JPS6410143A - Ionization gauge - Google Patents

Ionization gauge

Info

Publication number
JPS6410143A
JPS6410143A JP16617387A JP16617387A JPS6410143A JP S6410143 A JPS6410143 A JP S6410143A JP 16617387 A JP16617387 A JP 16617387A JP 16617387 A JP16617387 A JP 16617387A JP S6410143 A JPS6410143 A JP S6410143A
Authority
JP
Japan
Prior art keywords
filament
value
current
comparator
detected
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP16617387A
Other languages
Japanese (ja)
Other versions
JPH0810171B2 (en
Inventor
Masahiko Kobayashi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Anelva Corp
Original Assignee
Anelva Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Anelva Corp filed Critical Anelva Corp
Priority to JP62166173A priority Critical patent/JPH0810171B2/en
Publication of JPS6410143A publication Critical patent/JPS6410143A/en
Publication of JPH0810171B2 publication Critical patent/JPH0810171B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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  • Measuring Fluid Pressure (AREA)

Abstract

PURPOSE:To stop filament ignition in a pressure area above an upper-limit value and to eliminate an erroneous display of pressure by detecting a filament current and stopping filament power supply when its structure value exceeds a reference value. CONSTITUTION:An ionization ion 7 becomes an ion current collected by an ion collector 4. A signal amplified by an electrometer 8 is displayed as a pressure value on a meter 9 and also inputted to a comparator 10. Further, an emission current on the filament side is detected by a detection resistance 13 and controlled by a controller 14 to a constant value. Further, the filament current is detected by a filament current detecting mechanism 19 and compared by a comparator 10 with a reference voltage 21. An OR circuit 22 generates an output when the comparator 10 generates its output, namely, when the ionization ion exceeds the prescribed value and the detected filament current exceeds a reference voltage 21, thereby turning off a filament switch 12.
JP62166173A 1987-07-02 1987-07-02 Ionization vacuum gauge Expired - Lifetime JPH0810171B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62166173A JPH0810171B2 (en) 1987-07-02 1987-07-02 Ionization vacuum gauge

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62166173A JPH0810171B2 (en) 1987-07-02 1987-07-02 Ionization vacuum gauge

Publications (2)

Publication Number Publication Date
JPS6410143A true JPS6410143A (en) 1989-01-13
JPH0810171B2 JPH0810171B2 (en) 1996-01-31

Family

ID=15826427

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62166173A Expired - Lifetime JPH0810171B2 (en) 1987-07-02 1987-07-02 Ionization vacuum gauge

Country Status (1)

Country Link
JP (1) JPH0810171B2 (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000292297A (en) * 1999-03-24 2000-10-20 Boc Group Plc:The Vacuum gauge
WO2010106792A1 (en) * 2009-03-18 2010-09-23 株式会社アルバック Method for detecting oxigen, method for determining air leakage, gas component detector, and vacuum processor

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5465076A (en) * 1977-11-01 1979-05-25 Yoshio Iijima Filament burn prevented ionization vacuum gauge

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5465076A (en) * 1977-11-01 1979-05-25 Yoshio Iijima Filament burn prevented ionization vacuum gauge

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000292297A (en) * 1999-03-24 2000-10-20 Boc Group Plc:The Vacuum gauge
WO2010106792A1 (en) * 2009-03-18 2010-09-23 株式会社アルバック Method for detecting oxigen, method for determining air leakage, gas component detector, and vacuum processor
DE112010001207T5 (en) 2009-03-18 2012-09-20 Ulvac, Inc. Oxygen detection method, air leak determination method, gas component detection apparatus, and vacuum processing apparatus
US8288715B2 (en) 2009-03-18 2012-10-16 Ulvac, Inc. Oxygen detection method, air leakage determination method, gas component detection device, and vacuum processing apparatus
JP5054226B2 (en) * 2009-03-18 2012-10-24 株式会社アルバック Oxygen detection method, air leak discrimination method, gas component detection device, and vacuum processing device

Also Published As

Publication number Publication date
JPH0810171B2 (en) 1996-01-31

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