in and relating to electron-optical image converter tubes | |
JPS57119442A (en) | Scanning electron microscope device | |
KR870000281B1 (en) | Electron-gun for a c.r.t. | |
US2203334A (en) | Electron discharge devcie | |
US4752715A (en) | Television camera tube | |
GB941734A (en) | Improvements in electron gun | |
GB463896A (en) | Improvements in or relating to oscillights or cathode ray tubes | |
JPS6465422A (en) | Image analysis tube with streak compensation | |
JPS5714252A (en) | Multistylus electrode device using cathode ray tube | |
GB842973A (en) | Improvements in or relating to cathode ray tubes | |
JPS55154043A (en) | Image pickup tube | |
JPS5582072A (en) | Measuring method for emitted electron flow angle distribution for electron gun | |
JPS5472667A (en) | Electron gun for cathode ray tube | |
JPS5489472A (en) | Electron gun for cathode-ray tube | |
JPS5613644A (en) | Color cathode-ray tube | |
JPS55113245A (en) | Flat type cathode ray tube | |
SU140125A1 (en) | TV method of observing and recording the density of corpuscular beams |