JPS6410141A - Pressure sensor - Google Patents

Pressure sensor

Info

Publication number
JPS6410141A
JPS6410141A JP16617887A JP16617887A JPS6410141A JP S6410141 A JPS6410141 A JP S6410141A JP 16617887 A JP16617887 A JP 16617887A JP 16617887 A JP16617887 A JP 16617887A JP S6410141 A JPS6410141 A JP S6410141A
Authority
JP
Japan
Prior art keywords
capsule
vibration beam
single crystal
compressive strain
resonance frequency
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP16617887A
Other languages
Japanese (ja)
Other versions
JPH0468576B2 (en
Inventor
Kyoichi Ikeda
Kinji Harada
Sunao Nishikawa
Takashi Yoshida
Hideki Kuwayama
Takashi Kobayashi
Tetsuya Watanabe
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Yokogawa Electric Corp
Original Assignee
Yokogawa Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Yokogawa Electric Corp filed Critical Yokogawa Electric Corp
Priority to JP16617887A priority Critical patent/JPS6410141A/en
Publication of JPS6410141A publication Critical patent/JPS6410141A/en
Publication of JPH0468576B2 publication Critical patent/JPH0468576B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0001—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means
    • G01L9/0008—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means using vibrations
    • G01L9/0022—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means using vibrations of a piezoelectric element

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Fluid Pressure (AREA)
  • Pressure Sensors (AREA)

Abstract

PURPOSE:To perform pressure detection by a simple constitution with high accuracy by applying a single crystal vibration beam in a capsule of silicon single crystal with measurement pressure which is applied to the capsule and measuring its resonance frequency. CONSTITUTION:When the measurement pressure is applied to the capsule 8 made of the silicon single crystal from the periphery, the capsule 8 has compressive strain. This compressive strain is applied to the vibration beam 10 of silicon single crystal formed integrally with the capsule 8 in the hollow chamber 9 of the capsule 8. The vibration beam 10 causes tension variation corresponding to the applied compressive strain and varies in resonance frequency. The vibration beam 10 is applied with a DC magnetic field phi from a permanent magnet 11, so when an AC current is applied to the vibration beam 10 from an excitation part, a positive feedback system including an amplifier 13 oscillates at an oscillation frequency corresponding to the resonance frequency of the vibration beam 10. For the purpose, this oscillation frequency is measured to measure the pressure applied to the capsule 8 indirectly.
JP16617887A 1987-07-02 1987-07-02 Pressure sensor Granted JPS6410141A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16617887A JPS6410141A (en) 1987-07-02 1987-07-02 Pressure sensor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16617887A JPS6410141A (en) 1987-07-02 1987-07-02 Pressure sensor

Publications (2)

Publication Number Publication Date
JPS6410141A true JPS6410141A (en) 1989-01-13
JPH0468576B2 JPH0468576B2 (en) 1992-11-02

Family

ID=15826524

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16617887A Granted JPS6410141A (en) 1987-07-02 1987-07-02 Pressure sensor

Country Status (1)

Country Link
JP (1) JPS6410141A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0777116A1 (en) * 1995-12-01 1997-06-04 Solartron Group Limited Pressure sensor with pressure sensitive housing
JP2006329846A (en) * 2005-05-27 2006-12-07 Yokogawa Electric Corp Pressure sensor and diagnostic method for clogging of pressure sensor
JP2012132806A (en) * 2010-12-22 2012-07-12 Yokogawa Electric Corp Vibration-type absolute pressure transducer
JP2012150029A (en) * 2011-01-20 2012-08-09 Yokogawa Electric Corp Vibration type transducer and method of manufacturing the same

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0777116A1 (en) * 1995-12-01 1997-06-04 Solartron Group Limited Pressure sensor with pressure sensitive housing
US5844141A (en) * 1995-12-01 1998-12-01 Solartron Group Limited Pressure sensor having stress sensitive member
JP2006329846A (en) * 2005-05-27 2006-12-07 Yokogawa Electric Corp Pressure sensor and diagnostic method for clogging of pressure sensor
JP2012132806A (en) * 2010-12-22 2012-07-12 Yokogawa Electric Corp Vibration-type absolute pressure transducer
JP2012150029A (en) * 2011-01-20 2012-08-09 Yokogawa Electric Corp Vibration type transducer and method of manufacturing the same

Also Published As

Publication number Publication date
JPH0468576B2 (en) 1992-11-02

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Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees