JPS6395864A - Electrostatic actuator - Google Patents
Electrostatic actuatorInfo
- Publication number
- JPS6395864A JPS6395864A JP24124786A JP24124786A JPS6395864A JP S6395864 A JPS6395864 A JP S6395864A JP 24124786 A JP24124786 A JP 24124786A JP 24124786 A JP24124786 A JP 24124786A JP S6395864 A JPS6395864 A JP S6395864A
- Authority
- JP
- Japan
- Prior art keywords
- electrode
- electrodes
- rotor
- movable element
- drive
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001514 detection method Methods 0.000 claims abstract description 55
- 239000000758 substrate Substances 0.000 abstract description 20
- 239000000463 material Substances 0.000 description 9
- 239000011521 glass Substances 0.000 description 7
- 239000011295 pitch Substances 0.000 description 7
- 238000010586 diagram Methods 0.000 description 6
- 230000005684 electric field Effects 0.000 description 6
- 239000003989 dielectric material Substances 0.000 description 4
- 238000000034 method Methods 0.000 description 4
- 229910052451 lead zirconate titanate Inorganic materials 0.000 description 3
- HFGPZNIAWCZYJU-UHFFFAOYSA-N lead zirconate titanate Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ti+4].[Zr+4].[Pb+2] HFGPZNIAWCZYJU-UHFFFAOYSA-N 0.000 description 3
- 229910052751 metal Inorganic materials 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- 239000000919 ceramic Substances 0.000 description 2
- 229910010293 ceramic material Inorganic materials 0.000 description 2
- NKZSPGSOXYXWQA-UHFFFAOYSA-N dioxido(oxo)titanium;lead(2+) Chemical compound [Pb+2].[O-][Ti]([O-])=O NKZSPGSOXYXWQA-UHFFFAOYSA-N 0.000 description 2
- 238000005530 etching Methods 0.000 description 2
- 230000007274 generation of a signal involved in cell-cell signaling Effects 0.000 description 2
- 230000008018 melting Effects 0.000 description 2
- 238000002844 melting Methods 0.000 description 2
- 150000002739 metals Chemical class 0.000 description 2
- 238000000059 patterning Methods 0.000 description 2
- 239000005011 phenolic resin Substances 0.000 description 2
- 239000004033 plastic Substances 0.000 description 2
- 229920003023 plastic Polymers 0.000 description 2
- 230000001360 synchronised effect Effects 0.000 description 2
- 229910052715 tantalum Inorganic materials 0.000 description 2
- 238000007740 vapor deposition Methods 0.000 description 2
- 229910002113 barium titanate Inorganic materials 0.000 description 1
- JRPBQTZRNDNNOP-UHFFFAOYSA-N barium titanate Chemical compound [Ba+2].[Ba+2].[O-][Ti]([O-])([O-])[O-] JRPBQTZRNDNNOP-UHFFFAOYSA-N 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 230000010287 polarization Effects 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 125000006850 spacer group Chemical group 0.000 description 1
- 230000002269 spontaneous effect Effects 0.000 description 1
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
- Transmission And Conversion Of Sensor Element Output (AREA)
Abstract
Description
【発明の詳細な説明】
［産業上の利用分野］
本発明は静電力を用いて可動子を８勤させる静電アクチ
ュエータに関するものである。DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to an electrostatic actuator that uses electrostatic force to move a mover eight times.
［従来の技術］
従来のアクチュエータは主として電磁力を利用したもの
であり、その特質上電磁コイルや永久磁石等を備えなけ
ればならず、構造が複雑であった。また消費電力も非常
に大きく、アクチュエータよりの発熱量も太きかった。[Prior Art] Conventional actuators mainly utilize electromagnetic force, and due to their characteristics, they must be equipped with electromagnetic coils, permanent magnets, etc., and have a complicated structure. Furthermore, the power consumption was extremely high, and the amount of heat generated by the actuator was also large.
このため、電磁式に比べ、低消費電力、高効率、小型
化可能という面から静電アクチュエータが注目されてい
る。For this reason, electrostatic actuators are attracting attention because they have lower power consumption, higher efficiency, and can be made smaller than electromagnetic actuators.
［発明が解決しようとする問題点］
しかし、一般に静電型アクチュエータは駆動力やトルク
が電磁式に比べて弱く、パルス駆動させた場合、負荷の
変動、および、慣性の大きな負荷に対し、同期がとれな
くなり、甚だしい場合には停止してしまうことがあった
。[Problems to be solved by the invention] However, in general, electrostatic actuators have weaker driving force and torque than electromagnetic actuators, and when driven in pulses, they cannot be synchronized against load fluctuations or loads with large inertia. In extreme cases, the system could stop working.
また、上記と同じ理由で、アクチュエータの起動時には
所定の速度や回転数になるまで人が駆動パルス周波数を
うまく同期するよう変化、調整する必要があった。Furthermore, for the same reason as mentioned above, when starting the actuator, it was necessary for a person to change and adjust the drive pulse frequency until it reaches a predetermined speed or rotational speed so as to be well synchronized.
また、直線運動をするアクチュエータではその速度より
も停止位置を正確に制御することが重要であるが、従来
のものは慣性負荷のため位置ずれを生じており、正確に
停止させることはできなかった。In addition, for actuators that move in a straight line, it is more important to precisely control the stopping position than the speed, but conventional actuators suffer from positional deviation due to inertial loads, making it impossible to stop accurately. .
上述の問題点を解決するために、例えば、別途光学式の
エンコーダ等をアクチュエータに取りつける試みがなさ
れているが、型が大きくなり、複雑な構成となってしま
った。In order to solve the above-mentioned problems, attempts have been made to separately attach an optical encoder or the like to the actuator, but this has resulted in a larger mold and a more complicated configuration.
