JPS6410143A - Ionization gauge - Google Patents
Ionization gaugeInfo
- Publication number
- JPS6410143A JPS6410143A JP16617387A JP16617387A JPS6410143A JP S6410143 A JPS6410143 A JP S6410143A JP 16617387 A JP16617387 A JP 16617387A JP 16617387 A JP16617387 A JP 16617387A JP S6410143 A JPS6410143 A JP S6410143A
- Authority
- JP
- Japan
- Prior art keywords
- filament
- value
- current
- comparator
- detected
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Measuring Fluid Pressure (AREA)
Abstract
PURPOSE:To stop filament ignition in a pressure area above an upper-limit value and to eliminate an erroneous display of pressure by detecting a filament current and stopping filament power supply when its structure value exceeds a reference value. CONSTITUTION:An ionization ion 7 becomes an ion current collected by an ion collector 4. A signal amplified by an electrometer 8 is displayed as a pressure value on a meter 9 and also inputted to a comparator 10. Further, an emission current on the filament side is detected by a detection resistance 13 and controlled by a controller 14 to a constant value. Further, the filament current is detected by a filament current detecting mechanism 19 and compared by a comparator 10 with a reference voltage 21. An OR circuit 22 generates an output when the comparator 10 generates its output, namely, when the ionization ion exceeds the prescribed value and the detected filament current exceeds a reference voltage 21, thereby turning off a filament switch 12.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62166173A JPH0810171B2 (en) | 1987-07-02 | 1987-07-02 | Ionization vacuum gauge |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62166173A JPH0810171B2 (en) | 1987-07-02 | 1987-07-02 | Ionization vacuum gauge |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS6410143A true JPS6410143A (en) | 1989-01-13 |
JPH0810171B2 JPH0810171B2 (en) | 1996-01-31 |
Family
ID=15826427
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP62166173A Expired - Lifetime JPH0810171B2 (en) | 1987-07-02 | 1987-07-02 | Ionization vacuum gauge |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0810171B2 (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2000292297A (en) * | 1999-03-24 | 2000-10-20 | Boc Group Plc:The | Vacuum gauge |
WO2010106792A1 (en) * | 2009-03-18 | 2010-09-23 | 株式会社アルバック | Method for detecting oxigen, method for determining air leakage, gas component detector, and vacuum processor |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5465076A (en) * | 1977-11-01 | 1979-05-25 | Yoshio Iijima | Filament burn prevented ionization vacuum gauge |
-
1987
- 1987-07-02 JP JP62166173A patent/JPH0810171B2/en not_active Expired - Lifetime
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5465076A (en) * | 1977-11-01 | 1979-05-25 | Yoshio Iijima | Filament burn prevented ionization vacuum gauge |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2000292297A (en) * | 1999-03-24 | 2000-10-20 | Boc Group Plc:The | Vacuum gauge |
WO2010106792A1 (en) * | 2009-03-18 | 2010-09-23 | 株式会社アルバック | Method for detecting oxigen, method for determining air leakage, gas component detector, and vacuum processor |
DE112010001207T5 (en) | 2009-03-18 | 2012-09-20 | Ulvac, Inc. | Oxygen detection method, air leak determination method, gas component detection apparatus, and vacuum processing apparatus |
US8288715B2 (en) | 2009-03-18 | 2012-10-16 | Ulvac, Inc. | Oxygen detection method, air leakage determination method, gas component detection device, and vacuum processing apparatus |
JP5054226B2 (en) * | 2009-03-18 | 2012-10-24 | 株式会社アルバック | Oxygen detection method, air leak discrimination method, gas component detection device, and vacuum processing device |
Also Published As
Publication number | Publication date |
---|---|
JPH0810171B2 (en) | 1996-01-31 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
SE7710961L (en) | SECURITY DEVICE | |
JPS6410143A (en) | Ionization gauge | |
JPS5741270A (en) | Circuit for detecting steering angle center of vehicle | |
JPS6475988A (en) | Alarming dosimeter | |
JPS6447988A (en) | Detector | |
JPS6439220A (en) | Current-limiting breaker | |
KR900017066A (en) | Electronic tube device | |
FR2279184A1 (en) | Electrically operated device control - periodically interrupts power supply to at least part of device | |
JPH039022Y2 (en) | ||
JPS55163421A (en) | Fire detector employing pyroelectric infrared ray detector | |
JPS5522169A (en) | Sensor circuit | |
JPS6469962A (en) | Detecting apparatus of contact resistance | |
JPS54136898A (en) | Air contamination detecting device | |
JPS52114128A (en) | Flame detective device | |
JPS51123901A (en) | Detector device for detecting clogging of plunger pump | |
JPS6421598A (en) | Fire alarm device | |
JPS6414855A (en) | Ion implantation device | |
JPS57128804A (en) | Detecting circuit for steering angle center for car | |
JPS54156152A (en) | Trouble detector for power switch | |
JPS57132022A (en) | Detector for amount of powder | |
JPS5733336A (en) | Checker for pressure gage | |
JPS5612569A (en) | Body detecting device | |
JPS5598343A (en) | Determining method of gas concentration | |
JPS54153697A (en) | Ionization type smoke detector | |
JPS6459045A (en) | Electronic counting device |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
EXPY | Cancellation because of completion of term | ||
FPAY | Renewal fee payment (prs date is renewal date of database) |
Year of fee payment: 12 Free format text: PAYMENT UNTIL: 20080131 |