JPS6410079U - - Google Patents
Info
- Publication number
- JPS6410079U JPS6410079U JP10361887U JP10361887U JPS6410079U JP S6410079 U JPS6410079 U JP S6410079U JP 10361887 U JP10361887 U JP 10361887U JP 10361887 U JP10361887 U JP 10361887U JP S6410079 U JPS6410079 U JP S6410079U
- Authority
- JP
- Japan
- Prior art keywords
- pull
- attached
- out rod
- sealed tube
- magnet
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000007791 liquid phase Substances 0.000 claims description 3
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 2
- 229910052799 carbon Inorganic materials 0.000 claims description 2
- 239000000758 substrate Substances 0.000 claims 2
- 239000010409 thin film Substances 0.000 claims 1
- 238000001816 cooling Methods 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 230000007723 transport mechanism Effects 0.000 description 1
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
Description
第１図ａは本考案の第１の実施例を示す縦断面
図、第１図ｂは第１図ａの主要部拡大図、第２図
は本考案の第２の実施例を示す縦断面図、第３図
ａは従来の液相エピタキシヤル成長装置を示す縦
断面図、第３図ｂは第３図ａの主要部拡大図であ
る。
１……石英反応管、２……カーボンボート、３
……抵抗ヒータ、４……フロントハツチ、５……
ボート支持棒、６……密閉管、７，９……マグネ
ツト、８……スライダ用引出し棒、１０……ボー
ト駆動機構、１１……ボート搬送機構、１２……
ボート冷却室、１３……ゲートバルブ、１４……
作業ＢＯＸ。
Fig. 1a is a longitudinal cross-sectional view showing the first embodiment of the present invention, Fig. 1b is an enlarged view of the main part of Fig. 1a, and Fig. 2 is a longitudinal cross-section showing the second embodiment of the present invention. 3A is a vertical sectional view showing a conventional liquid phase epitaxial growth apparatus, and FIG. 3B is an enlarged view of the main part of FIG. 3A. 1...Quartz reaction tube, 2...Carbon boat, 3
...Resistance heater, 4...Front hatch, 5...
Boat support rod, 6... Sealed tube, 7, 9... Magnet, 8... Slider pull-out rod, 10... Boat drive mechanism, 11... Boat transport mechanism, 12...
Boat cooling room, 13... Gate valve, 14...
Work box.
Claims (1)
エピタキシヤル成長させる液相エピタキシヤル成
長装置において、前記基板を搭載するカーボンボ
ートのスライダに装備した引出し棒が前記反応管
から突出する管端部に、外気から遮断された密閉
管を設け、前記引出し棒の突出端を該密閉管内に
摺動可能に収容し、該引出し棒の突出端にマグネ
ツトを取付け、該引出し棒のマグネツトに吸着す
るマグネツトを前記密閉管の長さ方向に往復動可
能に設置したことを特徴とする液相エピタキシヤ
ル成長装置。 In a liquid phase epitaxial growth apparatus for epitaxially growing a thin film on a substrate in a reaction tube equipped with a heater, a pull-out rod attached to a slider of a carbon boat on which the substrate is mounted is attached to an end of the tube protruding from the reaction tube. , a sealed tube isolated from the outside air is provided, the protruding end of the pull-out rod is slidably accommodated in the sealed tube, a magnet is attached to the protruding end of the pull-out rod, and a magnet is attached to the magnet of the pull-out rod. A liquid phase epitaxial growth apparatus characterized in that the sealed tube is installed so as to be movable back and forth in the length direction of the sealed tube.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10361887U JPS6410079U (en) | 1987-07-06 | 1987-07-06 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10361887U JPS6410079U (en) | 1987-07-06 | 1987-07-06 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6410079U true JPS6410079U (en) | 1989-01-19 |
Family
ID=31334614
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10361887U Pending JPS6410079U (en) | 1987-07-06 | 1987-07-06 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6410079U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105340095A (en) * | 2013-06-25 | 2016-02-17 | 日本超导体技术公司 | Cryostat |
-
1987
- 1987-07-06 JP JP10361887U patent/JPS6410079U/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105340095A (en) * | 2013-06-25 | 2016-02-17 | 日本超导体技术公司 | Cryostat |
| CN105340095B (en) * | 2013-06-25 | 2017-12-29 | 日本超导体技术公司 | Cryostat |