Ｃ問題点を解決するための手段］
本発明は、上記従来例の問題点を解決する目的でなされ
たもので、この目的を達成する一手段として本実施例は
以下の構成を備える。Means for Solving Problem C] The present invention has been made for the purpose of solving the problems of the above-mentioned conventional example, and as a means for achieving this purpose, the present embodiment has the following configuration.
即ち、複数の電極パターンを所定の間隔で配設した固定
子と、該固定子の電極パターン配設面と一定の間隙をお
いて相対的に移動可能な可動子と、固定子の電極パター
ンの一部に順次電圧を印加し印加電極と可動子間に発生
する静電力により該可動子を移動させる移動手段と、該
移動手段による可動子の移動により発生する特定電極と
可動子間の静電容量の変化により、該特定電極に説起さ
れる電圧又は電流を検出する検出手段とを備える。That is, a stator in which a plurality of electrode patterns are arranged at predetermined intervals, a movable element that is movable relative to a surface of the stator on which the electrode patterns are arranged at a certain gap, and A moving means that sequentially applies a voltage to a part of the movable element and moves the movable element by electrostatic force generated between the applied electrode and the movable element, and an electrostatic charge between a specific electrode and the movable element that is generated when the movable element is moved by the moving means. and detection means for detecting the voltage or current induced in the specific electrode due to a change in capacitance.
［作用コ
以上の構成により、可動子の移動位置検出に特別の構成
を備えなくとも、他と同一の電極よりの静電容量の変化
による銹起電流を検出するのみで、可動子と電極間の位
置関係が検出できる。[Operation] With the above configuration, there is no need for a special configuration to detect the moving position of the movable element, and it is possible to simply detect the galvanic current due to a change in capacitance from the same electrode, and to detect the current between the movable element and the electrode. The positional relationship between can be detected.
［実施例］
以下、図面を参照して本発明に係る一実施例を詳細に説
明する。[Example] Hereinafter, an example according to the present invention will be described in detail with reference to the drawings.
［第１実施例コ
第１図は本発明に係る一実施例の分解斜視図であり、第
２図はその断面図である。[First Embodiment] FIG. 1 is an exploded perspective view of an embodiment according to the present invention, and FIG. 2 is a sectional view thereof.
図中１は誘電体より成るロータであり、ロータ１には回
転軸２の軸線より放射状に所定間隔の切り欠き部１ａが
配設されている。本実施例では、ロータ１はＰＺＴ（チ
タン酸ジルコン酸鉛）により構成されている。このロー
タ１はＰＺＴに限るものではなく、例えば比話電率がε
＝４〜１０，０００程度の高話電率材料であり、また、
約ｘ（＋−１２〜１（）−＋３Ω・ｃｍ程度の微弱な導
電性を有する誘電体であればよく、チタン酸バリウム、
チタン酸鉛等の高誘電率セラミック材料が適する。更に
、フェノール樹脂やガラス等で形成することもできる。In the figure, reference numeral 1 denotes a rotor made of a dielectric material, and the rotor 1 is provided with notches 1a radially extending from the axis of a rotating shaft 2 at predetermined intervals. In this embodiment, the rotor 1 is made of PZT (lead zirconate titanate). This rotor 1 is not limited to PZT, and for example, the specific electric current is ε
= 4 to 10,000, which is a high call rate material, and
Any dielectric material having weak conductivity of approximately x(+-12 to 1()-+3 Ωcm) may be used;
High dielectric constant ceramic materials such as lead titanate are suitable. Furthermore, it can also be formed from phenol resin, glass, or the like.
２はロータ１の軸着された回転軸であり、上板５に設け
られた軸受７と下板６に設けられた軸受８とにより回動
可能に軸支されている。なお、ロータ１は厚さ０．４ｍ
ｍ、直径６６ｍｍであり、回転軸２は直径１．５ｍｍで
ある。Reference numeral 2 denotes a rotating shaft to which the rotor 1 is attached, and is rotatably supported by a bearing 7 provided on the upper plate 5 and a bearing 8 provided on the lower plate 6. Note that the rotor 1 has a thickness of 0.4 m.
m and a diameter of 66 mm, and the rotating shaft 2 has a diameter of 1.5 mm.
上板５下面及び下板６上面のロータ１対向面には基板４
が積層されており、基板４のロータ対内面にはそれぞれ
電極パターン３が配設されている。第１図では上板５の
基板４に配設された電極パターンは図示を省略している
が、下板６の基板４の電極パターンと同様である。但し
２１〜２４は検出用電極ａ −ｄであり、基板４の両対
向面に１対として配設されている。これら以外の電極は
駆動電極となり、下板６の基板４に配設された各駆動電
極には後述する第３図に示す駆動回路４゜よりφＡ、φ
Ｂ、φＣ１φＤの４相の電圧が順次所定のタイミングで
印加され、基板４上に回転磁界を発生させてロータ１を
回転させている。これに対して上板５の基板４に配設さ
れた電極は、接地電位に保持されている。しかし、ここ
に下板５の基板４に配設された対向電極の印加電圧と逆
極性の電圧を印加すれば、より大きな駆動カが得られる
。これらの電極３はロータ１の回転軸２の軸線に対して
放射状に所定の間隔となるよう蒸着して形成している。A substrate 4 is provided on the lower surface of the upper plate 5 and the upper surface of the lower plate 6 facing the rotor 1.
are laminated, and electrode patterns 3 are arranged on the rotor-paired inner surface of the substrate 4, respectively. Although the electrode pattern disposed on the substrate 4 of the upper plate 5 is not shown in FIG. 1, it is similar to the electrode pattern on the substrate 4 of the lower plate 6. However, 21 to 24 are detection electrodes a to d, which are arranged as a pair on both opposing surfaces of the substrate 4. Electrodes other than these serve as drive electrodes, and each drive electrode disposed on the substrate 4 of the lower plate 6 has φA, φ
Four phase voltages of B, φC1φD are sequentially applied at predetermined timings to generate a rotating magnetic field on the substrate 4 and rotate the rotor 1. On the other hand, the electrodes disposed on the substrate 4 of the upper plate 5 are held at ground potential. However, if a voltage of opposite polarity to the voltage applied to the counter electrode disposed on the substrate 4 of the lower plate 5 is applied here, a larger driving force can be obtained. These electrodes 3 are formed by vapor deposition at predetermined intervals radially with respect to the axis of the rotating shaft 2 of the rotor 1.
