JPS6410208A - Polygon mirror - Google Patents

Polygon mirror

Info

Publication number
JPS6410208A
JPS6410208A JP16546687A JP16546687A JPS6410208A JP S6410208 A JPS6410208 A JP S6410208A JP 16546687 A JP16546687 A JP 16546687A JP 16546687 A JP16546687 A JP 16546687A JP S6410208 A JPS6410208 A JP S6410208A
Authority
JP
Japan
Prior art keywords
support
reduced pressure
hollow chamber
polygon
perpendicularity
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP16546687A
Other languages
Japanese (ja)
Inventor
Noriyuki Osada
Minoru Iwata
Toshiya Kanamori
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ebara Corp
Original Assignee
Ebara Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ebara Corp filed Critical Ebara Corp
Priority to JP16546687A priority Critical patent/JPS6410208A/en
Publication of JPS6410208A publication Critical patent/JPS6410208A/en
Pending legal-status Critical Current

Links

Landscapes

  • Mechanical Optical Scanning Systems (AREA)
  • Sliding-Contact Bearings (AREA)
  • Magnetic Bearings And Hydrostatic Bearings (AREA)

Abstract

PURPOSE:To improve the perpendicularity and parallelism of a polygon rotor by interposing and arranging a slide member between a rotary body and a support, enclosing a hollow chamber wherein the polygon rotor is put by the support and a cover body fitted onto the support, and holding it under reduced pressure. CONSTITUTION:The slide member 10 made of a ceramic material where a groove 11 for dynamic pressure generation, i.e. spiral groove is formed is interposed and arranged between the rotary body 3 and support 4, and the hollow chamber 20 wherein the polygon rotor can be put is enclosed by the support 4, the cover body 12 fitted onto the support 4, and a seal material 23 such as an O ring, held under reduced pressure, and put in operation under the reduced pressure. In this case, the hollow chamber 20 is linked with a vacuum pump 21 as a pressure reduction source and its degree of vacuum is held within a range of 700-200mmHg. Consequently, the perpendicularity and parallelism of the polygon mirror are improved greatly and the windage loss at the time of rotary operation to enable fast rotation.
JP16546687A 1987-07-03 1987-07-03 Polygon mirror Pending JPS6410208A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16546687A JPS6410208A (en) 1987-07-03 1987-07-03 Polygon mirror

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16546687A JPS6410208A (en) 1987-07-03 1987-07-03 Polygon mirror

Publications (1)

Publication Number Publication Date
JPS6410208A true JPS6410208A (en) 1989-01-13

Family

ID=15812949

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16546687A Pending JPS6410208A (en) 1987-07-03 1987-07-03 Polygon mirror

Country Status (1)

Country Link
JP (1) JPS6410208A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5373391A (en) * 1992-02-26 1994-12-13 Ebara Corporation Polygon mirror with embedded yoke
JP2002107651A (en) * 2000-10-02 2002-04-10 Nidec Copal Electronics Corp Light deflector

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5373391A (en) * 1992-02-26 1994-12-13 Ebara Corporation Polygon mirror with embedded yoke
JP2002107651A (en) * 2000-10-02 2002-04-10 Nidec Copal Electronics Corp Light deflector

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