なお、この電極のパターニングはエツチング等、種々の
方法を取ることができる。本実施例においては、電極３
としてＣｒを用いているが、Ａｇ、Ａｕ、Ａ文、Ｃｕ等
の各種導電性金属を用いてバターニングしてもよく、放
電による電極の溶融を防ぐためＴｉやＴａ（タンタル）
等の高融点金属を用いてもよい。Note that various methods such as etching can be used for patterning this electrode. In this example, the electrode 3
Although Cr is used as the electrode, buttering may be performed using various conductive metals such as Ag, Au, A-based metal, and Cu. Ti or Ta (tantalum) may be used to prevent the electrode from melting due to discharge.
You may use high melting point metals such as.
本実施例では上板５、下板６及び基板４はガラスにより
構成されている。しかし、これらはガラスに限るもので
はなく、絶縁性のあるものであればプラスチックスやセ
ラミックス等であってもよい。In this embodiment, the upper plate 5, lower plate 6, and substrate 4 are made of glass. However, these materials are not limited to glass, and may be made of plastics, ceramics, or the like as long as they have insulation properties.
このロータ１と基板４間は、不図示のスペーサ及びネジ
により所定間隙に保持され、図の矢印Ａ又は矢印Ｂ方向
に回動可能に構成されている。A predetermined gap is maintained between the rotor 1 and the substrate 4 by spacers and screws (not shown), and the rotor 1 is configured to be rotatable in the direction of arrow A or arrow B in the figure.
本実施例においては、電極３の平均パターン幅１ｍｍ、
パターンピッチ２ｍｍに形成し、電極３とロータ１、ロ
ータ１と上板５との間隔は共に０．２５ｍ ｍとしてい
る。In this example, the average pattern width of the electrode 3 is 1 mm,
The pattern pitch is 2 mm, and the distances between the electrodes 3 and the rotor 1, and between the rotor 1 and the upper plate 5 are both 0.25 mm.
この電極パターンピッチ及び間隙を微小化することによ
り、ロータ１上に発生するトルクはより大きなものとな
る。By making the electrode pattern pitch and gap smaller, the torque generated on the rotor 1 becomes larger.
本実施例の原理構成の模式図を第２図に示す。A schematic diagram of the principle configuration of this embodiment is shown in FIG.
図中、２１〜２４は検出用電極ａ ｙ ｄであり、各電
極間には抵抗ｒ ａ ％ ｒ ｄ及び検出用電源Ｑａ〜
Ｑｄが直列に接続されており、ロータ１の切り欠き部１
ａとそれ以外の訪電体群（ロータ部）とがこの検出用電
極間を移動することによる静電容量の変化を検出可能と
なっている。１１〜１４はφＡ〜φＤの駆動パルス出力
を示し、３１〜３４は駆動回路（４０）内の模式的に表
された駆動スイッチ３１〜３４である。図示の如く本実
施例においては、図示の如く切り欠き部１ａの６ピツチ
と電極パターン３の５ピツチが丁度等しく構成されてい
る。In the figure, 21 to 24 are detection electrodes ayd, and between each electrode there is a resistance r a% r d and a detection power supply Qa to
Qd are connected in series, and the notch 1 of the rotor 1
It is possible to detect the change in capacitance caused by the movement of a and the other current visiting body group (rotor part) between the detection electrodes. 11 to 14 indicate drive pulse outputs of φA to φD, and 31 to 34 are drive switches 31 to 34 schematically shown in the drive circuit (40). As shown in the figure, in this embodiment, the 6 pitches of the notch portion 1a and the 5 pitches of the electrode pattern 3 are exactly equal, as shown in the figure.
本実施例の電極制御部の構成を第３図に示す。FIG. 3 shows the configuration of the electrode control section of this example.
第３図において、４０は駆電極Ａ〜Ｄに駆動電圧を印加
制御する駆動回路、４１は検出用電極ａ〜ｄ（２１〜２
４）よりの検出信号を増幅すると共に、該検出信号より
、駆動電極Ａ−Ｄの駆動タイミングを生成し、駆動回路
４０に出力する制御回路、４２は検出用電極ａ−ｄ（２
１〜２４）に検出用直流電圧を供給する電源回路である
。In FIG. 3, 40 is a drive circuit that controls the application of drive voltage to the drive electrodes A to D, and 41 is the detection electrode A to D (21 to 2
4) A control circuit that amplifies the detection signal from the detection electrodes A to D, and generates drive timing for the drive electrodes A to D from the detection signal, and outputs it to the drive circuit 40;
This is a power supply circuit that supplies a detection DC voltage to 1 to 24).
以上の構成を備える本実施例の制御を第４図のタイミン
グチャートを参照して以下説明する。The control of this embodiment having the above configuration will be explained below with reference to the timing chart of FIG.
今、可動子１が矢印Ａ方向に移動している場合を考え、
第２図の状態時を時刻“Ｏ”とすると、検出用電極２１
では誘電体部３５がすべり込むため、電極間の静電容量
が増加し、上部電極２１ａに向って正方向の電流が流れ
込む。一方、この瞬間検出用電ｇ ｃ ２３及び駆動用
電極Ｃにおいては静電容量は最大であり、矢印六方向に
たいする駆動トルクを維持するためには、φＣを出力す
るのは好ましくなく、ここでφＣ１３をオフとするのが
望ましい。このため、そのトリガ信号として検出用電極
ａ２１よりの検出電流Ｉａの立ち上がりを利用する。Now, consider the case where mover 1 is moving in the direction of arrow A.
If the state shown in FIG. 2 is defined as time "O", the detection electrode 21
Since the dielectric portion 35 slides in, the capacitance between the electrodes increases, and current flows in the positive direction toward the upper electrode 21a. On the other hand, the capacitance is maximum in this instantaneous detection voltage g c 23 and the driving electrode C, and in order to maintain the driving torque in the six directions of the arrow, it is not preferable to output φC, and here φC13 It is desirable to turn it off. Therefore, the rise of the detection current Ia from the detection electrode a21 is used as the trigger signal.
このようにして検出用電極ａ２１間における静電容量は
増加を続け、次に時刻Ｔｃとなると誘電体部１は検出用
電極ａ２１間に完全に入り込む。In this way, the capacitance between the detection electrodes a21 continues to increase, and at the next time Tc, the dielectric portion 1 completely enters between the detection electrodes a21.
この時その静電容量は最大となっており、以後は静電容
量は減少するため、電極２１ａより電源Ｑａに向って逆
方向（電源充電方向）に電流が流れる。この時φＣ１３
駆動電極と誘電体部との関係は時刻“０”の検出用電極
ａ２１と誘電体部１との関係と同じ状態となる。即ち、
これから誘電体部を引き込む状態となり、φＣ１３の駆
動電極に電圧を印加すれば矢印Ａ方向への駆動トルクが
発生する。このため、この電流変化（Ｔｃ時）によりφ
Ｃ１３を出力すればよい。このように、検出用電極ａ２
１のＩａの変化検出信号によりφＣ１３を生成し、φＣ
駆動電極群の電圧印加を制御する。At this time, the capacitance is at its maximum, and since the capacitance decreases thereafter, a current flows in the opposite direction (power supply charging direction) from the electrode 21a toward the power supply Qa. At this time φC13
The relationship between the drive electrode and the dielectric portion is the same as the relationship between the detection electrode a21 and the dielectric portion 1 at time “0”. That is,
The dielectric portion is now in a state of being drawn in, and if a voltage is applied to the drive electrode of φC13, a drive torque in the direction of arrow A is generated. Therefore, due to this current change (at Tc), φ
It is sufficient to output C13. In this way, the detection electrode a2
φC13 is generated by the change detection signal of Ia of 1, and φC
Controls voltage application to the drive electrode group.
同様に、検出用電極ｂ２２のＩｂの変化検出信号により
φ０１４を生成し、φＤ駆動電極群の電圧印加を制御し
、検出用電極ｃ２３のＩｃの変化検出信号によりφＡｉ
ｌを生成し、φＡ駆動電極群の電圧印加を制御し、検出
用電極ｄ２４のＩｄの変化検出信号によりφＢ１２を生
成し、φＢＩＩＫ勅電極群の電圧印加を制御すればよい
。その制御タイミングは第２図に示す構成においては検
出用電極ａ２１のＩａの変化検出信号の周期の１／４周
期づつずれている。Similarly, φ014 is generated by the Ib change detection signal of the detection electrode b22, voltage application to the φD drive electrode group is controlled, and φAi is generated by the Ic change detection signal of the detection electrode c23.
It is sufficient to generate l, control the voltage application to the φA drive electrode group, generate φB12 based on the Id change detection signal of the detection electrode d24, and control the voltage application to the φBIIK electrode group. In the configuration shown in FIG. 2, the control timing is shifted by 1/4 period of the period of the change detection signal of Ia of the detection electrode a21.
電流Ｉｘの変化の検出は、抵抗ｒｘの電極側における電
位の変化を検出すれば容易に検出でき、制御回路４１で
はこの電極側よりの信号を不図示の増幅器で増幅し、こ
れを反転させて各対応する駆動回路駆動信号を得ている
。この駆動回路４０による電極３への電圧印加は、各相
（各電極）に（ＯＶ／＋Ｖ）Ｖのパルス状電圧を印加し
て行なう。A change in current Ix can be easily detected by detecting a change in potential on the electrode side of resistor rx, and the control circuit 41 amplifies the signal from this electrode side with an amplifier (not shown) and inverts it. Each corresponding drive circuit has obtained a drive signal. The drive circuit 40 applies voltage to the electrodes 3 by applying a pulsed voltage of (OV/+V)V to each phase (each electrode).
φＡ１１．φＢ１２．φＣ１３，φＤ１４の各相に、第
４図に示すようなパルス状の電圧を加えると、第２図の
矢印Ａの方向に移動電界が発生する。すると、ロータ１
の誘電体部にこの移動電界により電荷が誘起され、移動
電界に対しであるすべりをもって同じ矢印Ａ方向に追従
する駆動力が働く０例えば、ある電極に“＋”電位が印
加されると、該電極間のロータ１の誘電体部表面近傍に
電極への印加電圧と逆の極性をもった電荷（この場合に
は“−”電荷）が誘電体部の誘電分極あるいは微弱な導
電性により、局所的にチャージされる。この状態時に電
極に印加される電位が変化し（相が切り変わり）隣接す
る電極部に電圧が印加されると、該印加電極よりの電気
力線により、力Ｆ＝ｑＥ （ｑ ；誘電体部に蓄積され
た表面電荷、Ｅ：電気力線の回転方向の電界の強さ）が
働き、移動トルクが生じることになる。φA11. φB12. When a pulsed voltage as shown in FIG. 4 is applied to each phase of φC13 and φD14, a moving electric field is generated in the direction of arrow A in FIG. 2. Then, rotor 1
This moving electric field induces charges in the dielectric part of the moving electric field, and a driving force that follows the moving electric field in the same direction of arrow A with a certain slip is applied.For example, when a "+" potential is applied to a certain electrode, the Near the surface of the dielectric part of the rotor 1 between the electrodes, a charge with a polarity opposite to the voltage applied to the electrode (in this case, a "-" charge) is locally generated due to the dielectric polarization or weak conductivity of the dielectric part. is charged. In this state, when the potential applied to the electrode changes (the phase changes) and a voltage is applied to the adjacent electrode part, the electric force lines from the applied electrode cause a force F = qE (q; dielectric part The surface charge accumulated on the surface (E: electric field strength in the direction of rotation of electric lines of force) acts to generate a moving torque.
なお、逆方向にロータ１を動かすには、印加電圧の相順
を逆にしてやればよい。Note that in order to move the rotor 1 in the opposite direction, the phase order of the applied voltages may be reversed.
［第２実施例］
また、上記説明は駆動電極相数４の場合を説明したが、
駆動電極の駆動相数はこれに限るものではなく、移動電
界を発生させられるものであれば信相でも構わない。[Second Embodiment] Also, the above explanation describes the case where the number of drive electrode phases is 4, but
The number of drive phases of the drive electrodes is not limited to this, and any number of phases may be used as long as a moving electric field can be generated.
駆動電極総数を６相とした場合の例を第５図に示す。図
示の如く検出用電極をａｘｅ（２１〜２５）とし、切り
欠き部１ａの７ピツチと、電極パターン３の６ピツチが
丁度等しく構成されている。FIG. 5 shows an example in which the total number of drive electrodes is six phases. As shown in the figure, the detection electrodes are axes (21 to 25), and the seven pitches of the cutout portion 1a and the six pitches of the electrode pattern 3 are exactly equal.
以上の構成とした場合の検出信号と駆動電極の駆動タイ
ミングを第７図に示す。図示の如く、第１実施例の４相
駆動の場合との相違は、検出用電極よりの上述の４相の
場合と同様の検出信号の変化のタイミングと駆動信号の
出力タイミングとが同一ではなく、所定の遅延時間Ｔｄ
を持っていることである。これは、誘電体が駆動電極間
に入り込む瞬間に当該駆動電極間に駆動電位を印加する
ためである。FIG. 7 shows the detection signal and drive timing of the drive electrode in the case of the above configuration. As shown in the figure, the difference from the four-phase drive case of the first embodiment is that the timing of change in the detection signal from the detection electrode and the output timing of the drive signal are not the same as in the above-mentioned four-phase case. , predetermined delay time Td
It is to have. This is because a drive potential is applied between the drive electrodes at the moment the dielectric material enters between the drive electrodes.
［第３実施例］
以上２つの実施例では、駆動電極間に誘電体部を引き込
むタイプについて説明したが、本発明はこれに限るもの
ではなく、切り込み部を有する構成の可動子（ロータ１
）に替え、可動子を絶縁性を有する部材（ガラス、絶縁
性プラスチックス、セラミックス等）で構成し、該可動
子の基板４の電極パターン対向面に所定ピッチで電極パ
ターンを形成し、該可動子側電極と基板側電極との間の
逆極性の電位差により発生する電極間吸引力を利用して
可動子駆動力を得てもよい。[Third Embodiment] In the above two embodiments, the type in which the dielectric portion is drawn between the drive electrodes has been described, but the present invention is not limited to this.
), the movable element is made of an insulative member (glass, insulating plastics, ceramics, etc.), and electrode patterns are formed at a predetermined pitch on the surface of the substrate 4 of the movable element facing the electrode pattern. The movable element driving force may be obtained using an inter-electrode attractive force generated by a potential difference of opposite polarity between the child-side electrode and the substrate-side electrode.
この場合の構成を第７図に示す。The configuration in this case is shown in FIG.
ここでは、基板側は１面（例えば下板６側）にのみ基板
４を配設し、基板側電極が１面のみ配設された例を示し
ている。Here, an example is shown in which the substrate 4 is disposed only on one side (for example, the lower plate 6 side) and the substrate side electrodes are disposed only on one side.
可動子側の電極は全て接地電位としており、基板４側の
電極に第４図に示す各駆動信号を印加すればよい。All the electrodes on the movable element side are set at ground potential, and each drive signal shown in FIG. 4 may be applied to the electrodes on the substrate 4 side.
［第４実施例］
以上の説明は駆動軸２を中心に円運動を行なうモータ構
造の静電アクチュエータについて説明したが、本発明は
これに限るものではなく、ロータ１に変え、可動子が平
行移動するタイプの静電アクチュエータに使用すること
もできる。この可動子が平行移動するタイプの静電アク
チュエータを第８図に示す。[Fourth Embodiment] Although the above description has been made regarding an electrostatic actuator having a motor structure that performs circular motion around the drive shaft 2, the present invention is not limited to this. It can also be used for moving type electrostatic actuators. FIG. 8 shows a type of electrostatic actuator in which the movable element moves in parallel.
図中、８０はＡｎ等の導電性材料で形成されたベース、
８１はベース８０上に配設された固定子でその表面にφ
Ａ〜φＤの各電極が形成されている。本実施例において
は、固定子８１にはガラスを使用し、その表面に電極パ
ターンを蒸着して形成している。この電極のバターニン
グはエツチング等、種々の方法を取ることができる。固
定子８１は第１図の基板４と同一材料でよい。In the figure, 80 is a base made of a conductive material such as An,
81 is a stator disposed on the base 80 with φ
Each electrode of A to φD is formed. In this embodiment, the stator 81 is made of glass, and an electrode pattern is formed on its surface by vapor deposition. Various methods such as etching can be used for patterning the electrode. The stator 81 may be made of the same material as the substrate 4 of FIG.
また、８３は固定子対向面に電極８３ａの配設された可
動子であり、本実施例では可動子８３としてガラスを用
いている。固定子８１及び可動子８５の電極は第１図の
電極３と同一に形成された同−材料で形成されたもので
よい。Further, 83 is a movable element having an electrode 83a disposed on a surface facing the stator, and in this embodiment, glass is used as the movable element 83. The electrodes of the stator 81 and the movable element 85 may be made of the same material as the electrode 3 of FIG. 1.
φＡ、φＢ、φＣ９φＤの各相は順次第４図のタイミン
グチャート図示の如く駆動される。The phases φA, φB, φC9φD are sequentially driven as shown in the timing chart of FIG.
また８２ａ、８２ｂは固定子８１外方部に配設されたリ
テーナであり、リテーナ８２ａ、８２ｂ内に一定間隙で
非導電性のボール８５を保持している。以上の構成によ
りボール８５の良好な転勤状態を維持しつつ固定子１と
可動子３間の間隙を狭くすることができる。本例ではボ
ール８５の外径８００μｍ１固定子１の厚さ７９０μｍ
とし、間隙１０μｍを実現している。Further, 82a and 82b are retainers disposed outside the stator 81, and hold non-conductive balls 85 at a constant gap within the retainers 82a and 82b. With the above configuration, the gap between the stator 1 and the movable element 3 can be narrowed while maintaining a good transfer state of the balls 85. In this example, the outer diameter of the ball 85 is 800 μm, and the thickness of the stator 1 is 790 μm.
A gap of 10 μm was achieved.
本例においては、検出用電極として駆動用電極を兼用す
ることも可能であるが、ノイズ等の影響を避けるため、
駆動電極とは別に検出用型Ｆ７１８６を設けている。In this example, it is also possible to use the drive electrode as the detection electrode, but in order to avoid the influence of noise etc.
A detection mold F7186 is provided separately from the drive electrode.
［他の実施例］
なお、以上の説明は検出用電極よりの検出信号を全て駆
動電極の駆動タイミング制御に応用する例について説明
したが、本発明はこれに限るものではなく、検出用電極
よりの検出信号の周期を計測することにより、ロータ１
の回転数、又は可動子８３の移動速度を検出することも
できる。この場合の例を第９図に示す。[Other Embodiments] Although the above description has been made regarding an example in which all the detection signals from the detection electrodes are applied to drive timing control of the drive electrodes, the present invention is not limited to this, and the present invention is not limited to this. By measuring the period of the detection signal of rotor 1
It is also possible to detect the rotational speed of the movable element 83 or the moving speed of the movable element 83. An example of this case is shown in FIG.
第９図において、第３図と同様構成には同一番号を付し
た。図示の如く、制御回路４１と別に回転数検出回路４
３、計時回路４４を備えることにより、回転数検出回路
４３は計時回路４４により指定された所定時間当りの検
出用電極よりの検出信号を計数して容易に回転数を検出
することができる。これを利用すれば、駆動電極へのφ
Ａ〜φＤの駆動タイミング制御は上記の方法で検出した
特定回転数までとし、以後は所定周期の駆動信号を出力
する駆動信号生成回路４５よりの駆動信号に従って駆動
制御し、再び駆動回転数等が所定値をずれた場合に検出
用電極よりの検出信号に従って例えば第４図の如く制御
してもよい。In FIG. 9, the same components as in FIG. 3 are given the same numbers. As shown in the figure, a rotation speed detection circuit 4 is provided separately from the control circuit 41.
3. By providing the clock circuit 44, the rotation speed detection circuit 43 can easily detect the rotation speed by counting the detection signals from the detection electrodes per predetermined time specified by the clock circuit 44. By using this, φ to the drive electrode can be
The drive timing control for A to φD is performed up to the specific rotation speed detected by the above method, and thereafter the drive is controlled according to the drive signal from the drive signal generation circuit 45 that outputs a drive signal of a predetermined period, and the drive rotation speed etc. are controlled again. If the value deviates from a predetermined value, control may be performed as shown in FIG. 4, for example, according to the detection signal from the detection electrode.
また、第８図の場合等は検出用電極よりの検出信号を調
べることにより、可動子８３の移動位置を検出でき、こ
の検出信号により慣性負荷が大きくとも可動子８３の移
動速度を制御して、所望の停止位置に確実に停止させる
ことができる。In addition, in the case of FIG. 8, the moving position of the movable element 83 can be detected by checking the detection signal from the detection electrode, and the moving speed of the movable element 83 can be controlled by this detection signal even if the inertial load is large. , the vehicle can be reliably stopped at a desired stopping position.
以上説明した如く各実施例によれば、負荷変動や慣性負
荷によるパルス駆動の非同期、や、誤った位置への停止
等が、極めて簡単な構成で防止できる。As explained above, according to each of the embodiments, it is possible to prevent pulse drive asynchronousness due to load fluctuations or inertial loads, stopping at an incorrect position, etc. with an extremely simple configuration.
また、起動時に人が駆動周波数を可動子等の回転に同期
するよう変化させ、所望の周波数までもっていく必要が
なくなり、自動的にかつ確実に起動ができる。Further, there is no need for a person to change the drive frequency in synchronization with the rotation of the movable element etc. to reach the desired frequency at the time of startup, and the startup can be performed automatically and reliably.
更に、停止位置制御が必要な直線穆勅型のアクチュエー
タにおいても、慣性負荷による停止位置ずれの生じない
アクチュエータが提供できる。Furthermore, even in the case of a straight-line type actuator that requires stop position control, it is possible to provide an actuator in which the stop position does not shift due to inertial load.
また、特別なエンコータ機構を設ける必要がなく、構成
も簡単な、低コストのアクチュエータが提供できる。Moreover, it is not necessary to provide a special encoder mechanism, and a low-cost actuator with a simple configuration can be provided.
可動子として、エレクトレットのような特殊な材料は必
要なく、ガラスやフェノール樹脂のような安価な読電材
料でよい。A special material such as electret is not required for the mover, and an inexpensive current reading material such as glass or phenol resin may be used.
静電力で駆動するため、消費電力が極めて少なくて済み
、ジュール熱による発熱のおそれもない。Since it is driven by electrostatic force, power consumption is extremely low and there is no risk of generating heat due to Joule heat.
［発明の効果］
以上説明したように本発明によれば、特殊な材料でなく
、安価な材料によって構成度かつ低消費電力の静電アク
チュエータを提供できる。[Effects of the Invention] As described above, according to the present invention, an electrostatic actuator with high configuration and low power consumption can be provided using inexpensive materials instead of special materials.
第１図は本発明に係る一実施例の斜視図、第２図は本実
施例の動作を説明する図、第３図は本実施例の制御部の
ブロック図、第４図は本実施例の制御タイミングチャー
ト、第５図は本発明に係る他の実施例の動作を説明する
図、
第６図は第５図に示す実施例の制御タイミングチャート
、
第７図は本発明に係る更に他の実施例の動作を説明する
図、
第８図は本発明に係る他の実施例の斜視図、第９図は他
の実施例の制御部のブロック図である。
図中、１・・・ロータ、２・・・回転軸、３・・・電極
、４・・・基板、５・・・上板、６・・・下板、７．８
・・・軸受、２１〜２５．８６・・・検出用電極、４０
・・・駆動回路、４１・・・制御回路、４２・・・電源
回路、４３回転数検出回路、４４・・・計時回路、４５
・・・駆動信号生成回路、８０・・・ベース、８１・・
・固定子、８２ａ。
８２ｂ・・・リテーナ、８５・・・ボール、８６である
。
特許出願人 キャノン株式会社第 １ 口
第３図
第４図
第 ５図
を
箒６図
手続ネ市正書 （自発）
昭和６１年１２月 １日
特 許 庁 長 官 殿
１、事件の表示
特願昭６１−２４１２４７号
２、発明の名称
静電アクチュエータ
３、補正をする者
事件との関係 特許出願人
東京都大田区下丸子３丁目３０番２号
（Ｚｏｏ） キャノン株式会社
代表者 賀来龍三部
４、代 理 人 〒１０５東京都港区虎ノ
門１−２−１２
５、補正の対象
明細書の発明の詳細な説明の欄及び図面６、補正の内容
（１）明細書第６頁第１４行目から第１７行目を以下の
ように補正する。
ｒ程度の高誘電率材料であればよく、チタン酸バリウム
、チタン酸鉛等の高誘電率セラミック材料が適する。更
に、表面抵抗率が約１０１１〜１０１３０程度の微弱な
導電性を有する屈電体材料も使用可能であり、」
（２）明細書第８頁第２行目の「回転磁」を「回転電」
と補正する。
（３）明細書第１０頁第１４行目の「駆電極」を「駆動
用電極」と補正する。
（４）明細書第１６頁第２行目の「第７図」を「第６図
」と補正する。
（５）明細書第１８頁最下行の「８５」を「８３」と補
正する。
（６）明細書第２２頁第５行目「エンコータ」を「エン
コーダ」と補正する。
（７）第９図を別紙の通り補正する。Fig. 1 is a perspective view of an embodiment according to the present invention, Fig. 2 is a diagram explaining the operation of the embodiment, Fig. 3 is a block diagram of the control section of the embodiment, and Fig. 4 is a diagram of the embodiment. 5 is a diagram explaining the operation of another embodiment according to the present invention. FIG. 6 is a control timing chart of the embodiment shown in FIG. 5. FIG. 7 is a control timing chart of another embodiment according to the present invention. FIG. 8 is a perspective view of another embodiment according to the present invention, and FIG. 9 is a block diagram of a control section of another embodiment. In the figure, 1...rotor, 2...rotating shaft, 3...electrode, 4...substrate, 5...upper plate, 6...lower plate, 7.8
...Bearing, 21-25.86...Detection electrode, 40
... Drive circuit, 41 ... Control circuit, 42 ... Power supply circuit, 43 Rotation speed detection circuit, 44 ... Timing circuit, 45
... Drive signal generation circuit, 80... Base, 81...
- Stator, 82a. 82b...retainer, 85...ball, 86. Patent Applicant: Canon Co., Ltd. No. 1, Figure 3, Figure 4, Figure 5, Figure 6, Procedure Nei City Official Letter (Spontaneous), December 1, 1986, Patent Office Director General, 1, Patent application for indication of the incident. No. 61-241247 No. 2, Name of the invention Electrostatic actuator 3, Relationship to the amended person case Patent applicant 3-30-2 Shimomaruko, Ota-ku, Tokyo (Zoo) Canon Co., Ltd. Representative Ryu Kaku Sanbe 4; Agent 1-2-12 Toranomon, Minato-ku, Tokyo 105 5. Column for detailed explanation of the invention and drawing 6 in the specification subject to amendment, Contents of amendment (1) From line 14 on page 6 of the specification Correct the 17th line as follows. Any material with a high dielectric constant of about r may be used, and high dielectric constant ceramic materials such as barium titanate and lead titanate are suitable. Furthermore, dielectric materials having weak conductivity with a surface resistivity of about 1011 to 10130 can also be used, ”
and correct it. (3) "Drive electrode" on page 10, line 14 of the specification is corrected to "drive electrode." (4) "Figure 7" in the second line of page 16 of the specification is corrected to "Figure 6." (5) "85" on the bottom line of page 18 of the specification is corrected to "83". (6) "Encoder" on page 22, line 5 of the specification is corrected to "encoder." (7) Correct Figure 9 as shown in the attached sheet.
Claims (4)
子と、該固定子の電極パターン配設面と一定の間隙をお
いて相対的に移動可能な可動子と、前記固定子の電極パ
ターンの一部に順次電圧を印加し印加電極と前記可動子
間に発生する静電力により該可動子を移動させる移動手
段と、該移動手段による前記可動子の移動により発生す
る特定電極と可動子間の静電容量の変化により該特定電
極に誘起される電圧又は電流を検出する検出手段とを備
えることを特徴とする静電アクチュエータ。(1) A stator in which a plurality of electrode patterns are arranged at predetermined intervals, a movable element that is movable relative to the electrode pattern arrangement surface of the stator at a constant gap, and electrodes of the stator. A moving means that sequentially applies a voltage to a part of the pattern and moves the movable element by electrostatic force generated between the applied electrode and the movable element, and a specific electrode and the movable element generated by the movement of the movable element by the moving means. An electrostatic actuator comprising: a detection means for detecting a voltage or current induced in the specific electrode due to a change in capacitance between the electrodes.
とを交互に配設して成り、検出手段は接続電極への低又
は高誘電率部のすべり込み及びすべり出しにより当該電
極に誘起される電圧又は電流を検出することを特徴とす
る特許請求の範囲第１項記載の静電アクチュエータ。(2) The movable element is formed by alternately arranging high-permittivity parts and low-permittivity parts at predetermined intervals, and the detection means is induced by the sliding of the low or high permittivity part into and out of the connecting electrode. 2. The electrostatic actuator according to claim 1, wherein the electrostatic actuator detects a voltage or current.
ーンを配設し、検出手段は特定電極への該可動子電極の
すべり込み及びすべり出しにより当該電極に誘起される
電圧又は電流を検出することを特徴とする特許請求の範
囲第１項記載の静電アクチュエータ。(3) Electrode patterns are arranged at predetermined intervals on the surface of the mover facing the stator electrode, and the detection means detects the voltage or current induced in the electrode when the mover electrode slides into and out of a specific electrode. An electrostatic actuator according to claim 1, characterized in that:
圧印加タイミングを制御することを特徴とする特許請求
の範囲第１項より第３項のいずれかに記載の静電アクチ
ュエータ。(4) The electrostatic actuator according to any one of claims 1 to 3, wherein the moving means controls the timing of voltage application to the electrodes according to the detection result of the detection means.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP24124786A JPS6395864A (en) | 1986-10-13 | 1986-10-13 | Electrostatic actuator |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP24124786A JPS6395864A (en) | 1986-10-13 | 1986-10-13 | Electrostatic actuator |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6395864A true JPS6395864A (en) | 1988-04-26 |
Family
ID=17071395
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP24124786A Pending JPS6395864A (en) | 1986-10-13 | 1986-10-13 | Electrostatic actuator |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6395864A (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0546186A1 (en) * | 1991-05-27 | 1993-06-16 | Fujitsu Limited | Electrostatic actuator and controlling method thereof |
| WO2006082807A1 (en) * | 2005-02-07 | 2006-08-10 | National University Corporation Saitama University | Equivalent-capacitance type actuator drive device |
| JP2018078666A (en) * | 2016-11-07 | 2018-05-17 | ローム株式会社 | Electrostatic actuator driving circuit, camera module, electronic device, and capacity measurement circuit |
| JPWO2017159813A1 (en) * | 2016-03-17 | 2019-01-24 | シチズン時計株式会社 | Electrostatic electromechanical converter |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3629624A (en) * | 1970-03-23 | 1971-12-21 | Juergen H Staudte | Electrostatic motor |
-
1986
- 1986-10-13 JP JP24124786A patent/JPS6395864A/en active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3629624A (en) * | 1970-03-23 | 1971-12-21 | Juergen H Staudte | Electrostatic motor |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0546186A1 (en) * | 1991-05-27 | 1993-06-16 | Fujitsu Limited | Electrostatic actuator and controlling method thereof |
| EP0546186A4 (en) * | 1991-05-27 | 1994-01-12 | Fujitsu Limited | |
| US5534740A (en) * | 1991-05-27 | 1996-07-09 | Fujitsu Limited | Electrostatic actuator and method of controlling the same |
| WO2006082807A1 (en) * | 2005-02-07 | 2006-08-10 | National University Corporation Saitama University | Equivalent-capacitance type actuator drive device |
| JPWO2017159813A1 (en) * | 2016-03-17 | 2019-01-24 | シチズン時計株式会社 | Electrostatic electromechanical converter |
| JP2018078666A (en) * | 2016-11-07 | 2018-05-17 | ローム株式会社 | Electrostatic actuator driving circuit, camera module, electronic device, and capacity measurement circuit |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US9571010B2 (en) | Varying capacitance rotating electrical machine | |
| US4922164A (en) | Eccentric motion motor | |
| US4803389A (en) | Stepping motor, method of driving the same and drive circuit therefor | |
| JP2001524206A (en) | Clock with capacitance detection device | |
| JP2002513270A (en) | Vertical Hall effect sensor and brushless electric motor with vertical Hall effect sensor | |
| JPS58215967A (en) | Linear motor | |
| JP3006178B2 (en) | Electrostatic actuator | |
| JPH05260766A (en) | Electrostatic actuator | |
| JPS6395864A (en) | Electrostatic actuator | |
| WO2018174077A1 (en) | Electrostatic motor | |
| JPH02285978A (en) | Electrostatic actuator using film | |
| JPS63136979A (en) | Electrostatic actuator | |
| JPS6395868A (en) | Electrostatic actuator | |
| JP2015012791A (en) | Electrostatic motor | |
| JPS6395860A (en) | Electrostatic actuator | |
| JPS6395859A (en) | Electrostatic actuator | |
| JP2719365B2 (en) | Pyroelectric actuator | |
| CN111293935A (en) | DC motor with asymmetric stator inductors | |
| EP0758816A1 (en) | Flat reluctance type three-phase motor | |
| SU699590A1 (en) | Dc generator | |
| JP2000166263A (en) | Ultrasonic motor and electronic apparatus with ultrasonic motor | |
| JPS6395861A (en) | Electrostatic actuator | |
| JP3183319B2 (en) | Electrostatic actuator | |
| JPS6395866A (en) | Electrostatic actuator | |
| JPS6395863A (en) | Electrostatic actuator |